Patent | Date |
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Optical arrangement and lithography apparatus Grant 11,402,760 - Horn , et al. August 2, 2 | 2022-08-02 |
Method And Device For Scanning Distance And Velocity Determination App 20220099800 - HORN; Jan | 2022-03-31 |
Image sensor, position sensor device, lithography system, and method for operating an image sensor Grant 11,262,660 - Horn , et al. March 1, 2 | 2022-03-01 |
Multi-beam particle beam system Grant 11,239,054 - Sarov , et al. February 1, 2 | 2022-02-01 |
Optical Arrangement And Lithography Apparatus App 20220004107 - Horn; Jan ;   et al. | 2022-01-06 |
Method For Operating A Lidar System App 20210190951 - HOLLER; Frank ;   et al. | 2021-06-24 |
Multi-beam Particle Beam System App 20210066037 - Sarov; Yanko ;   et al. | 2021-03-04 |
Apparatus And Method For Ascertaining A Distance To An Object App 20210026014 - HORN; Jan | 2021-01-28 |
Multi-beam particle beam system Grant 10,854,423 - Sarov , et al. December 1, 2 | 2020-12-01 |
Image Sensor, Position Sensor Device, Lithography System, And Method For Operating An Image Sensor App 20200363731 - Horn; Jan ;   et al. | 2020-11-19 |
Control device Grant 10,678,151 - Holz , et al. | 2020-06-09 |
System, Method And Marker For The Determination Of The Position Of A Movable Object In Space App 20200114519 - Horn; Jan ;   et al. | 2020-04-16 |
Sensor arrangement for a lithography system, lithography system, and method for operating a lithography system Grant 10,514,619 - Bihr , et al. Dec | 2019-12-24 |
Device for transmitting electrical signals, and lithography apparatus Grant 10,459,351 - Horn , et al. Oc | 2019-10-29 |
Sensor assembly and method for determining respective positions of a number of mirrors of a lithography system Grant 10,444,633 - Horn , et al. Oc | 2019-10-15 |
Sensor assembly and method for determining respective positions of a number of mirrors of a lithography system Grant 10,437,155 - Horn , et al. O | 2019-10-08 |
Multi-beam Particle Beam System App 20190259575 - Sarov; Yanko ;   et al. | 2019-08-22 |
Device For Transmitting Electrical Signals, And Lithography Apparatus App 20190196343 - Horn; Jan ;   et al. | 2019-06-27 |
Control Device App 20190187574 - Holz; Markus ;   et al. | 2019-06-20 |
Multi-mirror array Grant 10,139,618 - Horn , et al. Nov | 2018-11-27 |
Method And Device For Monitoring Multiple Mirror Arrays In An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20180246415 - Xalter; Stefan ;   et al. | 2018-08-30 |
Methods and devices for driving micromirrors Grant 10,061,202 - Horn , et al. August 28, 2 | 2018-08-28 |
Device and method for controlling positioning of multiple adjustable mirror elements in a multi-mirror arrangement Grant 10,018,803 - Horn , et al. July 10, 2 | 2018-07-10 |
Sensor Arrangement For A Lithography System, Lithography System, And Method For Operating A Lithography System App 20180188656 - Bihr; Ulrich ;   et al. | 2018-07-05 |
Device for determining a tilt angle of at least one mirror of a lithography system, and method Grant 10,007,195 - Horn , et al. June 26, 2 | 2018-06-26 |
Sensor Assembly And Method For Determining Respective Positions Of A Number Of Mirrors Of A Lithography System App 20180067399 - Horn; Jan ;   et al. | 2018-03-08 |
Sensor Assembly And Method For Determining Respective Positions Of A Number Of Mirrors Of A Lithography System App 20180067400 - Horn; Jan ;   et al. | 2018-03-08 |
Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus Grant 9,897,925 - Xalter , et al. February 20, 2 | 2018-02-20 |
Multi-mirror Array App 20180003951 - Horn; Jan ;   et al. | 2018-01-04 |
Optical component Grant 9,851,555 - Holz , et al. December 26, 2 | 2017-12-26 |
Optical module Grant 9,599,788 - Horn , et al. March 21, 2 | 2017-03-21 |
Device And Method For Controlling Positioning Of Multiple Adjustable Mirror Elements In A Multi-mirror Arrangement App 20170038555 - Horn; Jan ;   et al. | 2017-02-09 |
Method And Device For Monitoring Multiple Mirror Arrays In An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20160266502 - Xalter; Stefan ;   et al. | 2016-09-15 |
Device For Determining A Tilt Angle Of At Least One Mirror Of A Lithography System, And Method App 20160246186 - Horn; Jan ;   et al. | 2016-08-25 |
Optical Component App 20160170201 - Holz; Markus ;   et al. | 2016-06-16 |
Illumination system for a microlithographic projection exposure apparatus Grant 9,348,232 - Horn , et al. May 24, 2 | 2016-05-24 |
Optical Module App 20160025952 - Horn; Jan ;   et al. | 2016-01-28 |
Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus Grant 9,239,229 - Xalter , et al. January 19, 2 | 2016-01-19 |
Method And Device For Monitoring Multiple Mirror Arrays In An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20150300807 - Xalter; Stefan ;   et al. | 2015-10-22 |
Method For Regulating The Tilting Of A Mirror Element App 20150185469 - Horn; Jan ;   et al. | 2015-07-02 |
Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus Grant 9,019,475 - Xalter , et al. April 28, 2 | 2015-04-28 |
Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus Grant 9,013,684 - Xalter , et al. April 21, 2 | 2015-04-21 |
Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus Grant 9,001,309 - Xalter , et al. April 7, 2 | 2015-04-07 |
Method And Device For Monitoring Multiple Mirror Arrays In An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20140233006 - Xalter; Stefan ;   et al. | 2014-08-21 |
Method And Device For Monitoring Multiple Mirror Arrays In An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20140226141 - Xalter; Stefan ;   et al. | 2014-08-14 |
Methods And Devices For Driving Micromirrors App 20130088698 - Horn; Jan ;   et al. | 2013-04-11 |
Methods and devices for driving micromirrors Grant 8,345,224 - Horn , et al. January 1, 2 | 2013-01-01 |
Method and device for monitoring multiple mirror arrays in an illumination system of a microlithographic projection exposure apparatus Grant 8,339,577 - Xalter , et al. December 25, 2 | 2012-12-25 |
Method And Device For Monitoring Multiple Mirror Arrays In An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20120293784 - Xalter; Stefan ;   et al. | 2012-11-22 |
Methods And Devices For Driving Micromirrors App 20110188017 - Horn; Jan ;   et al. | 2011-08-04 |
Illumination System For A Microlithographic Projection Exposure Apparatus App 20100309449 - Horn; Jan ;   et al. | 2010-12-09 |
Method And Device For Monitoring Multiple Mirror Arrays In An Illumination System Of A Microlithographic Projection Exposure Apparatus App 20100039629 - Xalter; Stefan ;   et al. | 2010-02-18 |