Patent | Date |
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Beam alignment method and electron microscope Grant 10,020,162 - Shimizu , et al. July 10, 2 | 2018-07-10 |
Beam Alignment Method and Electron Microscope App 20170301507 - Shimizu; Yuko ;   et al. | 2017-10-19 |
Chromatic aberration corrector and method of controlling same Grant 8,952,339 - Hosokawa February 10, 2 | 2015-02-10 |
Chromatic aberration corrector and electron microscope Grant 8,785,880 - Sawada , et al. July 22, 2 | 2014-07-22 |
Chromatic Aberration Corrector And Electron Microscope App 20140158901 - Sawada; Hidetaka ;   et al. | 2014-06-12 |
Electron microscope Grant 8,664,599 - Hosokawa March 4, 2 | 2014-03-04 |
Chromatic Aberration Corrector and Method of Controlling Same App 20140054468 - Hosokawa; Fumio | 2014-02-27 |
Chromatic aberration corrector for charged-particle beam system and correction method therefor Grant 8,178,850 - Sawada , et al. May 15, 2 | 2012-05-15 |
Electron Microscope App 20100224781 - Hosokawa; Fumio | 2010-09-09 |
Method of aberration correction and electron beam system Grant 7,763,862 - Hosokawa July 27, 2 | 2010-07-27 |
Chromatic Aberration Corrector for Charged-Particle Beam System and Correction Method Therefor App 20100084567 - Sawada; Hidetaka ;   et al. | 2010-04-08 |
Charged-particle beam system Grant 7,598,496 - Sawada , et al. October 6, 2 | 2009-10-06 |
Electron microscope Grant 7,420,179 - Hosokawa September 2, 2 | 2008-09-02 |
Charged-Particle Beam System App 20080128635 - SAWADA; Hidetaka ;   et al. | 2008-06-05 |
Aberration Corrector and Method of Aberration Correction App 20080093563 - Sawada; Hidetaka ;   et al. | 2008-04-24 |
Method of Aberration Correction and Electron Beam System App 20080054186 - Hosokawa; Fumio | 2008-03-06 |
Electron microscope App 20070114403 - Hosokawa; Fumio | 2007-05-24 |
Multipole field-producing apparatus in charged-particle optical system and aberration corrector Grant 7,060,985 - Hosokawa June 13, 2 | 2006-06-13 |
Multipole field-producing apparatus in charged-particle optical system and aberration corrector App 20050167607 - Hosokawa, Fumio | 2005-08-04 |
Charged-particle beam apparatus equipped with aberration corrector Grant 6,924,488 - Matsuya , et al. August 2, 2 | 2005-08-02 |
Spherical aberration corrector for electron microscope Grant 6,836,373 - Hosokawa December 28, 2 | 2004-12-28 |
Lens system for phase plate for transmission electron microscope and transmission electron microscope Grant 6,744,048 - Hosokawa , et al. June 1, 2 | 2004-06-01 |
Charged-particle beam apparatus equipped with aberration corrector App 20040036030 - Matsuya, Miyuki ;   et al. | 2004-02-26 |
Transmission electron microscope Grant 6,555,818 - Hosokawa April 29, 2 | 2003-04-29 |
Spherical aberration corrector for electron microscope App 20030029999 - Hosokawa, Fumio | 2003-02-13 |
Lens system for phase plate for transmission electron microscope and transmission electron microscope App 20020148962 - Hosokawa, Fumio ;   et al. | 2002-10-17 |
Stigmator assembly App 20020121609 - Hosokawa, Fumio | 2002-09-05 |