Patent | Date |
---|
Method of manufacturing semiconductor device and recording medium Grant 11,168,396 - Kakuda , et al. November 9, 2 | 2021-11-09 |
Method of manufacturing semiconductor device and non-transitory computer-readable recording medium Grant 10,985,017 - Yamamoto , et al. April 20, 2 | 2021-04-20 |
Substrate processing apparatus, method of manufacturing semiconductor device, and method of processing substrate Grant 10,604,839 - Inada , et al. | 2020-03-31 |
Method Of Manufacturing Semiconductor Device And Recording Medium App 20200002816 - KAKUDA; Toru ;   et al. | 2020-01-02 |
Method of Manufacturing Semiconductor Device and Non-Transitory Computer-Readable Recording Medium App 20190304778 - YAMAMOTO; Katsuhiko ;   et al. | 2019-10-03 |
Vaporizer and Substrate Processing Apparatus App 20190003047 - TATENO; Hideto ;   et al. | 2019-01-03 |
Substrate Processing Apparatus App 20180204742 - TATENO; Hideto ;   et al. | 2018-07-19 |
Substrate Processing Apparatus App 20180204720 - TANAKA; Akinori ;   et al. | 2018-07-19 |
Semiconductor device having electrode made of high work function material, method and apparatus for manufacturing the same Grant 9,653,301 - Horii , et al. May 16, 2 | 2017-05-16 |
Semiconductor Device Having Electrode Made Of High Work Function Material, Method And Apparatus For Manufacturing The Same App 20160343573 - HORII; Sadayoshi ;   et al. | 2016-11-24 |
Semiconductor device having electrode made of high work function material and method of manufacturing the same Grant 9,472,637 - Horii , et al. October 18, 2 | 2016-10-18 |
Semiconductor device having electrode made of high work function material, method and apparatus for manufacturing the same Grant 9,437,704 - Horii , et al. September 6, 2 | 2016-09-06 |
Substrate Processing Apparatus, Method Of Manufacturing Semiconductor Device, And Method Of Processing Substrate App 20160053373 - INADA; Tetsuaki ;   et al. | 2016-02-25 |
Semiconductor Device Having Electrode Made Of High Work Function Material And Method Of Manufacturing The Same App 20150171179 - HORII; Sadayoshi ;   et al. | 2015-06-18 |
Semiconductor Device Having Electrode Made Of High Work Function Material, Method And Apparatus For Manufacturing The Same App 20150171180 - HORII; Sadayoshi ;   et al. | 2015-06-18 |
Method of manufacturing a semiconductor device Grant 8,741,731 - Takebayashi , et al. June 3, 2 | 2014-06-03 |
Method of manufacturing semiconductor device, method of processing substrate and substrate processing apparatus Grant 8,728,935 - Harada , et al. May 20, 2 | 2014-05-20 |
Method of manufacturing semiconductor device and substrate processing apparatus Grant 8,685,866 - Horii , et al. April 1, 2 | 2014-04-01 |
Method of manufacturing semiconductor device and substrate processing apparatus Grant 8,580,671 - Horii , et al. November 12, 2 | 2013-11-12 |
Method Of Manufacturing A Semiconductor Device App 20130122720 - Takebayashi; Yuji ;   et al. | 2013-05-16 |
Manufacturing method of semiconductor device, and substrate processing apparatus Grant 8,435,905 - Horii , et al. May 7, 2 | 2013-05-07 |
Method of manufacturing a semiconductor device Grant 8,420,552 - Takebayashi , et al. April 16, 2 | 2013-04-16 |
Method of manufacturing semiconductor device and substrate processing apparatus Grant 8,415,237 - Horii , et al. April 9, 2 | 2013-04-09 |
Semiconductor Device Manufacturing Method, Semiconductor Device And Substrate Processing Apparatus App 20130075800 - Horii; Sadayoshi ;   et al. | 2013-03-28 |
Method of manufacturing semiconductor device and substrate processing system Grant 8,404,603 - Ogawa , et al. March 26, 2 | 2013-03-26 |
Method Of Manufacturing Semiconductor Device And Substrate Processing Apparatus App 20120322254 - HORII; Sadayoshi ;   et al. | 2012-12-20 |
Method of manufacturing semiconductor device and substrate processing apparatus Grant 8,193,083 - Horii , et al. June 5, 2 | 2012-06-05 |
Method Of Manufacturing Semiconductor Device And Substrate Processing Apparatus App 20110300695 - HORII; Sadayoshi ;   et al. | 2011-12-08 |
Method of manufacturing semiconductor device and substrate processing apparatus Grant 8,026,159 - Horii , et al. September 27, 2 | 2011-09-27 |
Semiconductor Device, Method Of Manufacturing Semiconductor Device, And Substrate Processing Apparatus App 20110163452 - HORII; Sadayoshi ;   et al. | 2011-07-07 |
Semiconductor device manufacturing method and substrate processing apparatus Grant 7,968,437 - Itatani , et al. June 28, 2 | 2011-06-28 |
Method Of Manufacturing Semiconductor Device, Method Of Processing Substrate And Substrate Processing Apparatus App 20110151660 - HARADA; Kazuhiro ;   et al. | 2011-06-23 |
Method Of Manufacturing Semiconductor Device And Substrate Processing Apparatus App 20110104896 - HARADA; Kazuhiro ;   et al. | 2011-05-05 |
Method Of Manufacturing Semiconductor Device, Semiconductor Device, And Substrate Processing Apparatus App 20110024875 - TAKEBAYASHI; Yuji ;   et al. | 2011-02-03 |
Method Of Manufacturing Semiconductor Device And Substrate Processing Apparatus App 20110008955 - HORII; Sadayoshi ;   et al. | 2011-01-13 |
Method Of Manufacturing Semiconductor Device And Substrate Processing System App 20110003482 - Ogawa; Arito ;   et al. | 2011-01-06 |
Method Of Manufacturing Semiconductor Device And Substrate Processing Apparatus App 20100291763 - OGAWA; Arito ;   et al. | 2010-11-18 |
Method for manufacturing semiconductor device, and substrate processing apparatus Grant 7,723,245 - Sano , et al. May 25, 2 | 2010-05-25 |
Substrate processing apparatus, and method for manufacturing semiconductor device Grant 7,648,578 - Itatani , et al. January 19, 2 | 2010-01-19 |
Semiconductor Device Manufacturing Method And Substrate Processing Apparatus App 20090233429 - Ishikawa; Dai ;   et al. | 2009-09-17 |
Substrate processing apparatus and method of manufacturing semiconductor device Grant 7,579,276 - Itatani , et al. August 25, 2 | 2009-08-25 |
Manufacturing Method for Semiconductor Devices and Substrate Processing Apparatus App 20090209095 - Horii; Sadayoshi | 2009-08-20 |
Semiconductor Device Manufacturing Method and Substrate Processing Apparatus App 20090130859 - Itatani; Hideharu ;   et al. | 2009-05-21 |
Manufacturing method of semiconductor device and substrate processing apparatus Grant 7,531,467 - Sano , et al. May 12, 2 | 2009-05-12 |
Method for manufacturing semiconductor device and substrate processing apparatus Grant 7,524,766 - Itatani , et al. April 28, 2 | 2009-04-28 |
Method of manufacturing semiconductor device and substrate processing apparatus App 20090064931 - Horii; Sadayoshi ;   et al. | 2009-03-12 |
Method of manufacturing semiconductor device and substrate processing apparatus App 20090061648 - Horii; Sadayoshi ;   et al. | 2009-03-05 |
Manufacturing Method of Semiconductor Device, and Substrate Processing Apparatus App 20090035947 - Horii; Sadayoshi ;   et al. | 2009-02-05 |
Method for producing semiconductor device, and substrate processing apparatus App 20080286075 - Horii; Sadayoshi | 2008-11-20 |
Method For Manufacturing Semiconductor Device, And Substrate Processing Apparatus App 20080032514 - Sano; Atsushi ;   et al. | 2008-02-07 |
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device App 20070264840 - Itatani; Hideharu ;   et al. | 2007-11-15 |
Semiconductor device manufacturing method App 20070087579 - Kitayama; Kanako ;   et al. | 2007-04-19 |
Manufacturing method of semiconductor device and substrate processing apparatus App 20070042581 - Sano; Atsushi ;   et al. | 2007-02-22 |
Method for manufacturing semiconductor device and substrate processing apparatus App 20060240677 - Horii; Sadayoshi ;   et al. | 2006-10-26 |
Method for manufaturing semiconductor device and substrate processing system App 20060035470 - Horii; Sadayoshi ;   et al. | 2006-02-16 |
Method for manufacturing semiconductor device and substrate processing apparatus App 20050250341 - Itatani, Hideharu ;   et al. | 2005-11-10 |
Manufacturing method of semiconductor device and substrate processing apparatus Grant 6,825,126 - Asai , et al. November 30, 2 | 2004-11-30 |
Method for manufacturing semiconductor device Grant 6,787,481 - Asai , et al. September 7, 2 | 2004-09-07 |
Manufacturing method of semiconductor device and substrate processing apparatus App 20040043544 - Asai, Masayuki ;   et al. | 2004-03-04 |
Method for manufacturing semiconductor device App 20040009678 - Asai, Masayuki ;   et al. | 2004-01-15 |