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Method Of Processing Substrate, Method Of Manufacturing Semiconductor Device, Substrate Processing System, And Recording Medium App 20220301854 - HORITA; Hideki ;   et al. | 2022-09-22 |
Substrate Processing Apparatus And Recording Medium App 20220136497 - OKUNO; Masanori ;   et al. | 2022-05-05 |
Substrate processing apparatus and recording medium Grant 11,236,743 - Okuno , et al. February 1, 2 | 2022-02-01 |
Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium Grant 11,066,744 - Horita , et al. July 20, 2 | 2021-07-20 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium App 20210202242 - HORITA; Hideki ;   et al. | 2021-07-01 |
Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium Grant 11,041,240 - Takagi , et al. June 22, 2 | 2021-06-22 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium App 20210125828 - HORITA; Hideki ;   et al. | 2021-04-29 |
Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium Grant 10,714,336 - Horita , et al. | 2020-07-14 |
Substrate Processing Apparatus, Method Of Manufacturing Semiconductor Device, And Recording Medium App 20200024731 - HORITA; Hideki ;   et al. | 2020-01-23 |
Substrate processing apparatus and guide portion Grant 10,513,774 - Terasaki , et al. Dec | 2019-12-24 |
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium Grant 10,513,775 - Yamakoshi , et al. Dec | 2019-12-24 |
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Non-Transitory Computer-Readable Recording Medi App 20190214250 - HORITA; Hideki ;   et al. | 2019-07-11 |
Substrate Processing Apparatus And Recording Medium App 20190195219 - OKUNO; Masanori ;   et al. | 2019-06-27 |
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Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus and Non-Transitory Computer-Readable Recording Medium App 20180171467 - HATTA; Hiroki ;   et al. | 2018-06-21 |
Method of manufacturing semiconductor device Grant 9,934,960 - Horita , et al. April 3, 2 | 2018-04-03 |
Method of manufacturing semiconductor device Grant 9,905,413 - Yamakoshi , et al. February 27, 2 | 2018-02-27 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium App 20170298508 - YAMAKOSHI; Risa ;   et al. | 2017-10-19 |
Method Of Manufacturing Semiconductor Device App 20170178889 - YAMAKOSHI; Risa ;   et al. | 2017-06-22 |
Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium Grant 9,552,980 - Ozaki , et al. January 24, 2 | 2017-01-24 |
Substrate Processing Apparatus And Guide Portion App 20160298235 - TERASAKI; Masato ;   et al. | 2016-10-13 |
Method of Manufacturing Semiconductor Device App 20160284539 - HORITA; Hideki ;   et al. | 2016-09-29 |
Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium Grant 9,401,272 - Terasaki , et al. July 26, 2 | 2016-07-26 |
Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus, And Recording Medium App 20140315393 - OZAKI; Takashi ;   et al. | 2014-10-23 |
Cleaning Method, Method Of Manufacturing Semiconductor Device, Substrate Processing Apparatus And Non-transitory Computer-readable Recording Medium App 20140287594 - TERASAKI; Masato ;   et al. | 2014-09-25 |
Method of producing semiconductor device Grant 8,227,346 - Miya , et al. July 24, 2 | 2012-07-24 |
Method Of Producing Semiconductor Device App 20120077350 - MIYA; Hironobu ;   et al. | 2012-03-29 |
Method Of Producing Semiconductor Device App 20120034790 - Miya; Hironobu ;   et al. | 2012-02-09 |
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Production method for semiconductor device and substrate processing apparatus Grant 7,779,785 - Miya , et al. August 24, 2 | 2010-08-24 |
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Production Method for Semiconductor Device and Substrate Processing Apparatus App 20080124945 - Miya; Hironobu ;   et al. | 2008-05-29 |