Hotta; Takanobu
Patent Applications and Registrations
Patent applications and USPTO patent grants for Hotta; Takanobu.The latest application filed is for "substrate processing method and substrate processing apparatus".
- Hotta; Takanobu - Nirasaki JP
- HOTTA; Takanobu - Nirasaki City JP
- Hotta; Takanobu - Yamanashi JP
- Hotta; Takanobu - Nirasaki-shi JP
| Patent | Date |
|---|---|
| Film forming method Grant 10,910,225 - Narushima , et al. February 2, 2 | 2021-02-02 |
| Substrate Processing Method And Substrate Processing Apparatus App 20210010130 - NARUSHIMA; Kensaku ; et al. | 2021-01-14 |
| Film forming method and film forming apparatus Grant 10,872,814 - Narushima , et al. December 22, 2 | 2020-12-22 |
| Substrate Processing Method and Film Forming System App 20200258747 - A1 | 2020-08-13 |
| Film Forming Method And Film Forming Apparatus App 20200098624 - NARUSHIMA; Kensaku ; et al. | 2020-03-26 |
| Method of Forming Tungsten Film and Controller App 20190292656 - NARUSHIMA; Kensaku ; et al. | 2019-09-26 |
| Flow Rate Control Method, Flow Rate Control Device, And Film Forming Apparatus App 20190284698 - MO; Kennan ; et al. | 2019-09-19 |
| Tungsten film forming method and storage medium Grant 10,400,330 - Suzuki , et al. Sep | 2019-09-03 |
| Film Forming Method App 20190164768 - NARUSHIMA; Kensaku ; et al. | 2019-05-30 |
| Method of forming metal film Grant 10,131,986 - Suzuki , et al. November 20, 2 | 2018-11-20 |
| Method of reducing stress in metal film and metal film forming method Grant 10,026,616 - Suzuki , et al. July 17, 2 | 2018-07-17 |
| Gas supply mechanism, gas supplying method, film forming apparatus and film forming method using the same Grant 9,938,620 - Moroi , et al. April 10, 2 | 2018-04-10 |
| Tungsten Film Forming Method And Storage Medium App 20170283942 - SUZUKI; Kenji ; et al. | 2017-10-05 |
| Method of forming tungsten film Grant 9,640,404 - Suzuki , et al. May 2, 2 | 2017-05-02 |
| Tungsten film forming method, semiconductor device manufacturing method, and storage medium Grant 9,536,782 - Hotta , et al. January 3, 2 | 2017-01-03 |
| Tungsten film forming method Grant 9,536,745 - Narushima , et al. January 3, 2 | 2017-01-03 |
| Tungsten Film Forming Method App 20160379879 - HOTTA; Takanobu ; et al. | 2016-12-29 |
| Method Of Reducing Stress In Metal Film And Metal Film Forming Method App 20160351402 - SUZUKI; Kenji ; et al. | 2016-12-01 |
| Method of Forming Metal Film App 20160348234 - SUZUKI; Kenji ; et al. | 2016-12-01 |
| Tungsten film forming method Grant 9,472,454 - Hotta , et al. October 18, 2 | 2016-10-18 |
| Method Of Forming Tungsten Film App 20160284553 - SUZUKI; Kenji ; et al. | 2016-09-29 |
| Tungsten Film Forming Method App 20160233099 - NARUSHIMA; Kensaku ; et al. | 2016-08-11 |
| Tungsten Film Forming Method App 20160040287 - AKASAKA; Yasushi ; et al. | 2016-02-11 |
| Gas Supply Mechanism, Gas Supplying Method, Film Forming Apparatus and Film Forming Method Using the Same App 20150275367 - MOROI; Masayuki ; et al. | 2015-10-01 |
| Tungsten Film Forming Method, Semiconductor Device Manufacturing Method, and Storage Medium App 20150279735 - HOTTA; Takanobu ; et al. | 2015-10-01 |
| Tungsten Film Forming Method App 20150279736 - HOTTA; Takanobu ; et al. | 2015-10-01 |
| Method For Forming Metal Nitride Film App 20120034793 - Narushima; Kensaku ; et al. | 2012-02-09 |
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