Hotta; Shoji
Patent Applications and Registrations
Patent applications and USPTO patent grants for Hotta; Shoji.The latest application filed is for "measurement system and measurement method".
- Hotta; Shoji - Tokyo JP
- Hotta; Shoji - Delmar NY US
- Hotta; Shoji - Ome JP
- Hotta; Shoji - Obu-shi JP
- Hotta; Shoji - Richmond CA
- Hotta, Shoji - US
| Patent | Date |
|---|---|
| Measurement system and measurement method Grant 10,002,743 - Hotta , et al. June 19, 2 | 2018-06-19 |
| Charged particle beam apparatus and inspection method using the same Grant 9,659,744 - Tsuno , et al. May 23, 2 | 2017-05-23 |
| Measurement System And Measurement Method App 20170047197 - HOTTA; Shoji ; et al. | 2017-02-16 |
| Charged Particle Beam Apparatus And Inspection Method Using The Same App 20160148781 - TSUNO; Natsuki ; et al. | 2016-05-26 |
| Electron beam measurement apparatus Grant 8,575,547 - Sohda , et al. November 5, 2 | 2013-11-05 |
| Method and apparatus for pattern position and overlay measurement Grant 8,148,682 - Hotta , et al. April 3, 2 | 2012-04-03 |
| Method and Apparatus for Pattern Position and Overlay Measurement App 20110155904 - HOTTA; Shoji ; et al. | 2011-06-30 |
| Defect inspection method and its system Grant 7,943,903 - Okazaki , et al. May 17, 2 | 2011-05-17 |
| Electron Beam Measurement Apparatus App 20110095183 - SOHDA; Yasunari ; et al. | 2011-04-28 |
| Electron beam measurement apparatus Grant 7,884,325 - Sohda , et al. February 8, 2 | 2011-02-08 |
| Defect inspection method and its system App 20090206252 - Okazaki; Shinji ; et al. | 2009-08-20 |
| Electron Beam Measurement Apparatus App 20090146057 - SOHDA; Yasunari ; et al. | 2009-06-11 |
| Manufacturing method of semiconductor device Grant 7,419,916 - Noguchi , et al. September 2, 2 | 2008-09-02 |
| Manufacturing method of semiconductor integrated circuit device Grant 7,387,867 - Hasegawa , et al. June 17, 2 | 2008-06-17 |
| Compressor App 20080006149 - Kato; Takayuki ; et al. | 2008-01-10 |
| Cast Aluminum Alloy Excellent In Relaxation Resistance Property And Method Of Heat-treating The Same App 20080000561 - IKUNO; Hajime ; et al. | 2008-01-03 |
| Manufacturing method of semiconductor device App 20070004189 - Noguchi; Junji ; et al. | 2007-01-04 |
| Manufacturing method of semiconductor device Grant 7,109,127 - Noguchi , et al. September 19, 2 | 2006-09-19 |
| Fabrication method of semiconductor integrated circuit device and mask Grant 6,939,649 - Hotta , et al. September 6, 2 | 2005-09-06 |
| Manufacturing method of semiconductor device App 20050118809 - Noguchi, Junji ; et al. | 2005-06-02 |
| Manufacturing method of semiconductor integrated circuit device App 20050090120 - Hasegawa, Norio ; et al. | 2005-04-28 |
| Semiconductor device and method of manufacturing the same Grant 6,774,020 - Fukada , et al. August 10, 2 | 2004-08-10 |
| Fabrication method of semiconductor integrated circuit device Grant 6,656,646 - Hotta , et al. December 2, 2 | 2003-12-02 |
| Semiconductor device and method of manufacturing the same App 20030139031 - Fukada, Shinichi ; et al. | 2003-07-24 |
| Semiconductor device and method of manufacturing the same Grant 6,555,464 - Fukada , et al. April 29, 2 | 2003-04-29 |
| Fabrication method of semiconductor integrated circuit device and mask App 20030073038 - Hotta, Shoji ; et al. | 2003-04-17 |
| Fabrication method of semiconductor integrated circuit device App 20030044721 - Hotta, Shoji ; et al. | 2003-03-06 |
| Semiconductor device and method of manufacturing the same App 20020127848 - Fukada, Shinichi ; et al. | 2002-09-12 |
| Method of manufacturing a semiconductor device App 20020076921 - Fukada, Shinichi ; et al. | 2002-06-20 |
| Method of manufacturing a semiconductor device Grant 6,340,632 - Fukada , et al. January 22, 2 | 2002-01-22 |
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