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Patent applications and USPTO patent grants for Hoshi; Tai.The latest application filed is for "aligning method, exposure method, exposure apparatus, and device manufacturing method".
Patent | Date |
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Aligning method, exposure method, exposure apparatus, and device manufacturing method Grant 7,212,286 - Hoshi May 1, 2 | 2007-05-01 |
Exposure method, plane alignment method, exposure apparatus, and device manufacturing method Grant 6,876,435 - Kataoka , et al. April 5, 2 | 2005-04-05 |
Aligning method, exposure method, exposure apparatus, and device manufacturing method App 20030003384 - Hoshi, Tai | 2003-01-02 |
Exposure method, plane alignment method, exposure apparatus, and device manufacturing method App 20020166982 - Kataoka, Yoshiharu ;   et al. | 2002-11-14 |
Exposure method and aligner Grant 6,399,283 - Hoshi June 4, 2 | 2002-06-04 |
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