loadpatents
Patent applications and USPTO patent grants for Hong; Tu.The latest application filed is for "independently adjustable flowpath conductance in multi-station semiconductor processing".
Patent | Date |
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Independently Adjustable Flowpath Conductance In Multi-station Semiconductor Processing App 20220228263 - Roberts; Michael Philip ;   et al. | 2022-07-21 |
Plasma Enhanced Wafer Soak For Thin Film Deposition App 20210366705 - Dhas; Arul N. ;   et al. | 2021-11-25 |
Continuous Plasma For Film Deposition And Surface Treatment App 20210335606 - Dhas; Arul N. ;   et al. | 2021-10-28 |
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