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Method for detecting overlay error and method for manufacturing semiconductor device using the same Grant 9,841,688 - Ko , et al. December 12, 2 | 2017-12-12 |
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Method For Detecting Overlay Error And Method For Manufacturing Semiconductor Device Using The Same App 20160300767 - Ko; Kang-Woong ;   et al. | 2016-10-13 |
Surface Inspecting Method App 20160153915 - Ko; Kang-woong ;   et al. | 2016-06-02 |
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Spectroscopic Ellipsometer And Film Thickness Measuring Apparatus App 20090066953 - HORIE; Masahiro | 2009-03-12 |
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Spectroscopic ellipsometer Grant 7,095,498 - Horie August 22, 2 | 2006-08-22 |
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Apparatus for measuring film thickness formed on object, apparatus and method of measuring spectral reflectance of object, and apparatus and method of inspecting foreign material on object Grant 6,937,333 - Horie , et al. August 30, 2 | 2005-08-30 |
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Printer driver, printer, and recording medium on which printer driver program is recorded Grant 6,879,408 - Hori , et al. April 12, 2 | 2005-04-12 |
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Apparatus for measuring film thickness formed on object, apparatus and method of measuring spectral reflectance of object, and apparatus and method of inspecting foreign material on object App 20040075836 - Horie, Masahiro ;   et al. | 2004-04-22 |
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