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Semiconductor memory with data retention liner Grant 7,297,592 - Ngo , et al. November 20, 2 | 2007-11-20 |
Protection of charge trapping dielectric flash memory devices from UV-induced charging in BEOL processing Grant 7,118,967 - Ngo , et al. October 10, 2 | 2006-10-10 |
Structure and method for reducing standing waves in a photoresist Grant 7,070,911 - Hopper , et al. July 4, 2 | 2006-07-04 |
Interconnects with improved barrier layer adhesion Grant 7,071,562 - Ngo , et al. July 4, 2 | 2006-07-04 |
Method for preventing an increase in contact hole width during contact formation Grant 7,005,387 - Hopper , et al. February 28, 2 | 2006-02-28 |
Flash NVROM devices with UV charge immunity Grant 6,969,654 - Pham , et al. November 29, 2 | 2005-11-29 |
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Method for preventing an increase in contact hole width during contact formation App 20050101148 - Hopper, Dawn ;   et al. | 2005-05-12 |
Organic spin-on anti-reflective coating over inorganic anti-reflective coating Grant 6,867,063 - Ghandehari , et al. March 15, 2 | 2005-03-15 |
Reflowable-doped HDP film Grant 6,809,402 - Hopper , et al. October 26, 2 | 2004-10-26 |
Phosphine treatment of low dielectric constant materials in semiconductor device manufacturing Grant 6,784,095 - Pangrle , et al. August 31, 2 | 2004-08-31 |
Method of forming interconnects with improved barrier layer adhesion Grant 6,723,634 - Ngo , et al. April 20, 2 | 2004-04-20 |
Interconnects with improved barrier layer adhesion App 20040063310 - Ngo, Minh Van ;   et al. | 2004-04-01 |
Ultra low deposition rate PECVD silicon nitride Grant 6,686,232 - Ngo , et al. February 3, 2 | 2004-02-03 |
Interconnects with improved barrier layer adhesion Grant 6,645,853 - Ngo , et al. November 11, 2 | 2003-11-11 |
BPSG, SA-CVD liner/P-HDP gap fill Grant 6,613,657 - Ngo , et al. September 2, 2 | 2003-09-02 |
Silane treatment of low dielectric constant materials in semiconductor device manufacturing Grant 6,566,283 - Pangrle , et al. May 20, 2 | 2003-05-20 |
Method of forming low resistance vias Grant 6,562,416 - Ngo , et al. May 13, 2 | 2003-05-13 |
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NH3/N2-plasma treatment to prevent organic ILD degradation Grant 6,436,808 - Ngo , et al. August 20, 2 | 2002-08-20 |
Methods of manufacture of uniform spin-on films Grant 6,407,009 - You , et al. June 18, 2 | 2002-06-18 |
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Hot plate cure process for BCB low k interlevel dielectric Grant 6,066,574 - You , et al. May 23, 2 | 2000-05-23 |
Photoresist stripping without degrading low dielectric constant materials Grant 6,030,901 - Hopper , et al. February 29, 2 | 2000-02-29 |