Patent | Date |
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Size-filtered multimetal structures Grant 10,134,631 - Horak , et al. November 20, 2 | 2018-11-20 |
Non-lithographic line pattern formation Grant 9,997,367 - Tseng , et al. June 12, 2 | 2018-06-12 |
Gate contact with vertical isolation from source-drain Grant 9,935,168 - Horak , et al. April 3, 2 | 2018-04-03 |
Gate Contact With Vertical Isolation From Source-drain App 20170170266 - Horak; David V. ;   et al. | 2017-06-15 |
Replacement gate electrode with a self-aligned dielectric spacer Grant 9,660,030 - Ponoth , et al. May 23, 2 | 2017-05-23 |
Borderless contact structure Grant 9,620,619 - Basker , et al. April 11, 2 | 2017-04-11 |
Gate contact with vertical isolation from source-drain Grant 9,614,047 - Horak , et al. April 4, 2 | 2017-04-04 |
Replacement metal gate Grant 9,515,070 - Horak , et al. December 6, 2 | 2016-12-06 |
Non-lithographic Line Pattern Formation App 20160329214 - Tseng; Chiahsun ;   et al. | 2016-11-10 |
Size-filtered multimetal structures Grant 9,484,254 - Horak , et al. November 1, 2 | 2016-11-01 |
Gate Contact With Vertical Isolation From Source-drain App 20160260812 - Horak; David V. ;   et al. | 2016-09-08 |
Non-lithographic line pattern formation Grant 9,396,957 - Tseng , et al. July 19, 2 | 2016-07-19 |
Size-filtered Multimetal Structures App 20160204064 - Horak; David V. ;   et al. | 2016-07-14 |
Integrated circuit structure having selectively formed metal cap Grant 9,379,198 - Yang , et al. June 28, 2 | 2016-06-28 |
Dual hard mask lithography process Grant 9,373,580 - Arnold , et al. June 21, 2 | 2016-06-21 |
Silicon-on-insulator transistor with self-aligned borderless source/drain contacts Grant 9,368,590 - Fan , et al. June 14, 2 | 2016-06-14 |
Gate contact with vertical isolation from source-drain Grant 9,349,598 - Horak , et al. May 24, 2 | 2016-05-24 |
Microelectronic structure including air gap Grant 9,332,628 - Edelstein , et al. May 3, 2 | 2016-05-03 |
Non-lithographic hole pattern formation Grant 9,330,962 - Tseng , et al. May 3, 2 | 2016-05-03 |
Replacement Metal Gate App 20160086944 - Horak; David V. ;   et al. | 2016-03-24 |
Integrated circuits having gate cap protection and methods of forming the same Grant 9,269,611 - Pham , et al. February 23, 2 | 2016-02-23 |
Dual damascene dual alignment interconnect scheme Grant 9,269,621 - Holmes , et al. February 23, 2 | 2016-02-23 |
Sub-lithographic semiconductor structures with non-constant pitch Grant 9,263,290 - Bergendahl , et al. February 16, 2 | 2016-02-16 |
Overlay-tolerant via mask and reactive ion etch (RIE) technique Grant 9,263,388 - Holmes , et al. February 16, 2 | 2016-02-16 |
Replacement metal gate Grant 9,231,080 - Horak , et al. January 5, 2 | 2016-01-05 |
Sub-lithographic Semiconductor Structures With Non-constant Pitch App 20150380262 - Bergendahl; Marc A. ;   et al. | 2015-12-31 |
Gate Contact With Vertical Isolation From Source-drain App 20150357409 - Horak; David V. ;   et al. | 2015-12-10 |
Mask free protection of work function material portions in wide replacement gate electrodes Grant 9,202,879 - Koburger, III , et al. December 1, 2 | 2015-12-01 |
Recessing And Capping Of Gate Structures With Varying Metal Compositions App 20150340462 - XIE; Ruilong ;   et al. | 2015-11-26 |
Sub-lithographic semiconductor structures with non-constant pitch Grant 9,177,820 - Bergendahl , et al. November 3, 2 | 2015-11-03 |
Copper interconnect structures and methods of making same Grant 9,159,653 - Yang , et al. October 13, 2 | 2015-10-13 |
Microelectronic Structure Including Air Gap App 20150289361 - Edelstein; Daniel C. ;   et al. | 2015-10-08 |
Gate contact with vertical isolation from source-drain Grant 9,147,576 - Horak , et al. September 29, 2 | 2015-09-29 |
Replacement Metal Gate App 20150270373 - Horak; David V. ;   et al. | 2015-09-24 |
Interconnect structures and methods for back end of the line integration Grant 9,141,749 - Horak , et al. September 22, 2 | 2015-09-22 |
Recessing and capping of gate structures with varying metal compositions Grant 9,130,029 - Xie , et al. September 8, 2 | 2015-09-08 |
Profile control in interconnect structures Grant 9,105,641 - Chen , et al. August 11, 2 | 2015-08-11 |
Microelectronic structure including air gap Grant 9,105,693 - Edelstein , et al. August 11, 2 | 2015-08-11 |
Overlay-tolerant Via Mask And Reactive Ion Etch (rie) Technique App 20150221591 - Holmes; Steven J. ;   et al. | 2015-08-06 |
Gate Contact With Vertical Isolation From Source-drain App 20150206754 - Horak; David V. ;   et al. | 2015-07-23 |
Integrated Circuits Having Gate Cap Protection And Methods Of Forming The Same App 20150206844 - Pham; Daniel Thanh Khae ;   et al. | 2015-07-23 |
Bi-layer gate cap for self-aligned contact formation Grant 9,064,801 - Horak , et al. June 23, 2 | 2015-06-23 |
Microelectronic structure including air gap Grant 9,059,251 - Edelstein , et al. June 16, 2 | 2015-06-16 |
Overlay-tolerant via mask and reactive ion etch (RIE) technique Grant 9,059,254 - Holmes , et al. June 16, 2 | 2015-06-16 |
Replacement gate MOSFET with raised source and drain Grant 9,059,270 - Ponoth , et al. June 16, 2 | 2015-06-16 |
Non-lithographic hole pattern formation Grant 9,054,156 - Tseng , et al. June 9, 2 | 2015-06-09 |
Borderless Contact For Ultra-thin Body Devices App 20150155353 - Fan; Su Chen ;   et al. | 2015-06-04 |
Middle of-line borderless contact structure and method of forming Grant 9,048,217 - Anderson , et al. June 2, 2 | 2015-06-02 |
Borderless contact for ultra-thin body devices Grant 9,024,389 - Fan , et al. May 5, 2 | 2015-05-05 |
Non-lithographic line pattern formation Grant 8,969,213 - Tseng , et al. March 3, 2 | 2015-03-03 |
Formation of the dielectric cap layer for a replacement gate structure Grant 8,957,465 - Xie , et al. February 17, 2 | 2015-02-17 |
Profile Control In Interconnect Structures App 20150035154 - Chen; Shyng-Tsong ;   et al. | 2015-02-05 |
Middle-of-line Borderless Contact Structure And Method Of Forming App 20150035026 - Anderson; Brent A. ;   et al. | 2015-02-05 |
Spacer For Enhancing Via Pattern Overlay Tolerence App 20150035157 - Holmes; Steven J. ;   et al. | 2015-02-05 |
Replacement gate MOSFET with raised source and drain Grant 8,946,006 - Ponoth , et al. February 3, 2 | 2015-02-03 |
Microelectronic substrate having removable edge extension element Grant 8,946,866 - Koburger, III , et al. February 3, 2 | 2015-02-03 |
Dual-metal self-aligned wires and vias Grant 8,946,908 - Holmes , et al. February 3, 2 | 2015-02-03 |
Finfets and fin isolation structures Grant 8,941,179 - Bergendahl , et al. January 27, 2 | 2015-01-27 |
Contact formation for ultra-scaled devices Grant 8,937,359 - Xie , et al. January 20, 2 | 2015-01-20 |
Integrated Circuit Structure Having Selectively Formed Metal Cap App 20150008527 - Yang; Chih-Chao ;   et al. | 2015-01-08 |
Dual hard mask lithography process Grant 8,916,337 - Arnold , et al. December 23, 2 | 2014-12-23 |
Middle of-line borderless contact structure and method of forming Grant 8,912,059 - Anderson , et al. December 16, 2 | 2014-12-16 |
Electrical fuse structure and method of fabricating same Grant 8,912,627 - Yang , et al. December 16, 2 | 2014-12-16 |
Replacement Gate Electrode With A Self-aligned Dielectric Spacer App 20140363941 - Ponoth; Shom ;   et al. | 2014-12-11 |
Single fin cut employing angled processing methods Grant 8,906,807 - Bergendahl , et al. December 9, 2 | 2014-12-09 |
Borderless contact for an aluminum-containing gate Grant 8,906,793 - Kanakasabapathy , et al. December 9, 2 | 2014-12-09 |
Creation of vias and trenches with different depths Grant 8,907,458 - Ponoth , et al. December 9, 2 | 2014-12-09 |
Hybrid copper interconnect structure and method of fabricating same Grant 8,901,744 - Yang , et al. December 2, 2 | 2014-12-02 |
Non-lithographic Line Pattern Formation App 20140349088 - Tseng; Chiahsun ;   et al. | 2014-11-27 |
Non-lithographic Hole Pattern Formation App 20140346640 - Tseng; Chiahsun ;   et al. | 2014-11-27 |
Dual Damascene Dual Alignment Interconnect Scheme App 20140342549 - Holmes; Steven J. ;   et al. | 2014-11-20 |
Contact Formation For Ultra-scaled Devices App 20140339629 - Xie; Ruilong ;   et al. | 2014-11-20 |
Methods of manufacturing finFET devices Grant 8,877,615 - Basker , et al. November 4, 2 | 2014-11-04 |
Integrated circuit structure having selectively formed metal cap Grant 8,877,645 - Yang , et al. November 4, 2 | 2014-11-04 |
Sealed air gap for semiconductor chip Grant 8,871,624 - Horak , et al. October 28, 2 | 2014-10-28 |
Formation Of The Dielectric Cap Layer For A Replacement Gate Structure App 20140299924 - XIE; Ruilong ;   et al. | 2014-10-09 |
Self-aligned contacts Grant 8,853,076 - Fan , et al. October 7, 2 | 2014-10-07 |
finFET devices Grant 8,847,323 - Basker , et al. September 30, 2 | 2014-09-30 |
Copper Interconnect Structures And Methods Of Making Same App 20140264878 - Yang; Chih-Chao ;   et al. | 2014-09-18 |
Replacement Gate Electrode With A Self-aligned Dielectric Spacer App 20140264490 - Ponoth; Shom ;   et al. | 2014-09-18 |
Method of fabricating a profile control in interconnect structures Grant 8,835,305 - Yang , et al. September 16, 2 | 2014-09-16 |
Electrical isolation structures for ultra-thin semiconductor-on-insulator devices Grant 8,836,031 - Haran , et al. September 16, 2 | 2014-09-16 |
Dual mandrel sidewall image transfer processes Grant 8,828,876 - Horak , et al. September 9, 2 | 2014-09-09 |
Air-dielectric for subtractive etch line and via metallization Grant 8,828,862 - Horak , et al. September 9, 2 | 2014-09-09 |
Finfets And Fin Isolation Structures App 20140231918 - Bergendahl; Marc A. ;   et al. | 2014-08-21 |
Copper interconnect structures and methods of making same Grant 8,802,558 - Yang , et al. August 12, 2 | 2014-08-12 |
Dual damascene dual alignment interconnect scheme Grant 8,803,321 - Holmes , et al. August 12, 2 | 2014-08-12 |
Borderless contact structure employing dual etch stop layers Grant 8,796,783 - Fan , et al. August 5, 2 | 2014-08-05 |
Air-dielectric For Subtractive Etch Line And Via Metallization App 20140203453 - Horak; David V. ;   et al. | 2014-07-24 |
FinFETs and fin isolation structures Grant 8,785,284 - Bergendahl , et al. July 22, 2 | 2014-07-22 |
Semiconductor structure containing an aluminum-containing replacement gate electrode Grant 8,779,515 - Kanakasabapathy , et al. July 15, 2 | 2014-07-15 |
Dual Mandrel Sidewall Image Transfer Processes App 20140190935 - Horak; David V. ;   et al. | 2014-07-10 |
Formation of the dielectric cap layer for a replacement gate structure Grant 8,772,168 - Xie , et al. July 8, 2 | 2014-07-08 |
Method of forming a borderless contact structure employing dual etch stop layers Grant 8,765,585 - Fan , et al. July 1, 2 | 2014-07-01 |
Formation of air gap with protection of metal lines Grant 8,754,520 - Nogami , et al. June 17, 2 | 2014-06-17 |
Low-profile local interconnect and method of making the same Grant 8,754,483 - Ponoth , et al. June 17, 2 | 2014-06-17 |
Recessing And Capping Of Gate Structures With Varying Metal Compositions App 20140159169 - XIE; Ruilong ;   et al. | 2014-06-12 |
Borderless contacts in semiconductor devices Grant 8,741,752 - Fan , et al. June 3, 2 | 2014-06-03 |
Air-dielectric for subtractive etch line and via metallization Grant 8,735,279 - Horak , et al. May 27, 2 | 2014-05-27 |
Copper Interconnect Structures And Methods Of Making Same App 20140124933 - Yang; Chih-Chao ;   et al. | 2014-05-08 |
Metal alloy cap integration Grant 8,716,127 - Yang , et al. May 6, 2 | 2014-05-06 |
Sub-lithographic Semiconductor Structures With Non-constant Pitch App 20140110817 - Bergendahl; Marc A. ;   et al. | 2014-04-24 |
Dual Hard Mask Lithography Process App 20140110846 - Arnold; John C. ;   et al. | 2014-04-24 |
Creation of vias and trenches with different depths Grant 8,703,604 - Ponoth , et al. April 22, 2 | 2014-04-22 |
Borderless interconnect line structure self-aligned to upper and lower level contact vias Grant 8,704,343 - Ponoth , et al. April 22, 2 | 2014-04-22 |
Microelectronic structure by selective deposition Grant 8,697,561 - Furukawa , et al. April 15, 2 | 2014-04-15 |
Single Fin Cut Employing Angled Processing Methods App 20140099792 - Bergendahl; Marc A. ;   et al. | 2014-04-10 |
Recessing and capping of gate structures with varying metal compositions Grant 8,679,909 - Xie , et al. March 25, 2 | 2014-03-25 |
Method to improve wet etch budget in FEOL integration Grant 8,679,941 - Cummings , et al. March 25, 2 | 2014-03-25 |
Middle-of-line Borderless Contact Structure And Method Of Forming App 20140077276 - Anderson; Brent A. ;   et al. | 2014-03-20 |
Self-aligned Contacts App 20140070282 - Fan; Su Chen ;   et al. | 2014-03-13 |
Overlay-tolerant Via Mask And Reactive Ion Etch (rie) Technique App 20140061930 - Holmes; Steven J. ;   et al. | 2014-03-06 |
Silicon-on-insulator Transistor With Self-aligned Borderless Source/drain Contacts App 20140061799 - FAN; Susan S. ;   et al. | 2014-03-06 |
Size-filtered Multimetal Structures App 20140065813 - Horak; David V. ;   et al. | 2014-03-06 |
Electrical Isolation Structures For Ultra-thin Semiconductor-on-insulator Devices App 20140061800 - Haran; Balasubramanian S. ;   et al. | 2014-03-06 |
Interconnect Structures And Methods For Back End Of The Line Integration App 20140068541 - HORAK; David V. ;   et al. | 2014-03-06 |
Profile Control In Interconnect Structures App 20140035142 - Yang; Chih-Chao ;   et al. | 2014-02-06 |
Non-lithographic Line Pattern Formation App 20140027917 - Tseng; Chiahsun ;   et al. | 2014-01-30 |
Non-lithographic Hole Pattern Formation App 20140027923 - Tseng; Chiahsun ;   et al. | 2014-01-30 |
Borderless contacts in semiconductor devices Grant 8,637,908 - Fan , et al. January 28, 2 | 2014-01-28 |
Interconnect structures and methods for back end of the line integration Grant 8,637,400 - Horak , et al. January 28, 2 | 2014-01-28 |
Electrical isolation structures for ultra-thin semiconductor-on-insulator devices Grant 8,629,008 - Haran , et al. January 14, 2 | 2014-01-14 |
Mask free protection of work function material portions in wide replacement gate electrodes Grant 8,629,511 - Koburger, III , et al. January 14, 2 | 2014-01-14 |
Method for fabricating silicon-on-insulator transistor with self-aligned borderless source/drain contacts Grant 8,623,730 - Fan , et al. January 7, 2 | 2014-01-07 |
Electrical fuse structure and method of fabricating same Grant 8,609,534 - Yang , et al. December 17, 2 | 2013-12-17 |
Recessing And Capping Of Gate Structures With Varying Metal Compositions App 20130328111 - Xie; Ruilong ;   et al. | 2013-12-12 |
Dual Damascene Dual Alignment Interconnect Scheme App 20130328208 - Holmes; Steven J. ;   et al. | 2013-12-12 |
Borderless Contacts For Metal Gates Through Selective Cap Deposition App 20130320414 - Fan; Su-Chen ;   et al. | 2013-12-05 |
Dual-metal Self-aligned Wires And Vias App 20130320546 - Holmes; Steven J. ;   et al. | 2013-12-05 |
Borderless Contacts For Metal Gates Through Selective Cap Deposition App 20130320411 - Fan; Su-Chen ;   et al. | 2013-12-05 |
Hybrid Copper Interconnect Structure And Method Of Fabricating Same App 20130320545 - Yang; Chih-Chao ;   et al. | 2013-12-05 |
Spacer For Enhancing Via Pattern Overlay Tolerence App 20130313717 - Holmes; Steven J. ;   et al. | 2013-11-28 |
Mask Free Protection Of Work Function Material Portions In Wide Replacement Gate Electrodes App 20130307086 - Koburger, III; Charles W. ;   et al. | 2013-11-21 |
Mask Free Protection Of Work Function Material Portions In Wide Replacement Gate Electrodes App 20130309857 - Koburger, III; Charles W. ;   et al. | 2013-11-21 |
Borderless Contact For An Aluminum-Containing Gate App 20130307033 - KANAKASABAPATHY; Sivananda K. ;   et al. | 2013-11-21 |
Borderless Contact For An Aluminum-containing Gate App 20130309852 - KANAKASABAPATHY; Sivananda K. ;   et al. | 2013-11-21 |
Dual-metal self-aligned wires and vias Grant 8,569,168 - Holmes , et al. October 29, 2 | 2013-10-29 |
CMOS gate structures fabricated by selective oxidation Grant 8,568,604 - Doris , et al. October 29, 2 | 2013-10-29 |
Integrated circuit line with electromigration barriers Grant 8,558,284 - Horak , et al. October 15, 2 | 2013-10-15 |
Metal Alloy Cap Integration App 20130252419 - Yang; Chih-Chao ;   et al. | 2013-09-26 |
Field effect transistor Grant 8,541,823 - Furukawa , et al. September 24, 2 | 2013-09-24 |
Hybrid copper interconnect structure and method of fabricating same Grant 8,525,339 - Yang , et al. September 3, 2 | 2013-09-03 |
Dual Hard Mask Lithography Process App 20130216776 - Arnold; John C. ;   et al. | 2013-08-22 |
Chemical and particulate filters containing chemically modified carbon nanotube structures Grant 8,512,458 - Holmes , et al. August 20, 2 | 2013-08-20 |
Dual-metal Self-aligned Wires And Vias App 20130207270 - Holmes; Steven J. ;   et al. | 2013-08-15 |
Multi-exposure lithography employing a single anti-reflective coating layer Grant 8,507,187 - Basker , et al. August 13, 2 | 2013-08-13 |
Structure For Nano-scale Metallization And Method For Fabricating Same App 20130193579 - Ponoth; Shom ;   et al. | 2013-08-01 |
Formation Of The Dielectric Cap Layer For A Replacement Gate Structure App 20130187203 - XIE; Ruilong ;   et al. | 2013-07-25 |
Metal alloy cap integration Grant 8,492,274 - Yang , et al. July 23, 2 | 2013-07-23 |
Pad bonding employing a self-aligned plated liner for adhesion enhancement Grant 8,492,265 - Yang , et al. July 23, 2 | 2013-07-23 |
Structure for nano-scale metallization and method for fabricating same Grant 8,492,270 - Ponoth , et al. July 23, 2 | 2013-07-23 |
Borderless Contact Structure App 20130181261 - BASKER; VEERARAGHAVAN S. ;   et al. | 2013-07-18 |
Electrical Isolation Structures For Ultra-thin Semiconductor-on-insulator Devices App 20130175622 - Haran; Balasubramanian S. ;   et al. | 2013-07-11 |
Silicon-on-insulator Transistor With Self-aligned Borderless Source/drain Contacts App 20130175619 - FAN; Susan S. ;   et al. | 2013-07-11 |
Method For Fabricating Silicon-on-insulator Transistor With Self-aligned Borderless Source/drain Contacts App 20130178052 - FAN; Susan S. ;   et al. | 2013-07-11 |
Pad bonding employing a self-aligned plated liner for adhesion enhancement Grant 8,482,132 - Yang , et al. July 9, 2 | 2013-07-09 |
Borderless Contact Structure Employing Dual Etch Stop Layers App 20130168749 - Fan; Su C. ;   et al. | 2013-07-04 |
Electrical Fuse Structure And Method Of Fabricating Same App 20130168806 - Yang; Chih-Chao ;   et al. | 2013-07-04 |
Sublithographic patterning employing image transfer of a controllably damaged dielectric sidewall Grant 8,476,160 - Ponoth , et al. July 2, 2 | 2013-07-02 |
Replacement Gate Mosfet With Raised Source And Drain App 20130161697 - Ponoth; Shom ;   et al. | 2013-06-27 |
Formation Of Air Gap With Protection Of Metal Lines App 20130134590 - Nogami; Takeshi ;   et al. | 2013-05-30 |
Borderless Contact For Ultra-thin Body Devices App 20130134517 - Fan; Su Chen ;   et al. | 2013-05-30 |
Sealed Air Gap For Semiconductor Chip App 20130130489 - Horak; David V. ;   et al. | 2013-05-23 |
Metal Alloy Cap Integration App 20130115767 - Yang; Chih-Chao ;   et al. | 2013-05-09 |
Metal Alloy Cap Integration App 20130112462 - Yang; Chih-Chao ;   et al. | 2013-05-09 |
Structure and method for manufacturing interconnect structures having self-aligned dielectric caps Grant 8,404,582 - Horak , et al. March 26, 2 | 2013-03-26 |
Integrated Circuit Structure Having Selectively Formed Metal Cap App 20130069161 - Yang; Chih-Chao ;   et al. | 2013-03-21 |
Formation of air gap with protection of metal lines Grant 8,399,350 - Nogami , et al. March 19, 2 | 2013-03-19 |
Sealed air gap for semiconductor chip Grant 8,390,079 - Horak , et al. March 5, 2 | 2013-03-05 |
Borderless contact for ultra-thin body devices Grant 8,383,490 - Fan , et al. February 26, 2 | 2013-02-26 |
Size-filtered Multimetal Structures App 20130043556 - Horak; David V. ;   et al. | 2013-02-21 |
FinFET devices Grant 8,368,146 - Basker , et al. February 5, 2 | 2013-02-05 |
Borderless Contact For Ultra-thin Body Devices App 20130026570 - Fan; Su Chen ;   et al. | 2013-01-31 |
Hybrid Copper Interconnect Structure and Method of Fabricating Same App 20130026635 - Yang; Chih-Chao ;   et al. | 2013-01-31 |
Borderless Contacts in Semiconductor Devices App 20130023115 - Fan; Su Chen ;   et al. | 2013-01-24 |
Interconnect structure for electromigration enhancement Grant 8,354,751 - Horak , et al. January 15, 2 | 2013-01-15 |
Finfet Devices And Methods Of Manufacture App 20130009249 - BASKER; Veeraraghavan S. ;   et al. | 2013-01-10 |
Microelectronic Structure Including Air Gap App 20130009282 - Edelstein; Daniel C. ;   et al. | 2013-01-10 |
Microelectronic Structure Including Air Gap App 20130012017 - Edelstein; Daniel C. ;   et al. | 2013-01-10 |
Forming borderless contact for transistors in a replacement metal gate process Grant 8,349,674 - Ponoth , et al. January 8, 2 | 2013-01-08 |
Low-profile Local Interconnect And Method Of Making The Same App 20120326237 - Ponoth; Shom ;   et al. | 2012-12-27 |
Borderless Interconnect Line Structure Self-aligned To Upper And Lower Level Contact Vias App 20120329275 - Ponoth; Shom ;   et al. | 2012-12-27 |
Interconnect structures and methods for back end of the line integration App 20120329267 - Horak; David V. ;   et al. | 2012-12-27 |
Sidewall Image Transfer Process Employing A Cap Material Layer For A Metal Nitride Layer App 20120282779 - Arnold; John C. ;   et al. | 2012-11-08 |
Borderless Contact Structure Employing Dual Etch Stop Layers App 20120273848 - Fan; Su C. ;   et al. | 2012-11-01 |
Sidewall image transfer process employing a cap material layer for a metal nitride layer Grant 8,298,954 - Arnold , et al. October 30, 2 | 2012-10-30 |
Borderless interconnect line structure self-aligned to upper and lower level contact vias Grant 8,299,625 - Ponoth , et al. October 30, 2 | 2012-10-30 |
Microelectronic structure including air gap Grant 8,288,268 - Edelstein , et al. October 16, 2 | 2012-10-16 |
Forming Borderless Contact For Transistors In A Replacement Metal Gate Process App 20120248508 - Ponoth; Shom ;   et al. | 2012-10-04 |
Microelectronic Substrate Having Removable Edge Extension Element App 20120241913 - Koburger, III; Charles W. ;   et al. | 2012-09-27 |
Device component forming method with a trim step prior to sidewall image transfer (SIT) processing App 20120208356 - Furukawa; Toshiharu ;   et al. | 2012-08-16 |
Sealed Air Gap For Semiconductor Chip App 20120199886 - Horak; David V. ;   et al. | 2012-08-09 |
Method of forming borderless contact for transistor Grant 8,232,204 - Horak , et al. July 31, 2 | 2012-07-31 |
Semiconductor structure having a contact-level air gap within the interlayer dielectrics above a semiconductor device and a method of forming the semiconductor structure using a self-assembly approach Grant 8,232,618 - Breyta , et al. July 31, 2 | 2012-07-31 |
Method to improve wet etch budget in FEOL integration Grant 8,232,179 - Cummings , et al. July 31, 2 | 2012-07-31 |
Air-dielectric For Subtractive Etch Line And Via Metallization App 20120187566 - Horak; David V. ;   et al. | 2012-07-26 |
Pad Bonding Employing A Self-aligned Plated Liner For Adhesion Enhancement App 20120190187 - Yang; Chih-Chao ;   et al. | 2012-07-26 |
Methods Of Manufacturing Finfet Devices App 20120190179 - BASKER; Veeraraghavan S. ;   et al. | 2012-07-26 |
Creation of vias and trenches with different depths Grant 8,227,339 - Ponoth , et al. July 24, 2 | 2012-07-24 |
Method To Improve Wet Etch Budget In Feol Integration App 20120178236 - Cummings; Jason E. ;   et al. | 2012-07-12 |
Integrated Circuit Line With Electromigration Barriers App 20120175775 - Horak; David V. ;   et al. | 2012-07-12 |
Creation Of Vias And Trenches With Different Depths App 20120171859 - Ponoth; Shom ;   et al. | 2012-07-05 |
Integrated circuit line with electromigration barriers Grant 8,211,776 - Horak , et al. July 3, 2 | 2012-07-03 |
Creation Of Vias And Trenches With Different Depths App 20120153503 - Ponoth; Shom ;   et al. | 2012-06-21 |
Microelectronic substrate having removable edge extension element Grant 8,202,460 - Koburger, III , et al. June 19, 2 | 2012-06-19 |
Microelectronic Structure By Selective Deposition App 20120142182 - Furukawa; Toshiharu ;   et al. | 2012-06-07 |
Device component forming method with a trim step prior to sidewall image transfer (SIT) processing Grant 8,183,159 - Furukawa , et al. May 22, 2 | 2012-05-22 |
Sublithographic Patterning Employing Image Transfer Of A Controllably Damaged Dielectric Sidewall App 20120104619 - Ponoth; Shom ;   et al. | 2012-05-03 |
Sealed Air Gap For Semiconductor Chip App 20120104512 - Horak; David V. ;   et al. | 2012-05-03 |
Replacement Gate Mosfet With Raised Source And Drain App 20120104470 - Ponoth; Shom ;   et al. | 2012-05-03 |
Borderless Interconnect Line Structure Self-aligned To Upper And Lower Level Contact Vias App 20120086128 - Ponoth; Shom ;   et al. | 2012-04-12 |
Electrical Fuse Structure And Method Of Fabricating Same App 20120074520 - Yang; Chih-Chao ;   et al. | 2012-03-29 |
Structure For Nano-scale Metallization And Method For Fabricating Same App 20120068346 - PONOTH; SHOM ;   et al. | 2012-03-22 |
Microelectronic structure by selective deposition Grant 8,138,100 - Furukawa , et al. March 20, 2 | 2012-03-20 |
Method of forming self-aligned local interconnect and structure formed thereby Grant 8,124,525 - Koburger, III , et al. February 28, 2 | 2012-02-28 |
Semiconductor Structure Having A Contact-level Air Gap Within The Interlayer Dielectrics Above A Semiconductor Device And A Method Of Forming The Semiconductor Structure Using A Self-assembly Approach App 20120037962 - Breyta; Gregory ;   et al. | 2012-02-16 |
Method of forming replacement metal gate with borderless contact and structure thereof Grant 8,084,311 - Horak , et al. December 27, 2 | 2011-12-27 |
Finfet Devices And Methods Of Manufacture App 20110303983 - BASKER; Veeraraghavan S. ;   et al. | 2011-12-15 |
Structure And Method For Manufacturing Interconnect Structures Having Self-aligned Dielectric Caps App 20110272812 - HORAK; DAVID V. ;   et al. | 2011-11-10 |
Microelectronic Structure Including Air Gap App 20110266682 - Edelstein; Daniel C. ;   et al. | 2011-11-03 |
Field Effect Transistor App 20110266621 - Furukawa; Toshiharu ;   et al. | 2011-11-03 |
Method and system for controlling radical distribution Grant 8,038,834 - Funk , et al. October 18, 2 | 2011-10-18 |
Shared gate for conventional planar device and horizontal CNT Grant 8,039,334 - Furukawa , et al. October 18, 2 | 2011-10-18 |
Temporary etchable liner for forming air gap Grant 8,030,202 - Horak , et al. October 4, 2 | 2011-10-04 |
Programmable anti-fuse structure with DLC dielectric layer Grant 8,008,669 - Yang , et al. August 30, 2 | 2011-08-30 |
Field effect transistor Grant 8,004,024 - Furukawa , et al. August 23, 2 | 2011-08-23 |
Formation Of Air Gap With Protection Of Metal Lines App 20110193230 - Nogami; Takeshi ;   et al. | 2011-08-11 |
Integrated Circuit Line With Electromigration Barriers App 20110163450 - Horak; David V. ;   et al. | 2011-07-07 |
Pseudo hybrid structure for low K interconnect integration Grant 7,955,968 - Leung , et al. June 7, 2 | 2011-06-07 |
Sub-lithographic dimensioned air gap formation and related structure Grant 7,943,480 - Edelstein , et al. May 17, 2 | 2011-05-17 |
Integrated circuit with upstanding stylus Grant 7,943,919 - Horak , et al. May 17, 2 | 2011-05-17 |
Creation Of Vias And Trenches With Different Depths App 20110101538 - Ponoth; Shom ;   et al. | 2011-05-05 |
Phase change memory cell with vertical transistor Grant 7,932,167 - Furukawa , et al. April 26, 2 | 2011-04-26 |
Carbon nanotube conductor for trench capacitors Grant 7,932,549 - Holmes , et al. April 26, 2 | 2011-04-26 |
Interconnect structure Grant 7,928,570 - Ponoth , et al. April 19, 2 | 2011-04-19 |
Phase change tip storage cell Grant 7,928,420 - Horak , et al. April 19, 2 | 2011-04-19 |
Integrated circuit with upstanding stylus Grant 7,928,012 - Horak , et al. April 19, 2 | 2011-04-19 |
Pad Bonding Employing A Self-aligned Plated Liner For Adhesion Enhancement App 20110084403 - Yang; Chih-Chao ;   et al. | 2011-04-14 |
Chemical and particulate filters containing chemically modified carbon nanotube structures Grant 7,922,796 - Holmes , et al. April 12, 2 | 2011-04-12 |
Method To Improve Wet Etch Budget In Feol Integration App 20110081765 - Cummings; Jason E. ;   et al. | 2011-04-07 |
Via gouging methods and related semiconductor structure Grant 7,892,968 - Chen , et al. February 22, 2 | 2011-02-22 |
Immersion lithography with equalized pressure on at least projection optics component and wafer Grant 7,889,317 - Furukawa , et al. February 15, 2 | 2011-02-15 |
Shared Gate For Conventional Planar Device And Horizontal Cnt App 20110027951 - Furukawa; Toshiharu ;   et al. | 2011-02-03 |
Programmable Anti-fuse Structure With Dlc Dielectric Layer App 20110018093 - Yang; Chih-Chao ;   et al. | 2011-01-27 |
Conductive liner at an interface between a shallow trench isolation structure and a buried oxide layer Grant 7,855,428 - Dennard , et al. December 21, 2 | 2010-12-21 |
Shared gate for conventional planar device and horizontal CNT Grant 7,838,943 - Furukawa , et al. November 23, 2 | 2010-11-23 |
Simultaneous conditioning of a plurality of memory cells through series resistors Grant 7,834,384 - Furukawa , et al. November 16, 2 | 2010-11-16 |
Layout and process to contact sub-lithographic structures Grant 7,825,525 - Furukawa , et al. November 2, 2 | 2010-11-02 |
Interconnect Structure App 20100264543 - Ponoth; Shom ;   et al. | 2010-10-21 |
Microelectronic structure by selective deposition Grant 7,816,743 - Furukawa , et al. October 19, 2 | 2010-10-19 |
Method of making integrated circuit (IC) including at least one storage cell Grant 7,795,068 - Horak , et al. September 14, 2 | 2010-09-14 |
Pseudo Hybrid Structure for Low K Interconnect Integration App 20100227471 - Leung; Pak K. ;   et al. | 2010-09-09 |
Reduced mask count gate conductor definition Grant 7,771,604 - Furukawa , et al. August 10, 2 | 2010-08-10 |
Method And System For Controlling Radical Distribution App 20100193471 - FUNK; Merritt ;   et al. | 2010-08-05 |
Method and system for controlling radical distribution Grant 7,718,030 - Funk , et al. May 18, 2 | 2010-05-18 |
Chemical And Particulate Filters Containing Chemically Modified Carbon Nanotube Structures App 20100119422 - Holmes; Steven J. ;   et al. | 2010-05-13 |
Chemical and particulate filters containing chemically modified carbon nanotube structures Grant 7,708,816 - Holmes , et al. May 4, 2 | 2010-05-04 |
Method for fabricating semiconductor device having conductive liner for rad hard total dose immunity Grant 7,704,854 - Dennard , et al. April 27, 2 | 2010-04-27 |
Interconnect structure with a mushroom-shaped oxide capping layer and method for fabricating same Grant 7,687,877 - Yang , et al. March 30, 2 | 2010-03-30 |
Exposures system including chemical and particulate filters containing chemically modified carbon nanotube structures Grant 7,674,324 - Holmes , et al. March 9, 2 | 2010-03-09 |
Methods and structure for forming self-aligned borderless contacts for strain engineered logic devices Grant 7,659,171 - Furukawa , et al. February 9, 2 | 2010-02-09 |
Shallow trench isolation formation Grant 7,652,334 - Furukawa , et al. January 26, 2 | 2010-01-26 |
Method and apparatus for cleaning a semiconductor substrate in an immersion lithography system Grant 7,648,819 - Holmes , et al. January 19, 2 | 2010-01-19 |
Multi-exposure Lithography Employing A Single Anti-reflective Coating Layer App 20100009131 - Basker; Veeraraghavan S. ;   et al. | 2010-01-14 |
VERTICAL PROFILE FinFET GATE FORMED VIA PLATING UPON A THIN GATE DIELECTRIC App 20090321833 - Basker; Veeraraghaven S. ;   et al. | 2009-12-31 |
Interconnect Structure for Electromigration Enhancement App 20090309226 - Horak; David V. ;   et al. | 2009-12-17 |
Integrated Circuit With Upstanding Stylus App 20090305508 - HORAK; DAVID V. ;   et al. | 2009-12-10 |
Method For Fabricating Semiconductor Device Having Conductive Liner For Rad Hard Total Dose Immunity App 20090280619 - Dennard; Robert H. ;   et al. | 2009-11-12 |
Structure For Conductive Liner For Rad Hard Total Dose Immunity And Structure Thereof App 20090278226 - DENNARD; Robert H. ;   et al. | 2009-11-12 |
Interconnect Structure With A Mushroom-shaped Oxide Capping Layer And Method For Fabricating Same App 20090278258 - Yang; Chih-Chao ;   et al. | 2009-11-12 |
Carbon nanotubes as low voltage field emission sources for particle precipitators Grant 7,601,205 - Furukawa , et al. October 13, 2 | 2009-10-13 |
Sub-lithographic imaging techniques and processes Grant 7,585,614 - Furukawa , et al. September 8, 2 | 2009-09-08 |
Sub-lithographic Dimensioned Air Gap Formation And Related Structure App 20090200636 - Edelstein; Daniel C. ;   et al. | 2009-08-13 |
Via Gouging Methods And Related Semiconductor Structure App 20090184400 - Chen; Shyng-Tsong ;   et al. | 2009-07-23 |
Implantation of gate regions in semiconductor device fabrication Grant 7,557,023 - Furukawa , et al. July 7, 2 | 2009-07-07 |
Memory device and method of manufacturing the device by simultaneously conditioning transition metal oxide layers in a plurality of memory cells Grant 7,541,608 - Furukawa , et al. June 2, 2 | 2009-06-02 |
Vertical carbon nanotube transistor integration Grant 7,535,016 - Furukawa , et al. May 19, 2 | 2009-05-19 |
Field Effect Transistor App 20090121298 - Furukawa; Toshiharu ;   et al. | 2009-05-14 |
Accessible chip stack and process of manufacturing thereof Grant 7,528,494 - Furukawa , et al. May 5, 2 | 2009-05-05 |
Method And Apparatus For Cleaning A Semiconductor Substrate In An Immersion Lithography System App 20090087795 - Holmes; Steven J. ;   et al. | 2009-04-02 |
Microelectronic Structure By Selective Deposition App 20090072317 - Furukawa; Toshiharu ;   et al. | 2009-03-19 |
Microelectronic Structure By Selective Deposition App 20090075439 - Furukawa; Toshiharu ;   et al. | 2009-03-19 |
Methods For Forming Self-aligned Borderless Contacts For Strain Engineered Logic Devices And Structure Thereof App 20090057730 - Furukawa; Toshiharu ;   et al. | 2009-03-05 |
Conductive Element Forming Using Sacrificial Layer Patterned To Form Dielectric Layer App 20090032491 - Basker; Veeraraghavan S. ;   et al. | 2009-02-05 |
Carbon Nanotube Conductor For Trench Capacitors App 20090014767 - Furukawa; Toshiharu ;   et al. | 2009-01-15 |
Phase Change Memory Cell with Vertical Transistor App 20090001337 - Furukawa; Toshiharu ;   et al. | 2009-01-01 |
Chemical And Particulate Filters Containing Chemically Modified Carbon Nanotube Structures App 20080286466 - Holmes; Steven J. ;   et al. | 2008-11-20 |
Exposures System Including Chemical And Particulate Filters Containing Chemically Modified Carbon Nanotube Structures App 20080284992 - Holmes; Steven J. ;   et al. | 2008-11-20 |
Chemical And Particulate Filters Containing Chemically Modified Carbon Nanotube Structures App 20080282893 - Holmes; Steven J. ;   et al. | 2008-11-20 |
CMOS Gate Structures Fabricated by Selective Oxidation App 20080286971 - Doris; Bruce B. ;   et al. | 2008-11-20 |
Chemical And Particulate Filters Containing Chemically Modified Carbon Nanotube Structures App 20080271606 - Holmes; Steven J. ;   et al. | 2008-11-06 |
Carbon Nanotubes As Low Voltage Field Emission Sources for Particle Precipitators App 20080257156 - Furukawa; Toshiharu ;   et al. | 2008-10-23 |
Method Of Making Integrated Circuit (ic) Including At Least One Storage Cell App 20080248624 - Horak; David V. ;   et al. | 2008-10-09 |
Methods Of Forming Gas Dielectric And Related Structure App 20080217730 - Furukawa; Toshiharu ;   et al. | 2008-09-11 |
Bipolar Transistor Using Selective Dielectric Deposition And Methods For Fabrication Thereof App 20080203536 - Furukawa; Toshiharu ;   et al. | 2008-08-28 |
Simultaneous Conditioning of a Plurality of Memory Cells Through Series Resistors App 20080185652 - Furukawa; Toshijaru ;   et al. | 2008-08-07 |
Mandrel/trim Alignment In Sit Processing App 20080188080 - Furukawa; Toshiharu ;   et al. | 2008-08-07 |
Immersion Lithography With Equalized Pressure On At Least Projection Optics Component And Wafer App 20080165335 - Furukawa; Toshiharu ;   et al. | 2008-07-10 |
Layout And Process To Contact Sub-lithographic Structures App 20080142995 - Furukawa; Toshiharu ;   et al. | 2008-06-19 |
Semiconductor Devices With Buried Isolation Regions App 20080128811 - Furukawa; Toshiharu ;   et al. | 2008-06-05 |
Memory Device And Mehtod Of Manufacturing The Device By Simulataneously Conditioning Transition Metal Oxide Layers In A Plurality Of Memory Cells App 20080131995 - Furukawa; Toshijaru ;   et al. | 2008-06-05 |
Multiple Layer And Cyrstal Plane Orientation Semiconductor Substrate App 20080099844 - Furukawa; Toshiharu ;   et al. | 2008-05-01 |
Multiple Layer And Crystal Plane Orientation Semiconductor Substrate App 20080102566 - Furukawa; Toshiharu ;   et al. | 2008-05-01 |
Feature Dimension Deviation Correction System, Method And Program Product App 20080027577 - Horak; David V. ;   et al. | 2008-01-31 |
Shallow Trench Isolation Formation App 20080017932 - Furukawa; Toshiharu ;   et al. | 2008-01-24 |
Microelectronic Structure By Selective Deposition App 20080001225 - Furukawa; Toshiharu ;   et al. | 2008-01-03 |
Illumination Light In Immersion Lithography Stepper For Particle Or Bubble Detection App 20070296937 - Furukawa; Toshiharu ;   et al. | 2007-12-27 |
Method And Structure For Forming Self-planarizing Wiring Layers In Multilevel Electronic Devices App 20070290394 - Furukawa; Toshiharu ;   et al. | 2007-12-20 |
Borderless Contact Structures App 20070241412 - Furukawa; Toshiharu ;   et al. | 2007-10-18 |
Simultaneous conditioning of a plurality of memory cells through series resistors App 20070235811 - Furukawa; Toshijaru ;   et al. | 2007-10-11 |
Method Of Doping A Gate Electrode Of A Field Effect Transistor App 20070228429 - Furukawa; Toshiharu ;   et al. | 2007-10-04 |
Layout and process to contact sub-lithographic structures App 20070215874 - Furukawa; Toshiharu ;   et al. | 2007-09-20 |
Memory Device And Method Of Manufacturing The Device By Simultaneously Conditioning Transition Metal Oxide Layers In A Plurality Of Memory Cells App 20070212810 - Furukawa; Toshijaru ;   et al. | 2007-09-13 |
Formation Of A Disposable Spacer To Post Dope A Gate Conductor App 20070205472 - Horak; David V. ;   et al. | 2007-09-06 |
Wiring Paterns Formed By Selective Metal Plating App 20070207604 - Furukawa; Toshiharu ;   et al. | 2007-09-06 |
CMOS Gate Structures Fabricated By Selective Oxidation App 20070190713 - Doris; Bruce B. ;   et al. | 2007-08-16 |
Methods for forming uniform lithographic features App 20070166981 - Furukawa; Toshiharu ;   et al. | 2007-07-19 |
Implantation Of Gate Regions In Semiconductor Device Fabrication App 20070148935 - Furukawa; Toshiharu ;   et al. | 2007-06-28 |
Y-shaped Carbon Nanotubes As Afm Probe For Analyzing Substrates With Angled Topography App 20070125946 - Boye; Carol A. ;   et al. | 2007-06-07 |
Silicon-on-insulator (soi) Read Only Memory (rom) Array And Method Of Making A Soi Rom App 20070128813 - Furukawa; Toshiharu ;   et al. | 2007-06-07 |
Pattern Density Control Using Edge Printing Processes App 20070105319 - Furukawa; Toshiharu ;   et al. | 2007-05-10 |
Accessible chip stack and process of manufacturing thereof App 20070096263 - Furukawa; Toshiharu ;   et al. | 2007-05-03 |
Shrinking Contact Apertures Through LPD Oxide App 20070099416 - Furukawa; Toshiharu ;   et al. | 2007-05-03 |
Method and system for controlling radical distribution App 20070068625 - Funk; Merritt ;   et al. | 2007-03-29 |
Microelectronic Substrate Having Removable Edge Extension Element App 20070063392 - Koburger III; Charles W. ;   et al. | 2007-03-22 |
Mandrel/trim alignment in SIT processing App 20070059891 - Furukawa; Toshiharu ;   et al. | 2007-03-15 |