Horsky; Thomas N.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Horsky; Thomas N..The latest application filed is for "plasma generator with at least one non-metallic component".

Company Profile

2.48.48

Horsky; Thomas N. - Boxborough MA
- Boxborough MA US
Horsky; Thomas N. - Bozborough MA
Horsky; Thomas N. - Acton MA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Plasma generator with at least one non-metallic component Grant 9,865,422 - Horsky , et al. January 9, 2	2018-01-09
Plasma Generator With at Least One Non-Metallic Component App 20160086759 - Horsky; Thomas N. ; et al.	2016-03-24
Ion source having at least one electron gun comprising a gas inlet and a plasma region defined by an anode and a ground element thereof Grant 8,994,272 - Horsky , et al. March 31, 2	2015-03-31
Ion Source App 20140265854 - Horsky; Thomas N. ; et al.	2014-09-18
Ion Implantation Device And A Method Of Semiconductor Manufacturing By The Implantation Of Boron Hydride Cluster Ions App 20140061816 - Horsky; Thomas N. ; et al.	2014-03-06
Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions Grant 8,618,514 - Horsky , et al. December 31, 2	2013-12-31
Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions Grant 08618514 -	2013-12-31
Ion implantation with molecular ions containing phosphorus and arsenic Grant 8,586,459 - Horsky , et al. November 19, 2	2013-11-19
System and method for the manufacture of semiconductor devices by the implantation of carbon clusters Grant 8,530,343 - Krull , et al. September 10, 2	2013-09-10
External cathode ion source Grant 8,502,161 - Hahto , et al. August 6, 2	2013-08-06
Ion beam apparatus and method employing magnetic scanning Grant 8,436,326 - Glavish , et al. May 7, 2	2013-05-07
Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions Grant 8,410,459 - Horsky , et al. April 2, 2	2013-04-02
Method and apparatus for extracting ions from an ion source for use in ion implantation Grant 8,368,309 - Horsky , et al. February 5, 2	2013-02-05
Multi mode ion source Grant 8,330,118 - Horsky , et al. December 11, 2	2012-12-11
Ion Implantation Device And A Method Of Semiconductor Manufacturing By The Implantation Of Boron Hydride Cluster Ions App 20120076475 - Horsky; Thomas N. ; et al.	2012-03-29
Vaporizer App 20120064705 - Horsky; Thomas N. ; et al.	2012-03-15
Ion beam apparatus and method for ion implantation Grant 8,110,820 - Glavish , et al. February 7, 2	2012-02-07
System and method for the manufacture of semiconductor devices by the implantation of carbon clusters Grant 8,097,529 - Krull , et al. January 17, 2	2012-01-17
System And Method For The Manufacture Of Semiconductor Devices By The Implantation Of Carbon Clusters App 20110306193 - Krull; Wade A. ; et al.	2011-12-15
Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions Grant 8,071,958 - Horsky , et al. December 6, 2	2011-12-06
Ion Implantation Device And A Method Of Semiconductor Manufacturing By The Implantation Of Boron Hydride Cluster Ions App 20110226969 - Horsky; Thomas N. ; et al.	2011-09-22
Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions Grant 7,960,709 - Horsky , et al. June 14, 2	2011-06-14
Ion Beam Apparatus And Method Employing Magnetic Scanning App 20110089321 - Glavish; Hilton F. ; et al.	2011-04-21
Method and system for extracting ion beams composed of molecular ions (cluster ion beam extraction system) Grant 7,928,406 - Horsky , et al. April 19, 2	2011-04-19
Cluster ion implantation for defect engineering Grant 7,919,402 - Jacobson , et al. April 5, 2	2011-04-05
External Cathode Ion Source App 20100320395 - Hahto; Sami K. ; et al.	2010-12-23
Ion beam apparatus and method employing magnetic scanning Grant 7,851,773 - Glavish , et al. December 14, 2	2010-12-14
External cathode ion source Grant 7,838,850 - Hahto , et al. November 23, 2	2010-11-23
Dual mode ion source for ion implantation Grant 7,838,842 - Horsky November 23, 2	2010-11-23
Dual mode ion source for ion implantation Grant 7,834,554 - Horsky November 16, 2	2010-11-16
Method and apparatus for extending equipment uptime in ion implantation Grant 7,820,981 - Horsky , et al. October 26, 2	2010-10-26
Method and apparatus for extracting ions from an ion source for use in ion implantation Grant 7,791,047 - Horsky , et al. September 7, 2	2010-09-07
Controlling the flow of vapors sublimated from solids Grant 7,723,700 - Horsky , et al. May 25, 2	2010-05-25
Method and apparatus for extracting ions from an ion source for use in ion implantation App 20100107980 - Horsky; Thomas N. ; et al.	2010-05-06
System and method for the manufacture of semiconductor devices by the implantation of carbon clusters Grant 7,666,771 - Krull , et al. February 23, 2	2010-02-23
Method and apparatus for extending equipment uptime in ion implantation Grant 7,629,590 - Horsky , et al. December 8, 2	2009-12-08
Multi Mode Ion Source App 20090283695 - Horsky; Thomas N. ; et al.	2009-11-19
System And Method For The Manufacture Of Semiconductor Devices By The Implantation Of Carbon Clusters App 20090286367 - Krull; Wade A. ; et al.	2009-11-19
Ion implantation system and control method Grant 7,609,003 - Horsky , et al. October 27, 2	2009-10-27
Ion Beam Apparatus And Method Employing Magnetic Scanning App 20090261248 - Glavish; Hilton F. ; et al.	2009-10-22
Ion Beam Apparatus And Method For Ion Implantation App 20090206270 - Glayish; Hilton F. ; et al.	2009-08-20
Vapor Delivery System Useful With Ion Sources And Vaporizers For Use In Such System App 20090206281 - Oved; Dror ; et al.	2009-08-20
Ion implantation system and control method Grant 7,528,550 - Horsky , et al. May 5, 2	2009-05-05
Ion Implantation Device And A Method Of Semiconductor Manufacturing By The Implantation Of Boron Hydride Cluster Ions App 20090090872 - Horsky; Thomas N. ; et al.	2009-04-09
Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions Grant 7,491,953 - Horsky , et al. February 17, 2	2009-02-17
External Cathode Ion Source App 20090014667 - Hahto; Sami K. ; et al.	2009-01-15
Ion Implantation Device And A Method Of Semiconductor Manufacturing By The Implantation Of Ions Derived From Carborane Molecular Species App 20080305598 - Horsky; Thomas N. ; et al.	2008-12-11
Cluster Ion Implantation For Defect Engineering App 20080299749 - Jacobson; Dale C. ; et al.	2008-12-04
Method And System For Extracting Ion Beams Composed Of Molecular Ions (cluster Ion Beam Extraction System) App 20080290266 - Horsky; Thomas N. ; et al.	2008-11-27
Method And Apparatus For Extending Equipment Uptime In Ion Implantation App 20080223409 - Horsky; Thomas N. ; et al.	2008-09-18
Ion implantation system and control method Grant 7,394,202 - Horsky , et al. July 1, 2	2008-07-01
Ion Implantation Device and a Method of Semiconductor Manufacturing by the Implantation of Molecular Ions Containing Phosphorus and Arsenic App 20080122005 - Horsky; Thomas N. ; et al.	2008-05-29
Method and apparatus for extending equipment uptime in ion implantation App 20080121811 - Horsky; Thomas N. ; et al.	2008-05-29
Dual Mode Ion Source For Ion Implantation App 20080087219 - Horsky; Thomas N.	2008-04-17
Controlling the flow of vapors sublimated from solids App 20080073559 - Horsky; Thomas N. ; et al.	2008-03-27
Controlling The Flow Of Vapors Sublimated From Solids App 20080047607 - Horsky; Thomas N. ; et al.	2008-02-28
Dual mode ion source for ion implantation App 20080042580 - Horsky; Thomas N.	2008-02-21
Method and apparatus for extending equipment uptime in ion implantation App 20070241689 - Horsky; Thomas N. ; et al.	2007-10-18
Method And Apparatus For Extending Equipment Uptime In Ion Implantation App 20070210260 - Horsky; Thomas N. ; et al.	2007-09-13
Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions App 20070194252 - Horsky; Thomas N. ; et al.	2007-08-23
Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions App 20070181830 - Horsky; Thomas N. ; et al.	2007-08-09
Ion implantation system and control method App 20070176115 - Horsky; Thomas N. ; et al.	2007-08-02
Ion implantation system and control method App 20070176114 - Horsky; Thomas N. ; et al.	2007-08-02
Dual mode ion source for ion implantation App 20070170372 - Horsky; Thomas N.	2007-07-26
System and method for the manufacture of semiconductor devices by the implantation of carbon clusters App 20070148888 - Krull; Wade A. ; et al.	2007-06-28
Method and apparatus for extracting ions from an ion source for use in ion implantation App 20070108395 - Horsky; Thomas N. ; et al.	2007-05-17
Method and apparatus for extracting ions from an ion source for use in ion implantation App 20060272775 - Horsky; Thomas N. ; et al.	2006-12-07
Method and apparatus for extracting ions from an ion source for use in ion implantation App 20060272776 - Horsky; Thomas N. ; et al.	2006-12-07
Ion implantation system and control method App 20060238133 - Horsky; Thomas N. ; et al.	2006-10-26
Ion implantation system and control method Grant 7,064,491 - Horsky , et al. June 20, 2	2006-06-20
Dual mode ion source for ion implantation App 20060097645 - Horsky; Thomas N.	2006-05-11
Ion implantation device and a method of semiconductor manufacturing by the implantation of boron hydride cluster ions App 20060097193 - Horsky; Thomas N. ; et al.	2006-05-11
Electron impact ion source Grant 7,023,138 - Horsky April 4, 2	2006-04-04
Decaborane ion source Grant 6,958,481 - Horsky , et al. October 25, 2	2005-10-25
Electron impact ion source App 20040195973 - Horsky, Thomas N.	2004-10-07
Ion source having replaceable and sputterable solid source material Grant 6,768,121 - Horsky , et al. July 27, 2	2004-07-27
Ion implantation system and control method App 20040104682 - Horsky, Thomas N. ; et al.	2004-06-03
Electron beam ion source with integral low-temperature vaporizer Grant 6,744,214 - Horsky June 1, 2	2004-06-01
Electron impact ion source Grant 6,686,595 - Horsky February 3, 2	2004-02-03
Electron Impact Ion Source App 20040000647 - Horsky, Thomas N.	2004-01-01
Ion source having replaceable and sputterable solid source material App 20040000651 - Horsky, Thomas N. ; et al.	2004-01-01
Electron beam ion source with integral low-temperature vaporizer App 20030085663 - Horsky, Thomas N.	2003-05-08
Electron beam ion source with integral low-temperature vaporizer Grant 6,452,338 - Horsky September 17, 2	2002-09-17
Electron beam ion source with integral low-temperature vaporizer App 20020070672 - Horsky, Thomas N.	2002-06-13
Decaborane ion source App 20010054699 - Horsky, Thomas N. ; et al.	2001-12-27
Decaborane ionizer Grant 6,288,403 - Horsky , et al. September 11, 2	2001-09-11
Decaborane vaporizer Grant 6,107,634 - Horsky August 22, 2	2000-08-22
Ion generating source for use in an ion implanter Grant 5,497,006 - Sferlazzo , et al. March 5, 1	1996-03-05
Membrane light modulating systems Grant 5,471,341 - Warde , et al. November 28, 1	1995-11-28
Membrane light modulation systems Grant 5,287,215 - Warde , et al. February 15, 1	1994-02-15

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