Patent | Date |
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Method For Manufacturing Structure, And Structure App 20220285525 - HORIKIRI; Fumimasa ;   et al. | 2022-09-08 |
Method For Manufacturing Structure App 20220270887 - HORIKIRI; Fumimasa ;   et al. | 2022-08-25 |
Electrochemical Sensor Unit, Electrode For Electrochemical Sensor, And Method For Manufacturing Electrode For Electrochemical Sensor App 20220260516 - KURIHARA; Kaori ;   et al. | 2022-08-18 |
Structure Manufacturing Method And Manufacturing Device, And Light Irradiation Device App 20220246467 - HORIKIRI; Fumimasa ;   et al. | 2022-08-04 |
Structure manufacturing method and intermediate structure Grant 11,393,693 - Horikiri , et al. July 19, 2 | 2022-07-19 |
Nitride crystal substrate and method for manufacturing the same Grant 11,377,756 - Horikiri July 5, 2 | 2022-07-05 |
Structure and intermediate structure Grant 11,380,765 - Horikiri July 5, 2 | 2022-07-05 |
Piezoelectric laminate, method of manufacturing the piezoelectric laminate and piezoelectric device Grant 11,367,826 - Shibata , et al. June 21, 2 | 2022-06-21 |
Structure manufacturing method, structure manufacturing apparatus and intermediate structure Grant 11,342,191 - Horikiri , et al. May 24, 2 | 2022-05-24 |
Nitride crystal substrate, semiconductor laminate, method of manufacturing semiconductor laminate and method of manufacturing semiconductor device Grant 11,339,500 - Horikiri , et al. May 24, 2 | 2022-05-24 |
Structure manufacturing method and manufacturing device, and light irradiation device Grant 11,342,220 - Horikiri , et al. May 24, 2 | 2022-05-24 |
Nitride Crystal Substrate And Method For Manufacturing The Same App 20220154367 - HORIKIRI; Fumimasa | 2022-05-19 |
Structure Manufacturing Method And Intermediate Structure App 20220148883 - HORIKIRI; Fumimasa ;   et al. | 2022-05-12 |
Epitaxial Substrate App 20220045177 - HORIKIRI; Fumimasa ;   et al. | 2022-02-10 |
Method For Manufacturing Nitride-based High Electron Mobility Transistor And Nitride-based High Electron Mobility Transistor App 20220037517 - HORIKIRI; Fumimasa ;   et al. | 2022-02-03 |
Method And Apparatus For Producing Structure, And Light Irradiation Apparatus App 20220028737 - HORIKIRI; Fumimasa ;   et al. | 2022-01-27 |
Laminated Substrate With Piezoelectric Thin Film, Piezoelectric Thin Film Element And Method For Manufacturing This Element App 20210359195 - SHIBATA; Kenji ;   et al. | 2021-11-18 |
Structure Manufacturing Method, Structure Manufacturing Apparatus And Intermediate Structure App 20210313186 - HORIKIRI; Fumimasa ;   et al. | 2021-10-07 |
Laminated substrate with piezoelectric thin film, piezoelectric thin film element and method for manufacturing this element Grant 11,107,971 - Shibata , et al. August 31, 2 | 2021-08-31 |
Method for manufacturing nitride semiconductor substrate and nitride semiconductor substrate Grant 11,094,539 - Yoshida , et al. August 17, 2 | 2021-08-17 |
Method For Manufacturing Nitride Semiconductor Laminate, Nitride Semiconductor Laminate, Method For Inspecting Film Quality, And Method For Inspecting Semiconductor Growing Device App 20210215621 - HORIKIRI; Fumimasa | 2021-07-15 |
Nitride Semiconductor Substrate, Semiconductor Laminate, Program For Selecting Substrate, Program For Outputting Substrate Data, Nitride Semiconductor Substrate With Program For Outputting Substrate Data, Off-angle Coordinate Map, Nitride Semiconductor Substrate With Off-angle Coordinate Map, Progra App 20210184003 - HORIKIRI; Fumimasa ;   et al. | 2021-06-17 |
Method For Manufacturing Semiconductor Structure, Inspection Method, And Semiconductor Structure App 20210131800 - HORIKIRI; Fumimasa | 2021-05-06 |
Gallium nitride laminated substrate and semiconductor device Grant 10,998,188 - Mishima , et al. May 4, 2 | 2021-05-04 |
Nitride semiconductor substrate, semiconductor laminate, laminated structure, method for manufacturing nitride semiconductor substrate and method for manufacturing semiconductor laminate Grant 10,978,296 - Yoshida , et al. April 13, 2 | 2021-04-13 |
Method Of Measuring Film Thickness, Method Of Manufacturing Nitride Semiconductor Laminate And Nitride Semiconductor Laminate App 20200388546 - HORIKIRI; Fumimasa | 2020-12-10 |
Laminated Substrate Having Piezoelectric Film, Element Having Piezoelectric Film And Method For Manufacturing This Laminated Substrate App 20200388746 - SHIBATA; Kenji ;   et al. | 2020-12-10 |
Semiconductor device and method for manufacturing the same Grant 10,797,181 - Mishima , et al. October 6, 2 | 2020-10-06 |
Crystal Laminate, Semiconductor Device And Method For Manufacturing The Same App 20200227262 - HORIKIRI; Fumimasa ;   et al. | 2020-07-16 |
Nitride Crystal Substrate, Semiconductor Laminate, Method Of Manufacturing Semiconductor Laminate And Method Of Manufacturing Se App 20200208297 - HORIKIRI; Fumimasa ;   et al. | 2020-07-02 |
Semiconductor device Grant 10,685,841 - Nakamura , et al. | 2020-06-16 |
GaN material and method of manufacturing semiconductor device Grant 10,665,683 - Horikiri | 2020-05-26 |
Laminated Substrate Having Piezoelectric Film, Element Having Piezoelectric Film And Method For Manufacturing This Laminated Sub App 20200161533 - SHIBATA; Kenji ;   et al. | 2020-05-21 |
Method for manufacturing niobate-system ferroelectric thin-film device Grant 10,658,569 - Horikiri , et al. | 2020-05-19 |
Manufacturing Method And Inspection Method Of Group-iii Nitride Laminate, And Group-iii Nitride Laminate App 20200091016 - HORIKIRI; Fumimasa ;   et al. | 2020-03-19 |
Nitride Crystal Substrate And Method For Manufacturing The Same App 20200040482 - HORIKIRI; Fumimasa ;   et al. | 2020-02-06 |
Piezoelectric Laminate, Method Of Manufacturing The Piezoelectric Laminate And Piezoelectric Device App 20200028066 - SHIBATA; Kenji ;   et al. | 2020-01-23 |
Method For Manufacturing Nitride Semiconductor Substrate And Nitride Semiconductor Substrate App 20200006049 - YOSHIDA; Takehiro ;   et al. | 2020-01-02 |
Nitride Crystal Substrate And Method For Manufacturing The Same App 20190382920 - HORIKIRI; Fumimasa | 2019-12-19 |
Ferroelectric thin-film laminated substrate, ferroelectric thin-film device, and manufacturing method of ferroelectric thin-film laminated substrate Grant 10,497,855 - Horikiri , et al. De | 2019-12-03 |
Semiconductor device Grant 10,483,350 - Nakamura , et al. Nov | 2019-11-19 |
Gallium Nitride Laminated Substrate And Semiconductor Device App 20190348276 - MISHIMA; Tomoyoshi ;   et al. | 2019-11-14 |
Piezoelectric Laminate, Method Of Manufacturing Piezoelectric Laminate And Piezoelectric Element App 20190288180 - SHIBATA; Kenji ;   et al. | 2019-09-19 |
GaN MATERIAL AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE App 20190273137 - HORIKIRI; Fumimasa | 2019-09-05 |
Structure And Intermediate Structure App 20190273139 - HORIKIRI; Fumimasa | 2019-09-05 |
Nitride Semiconductor Substrate, Semiconductor Laminate, Laminated Structure, Method For Manufacturing Nitride Semiconductor Sub App 20190198312 - YOSHIDA; Takehiro ;   et al. | 2019-06-27 |
Semiconductor Device And Method For Manufacturing The Same App 20190189808 - MISHIMA; Tomoyoshi ;   et al. | 2019-06-20 |
Semiconductor Device App 20190181010 - NAKAMURA; Tohru ;   et al. | 2019-06-13 |
Nitride Semiconductor Laminate, Method For Manufacturing Nitride Semiconductor Laminate, Method For Manufacturing Semiconductor App 20190148247 - HORIKIRI; Fumimasa | 2019-05-16 |
Ferroelectric thin-film laminated substrate, ferroelectric thin-film device,and manufacturing method of ferroelectric thin-film laminated substrate Grant 10,276,777 - Horikiri , et al. | 2019-04-30 |
Method For Manufacturing Niobate-system Ferroelectric Thin-film Device App 20190115525 - HORIKIRI; Fumimasa ;   et al. | 2019-04-18 |
Method for manufacturing ferroelectric thin film device Grant 10,211,044 - Horikiri , et al. Feb | 2019-02-19 |
Method for manufacturing niobate-system ferroelectric thin-film device Grant 10,199,564 - Horikiri , et al. Fe | 2019-02-05 |
Method for manufacturing ferroelectric thin film device Grant 10,186,655 - Horikiri , et al. Ja | 2019-01-22 |
Method for manufacturing niobate-system ferroelectric thin-film device Grant 10,181,407 - Horikiri , et al. Ja | 2019-01-15 |
Laminated Substrate With Piezoelectric Thin Film, Piezoelectric Thin Film Element And Method For Manufacturing This Element App 20180301618 - Shibata; Kenji ;   et al. | 2018-10-18 |
Semiconductor Device App 20180261667 - NAKAMURA; Tohru ;   et al. | 2018-09-13 |
Ferroelectric Thin-film Laminated Substrate, Ferroelectric Thin-film Device, And Manufacturing Method Of Ferroelectric Thin-film Laminated Substrate App 20180114896 - HORIKIRI; Fumimasa ;   et al. | 2018-04-26 |
Ferroelectric Thin-film Laminated Substrate, Ferroelectric Thin-film Device,and Manufacturing Method Of Ferroelectric Thin-film Laminated Substrate App 20180108828 - HORIKIRI; Fumimasa ;   et al. | 2018-04-19 |
Method For Manufacturing Niobate-system Ferroelectric Thin-film Device App 20180108530 - HORIKIRI; Fumimasa ;   et al. | 2018-04-19 |
Method For Manufacturing Ferroelectric Thin Film Device App 20180082839 - HORIKIRI; Fumimasa ;   et al. | 2018-03-22 |
Method For Manufacturing Ferroelectric Thin Film Device App 20180062068 - HORIKIRI; Fumimasa ;   et al. | 2018-03-01 |
Piezoelectric film element, and piezoelectric film device including piezoelectric film including alkali niobate-based perovskite structure Grant 9,893,266 - Horikiri , et al. February 13, 2 | 2018-02-13 |
Alkali-niobate-based piezoelectric thin film element Grant 9,882,546 - Suenaga , et al. January 30, 2 | 2018-01-30 |
Method For Manufacturing Niobate-system Ferroelectric Thin-film Device App 20180026176 - HORIKIRI; Fumimasa ;   et al. | 2018-01-25 |
Method for manufacturing niobate-system ferroelectric thin film device Grant 9,685,603 - Horikiri , et al. June 20, 2 | 2017-06-20 |
Piezoelectric thin-film element, piezoelectric sensor and vibration generator Grant 9,620,703 - Shibata , et al. April 11, 2 | 2017-04-11 |
Piezoelectric Thin Film Element, Method For Manufacturing The Same, And Electronic Device Including Piezoelectric Thin Film Element App 20160365504 - Suenaga; Kazufumi ;   et al. | 2016-12-15 |
Method For Manufacturing A Piezoelectric Film Wafer, Piezoelectric Film Element, And Piezoelectric Film Device App 20160308111 - Horikiri; Fumimasa ;   et al. | 2016-10-20 |
Method for Manufacturing Niobate-System Ferroelectric Thin Film Device App 20160284975 - HORIKIRI; Fumimasa ;   et al. | 2016-09-29 |
Method for manufacturing a piezoelectric film wafer, piezolelectric film element, and piezoelectric film device Grant 9,406,867 - Horikiri , et al. August 2, 2 | 2016-08-02 |
Method for manufacturing niobate-system ferroelectric thin film device Grant 9,385,297 - Horikiri , et al. July 5, 2 | 2016-07-05 |
Piezoelectric film-attached substrate, piezoelectric film element and method of manufacturing the same Grant 9,368,713 - Watanabe , et al. June 14, 2 | 2016-06-14 |
Piezoelectric thin-film multilayer body Grant 9,299,911 - Suenaga , et al. March 29, 2 | 2016-03-29 |
Piezoelectric element and piezoelectric device Grant 9,293,688 - Suenaga , et al. March 22, 2 | 2016-03-22 |
Method for manufacturing a piezoelectric film wafer, piezoelectric film element, and piezoelectric film device Grant 9,231,185 - Horikiri , et al. January 5, 2 | 2016-01-05 |
Manufacturing method of piezoelectric film element, piezoelectric film element and piezoelectric device Grant 9,166,142 - Horikiri , et al. October 20, 2 | 2015-10-20 |
Piezoelectric Thin Film Element, Method For Manufacturing The Same, And Electronic Device Including Piezoelectric Thin Film Element App 20150229290 - Suenaga; Kazufumi ;   et al. | 2015-08-13 |
Method For Manufacturing Niobate-system Ferroelectric Thin Film Device App 20150064804 - HORIKIRI; Fumimasa ;   et al. | 2015-03-05 |
Piezoelectric film and method for manufacturing the same, piezoelectric film element and method for manufacturing the same, and piezoelectric film device Grant 8,896,187 - Suenaga , et al. November 25, 2 | 2014-11-25 |
Piezoelectric Thin-film Element, Piezoelectric Sensor And Vibration Generator App 20140285068 - SHIBATA; Kenji ;   et al. | 2014-09-25 |
Piezoelectric Thin-film Multilayer Body App 20140285069 - SUENAGA; Kazufumi ;   et al. | 2014-09-25 |
Piezoelectric Element, Piezoelectric Device And Method Of Manufacturing Piezoelectric Element App 20140042875 - SUENAGA; Kazufumi ;   et al. | 2014-02-13 |
Piezoelectric Film-attached Substrate, Piezoelectric Film Element And Method Of Manufacturing The Same App 20130249354 - WATANABE; Kazutoshi ;   et al. | 2013-09-26 |
Piezoelectric Element And Piezoelectric Device App 20130187516 - SUENAGA; Kazufumi ;   et al. | 2013-07-25 |
Piezoelectric thin-film element and piezoelectric thin-film device Grant 8,446,074 - Shibata , et al. May 21, 2 | 2013-05-21 |
Piezoelectric Film Element And Piezoelectric Film Device App 20130106242 - Shibata; Kenji ;   et al. | 2013-05-02 |
Manufacturing Method Of Piezoelectric Film Element, Piezoelectric Film Element And Piezoelectric Device App 20130038176 - HORIKIRI; Fumimasa ;   et al. | 2013-02-14 |
Piezoelectric Film And Method For Manufacturing The Same, Piezoelectric Film Element And Method For Manufacturing The Same, And Piezoelectric Film Device App 20130015392 - SUENAGA; Kazufumi ;   et al. | 2013-01-17 |
Piezoelectric Thin-film Element And Piezoelectric Thin-film Device App 20130009519 - Shibata; Kenji ;   et al. | 2013-01-10 |
Manufacturing Methods Of Piezoelectric Film Element And Piezoelectric Device App 20120304429 - HORIKIRI; Fumimasa ;   et al. | 2012-12-06 |
Method for manufacturing a piezoelectric film wafer, piezolelectric film element, and piezoelectric film device App 20120056508 - Horikiri; Fumimasa ;   et al. | 2012-03-08 |
Method for manufacturing a piezoelectric film wafer, piezoelectric film element, and piezoelectric film device App 20120025667 - Horikiri; Fumimasa ;   et al. | 2012-02-02 |