| Patent | Date |
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Method of manufacturing semiconductor devices
Grant 9,989,856 - Seo , et al. June 5, 2 | 2018-06-05 |
Substrate processing system, method of managing the same and method of manufacturing semiconductor device with the same
Grant 9,859,175 - Song , et al. January 2, 2 | 2018-01-02 |
Plasma Processing Apparatus
App 20170047200 - Lee; Hyung-Joo ; et al. | 2017-02-16 |
Dry Etching Apparatus
App 20170032987 - LEE; Hyung-Joo ; et al. | 2017-02-02 |
Substrate Processing System, Method Of Managing The Same And Method Of Manufacturing Semiconductor Device With The Same
App 20160372386 - SONG; Kiwook ; et al. | 2016-12-22 |
Method Of Manufacturing Semiconductor Devices
App 20160293728 - SEO; Jung-Woo ; et al. | 2016-10-06 |
Methods of fabricating semiconductor devices
Grant 9,299,811 - Kim , et al. March 29, 2 | 2016-03-29 |
Methods Of Fabricating Semiconductor Devices
App 20150147860 - Kim; Wook-Je ; et al. | 2015-05-28 |
Methods Of Forming Patterns Of A Semiconductor Device
App 20150076617 - Kim; Myeong-Cheol ; et al. | 2015-03-19 |
Methods of forming patterns of a semiconductor device
Grant 8,906,757 - Kim , et al. December 9, 2 | 2014-12-09 |
Method of fabricating semiconductor device
Grant 8,569,140 - Kim , et al. October 29, 2 | 2013-10-29 |
Method of fabricating semiconductor device
Grant 8,563,412 - Kim , et al. October 22, 2 | 2013-10-22 |
Methods Of Forming Patterns Of A Semiconductor Device
App 20130143372 - KIM; Myeong-Cheol ; et al. | 2013-06-06 |
Methods of forming capacitors for semiconductor memory devices
Grant 8,394,697 - Hong , et al. March 12, 2 | 2013-03-12 |
Method Of Fabricating Semiconductor Device
App 20120052647 - Kim; Kyu-Tae ; et al. | 2012-03-01 |
Method Of Fabricating Semiconductor Device
App 20120052667 - Kim; Kyu-Tae ; et al. | 2012-03-01 |
Methods of Forming Capacitors For Semiconductor Memory Devices
App 20110117715 - Hong; Jong-Seo ; et al. | 2011-05-19 |
Capacitors for semiconductor memory devices
Grant 7,888,724 - Hong , et al. February 15, 2 | 2011-02-15 |
Semiconductor memory device having local etch stopper and method of manufacturing the same
Grant 7,851,354 - Seo , et al. December 14, 2 | 2010-12-14 |
Methods of forming contact plugs in semiconductor devices
Grant 7,682,778 - Seo , et al. March 23, 2 | 2010-03-23 |
Methods for forming DRAM devices including protective patterns and related devices
Grant 7,648,875 - Hong , et al. January 19, 2 | 2010-01-19 |
Semiconductor device having raised cell landing pad and method of fabricating the same
Grant 7,511,328 - Seo , et al. March 31, 2 | 2009-03-31 |
Semiconductor Memory Device Having Local Etch Stopper And Method Of Manufacturing The Same
App 20090068809 - SEO; Jung-woo ; et al. | 2009-03-12 |
Semiconductor memory device having local etch stopper and method of manufacturing the same
Grant 7,462,899 - Seo , et al. December 9, 2 | 2008-12-09 |
Mask layout and method of forming contact pad using the same
App 20060222966 - Seo; Jung-Woo ; et al. | 2006-10-05 |
Semiconductor memory device having local etch stopper and method of manufacturing the same
App 20060186479 - Seo; Jung-woo ; et al. | 2006-08-24 |
Method for forming a storage node of a capacitor
Grant 7,074,725 - Hong , et al. July 11, 2 | 2006-07-11 |
Methods for forming DRAM devices including protective patterns and related devices
App 20060146595 - Hong; Jong-Seo ; et al. | 2006-07-06 |
Semiconductor device having raised cell landing pad and method of fabricating the same
App 20060138561 - Seo; Jung-Woo ; et al. | 2006-06-29 |
Capacitors for semiconductor memory devices and methods of forming the same
App 20060138513 - Hong; Jong-Seo ; et al. | 2006-06-29 |
Semiconductor device and method of manufacturing the same
App 20040063287 - Kim, Dong-Hyun ; et al. | 2004-04-01 |
Method for forming a storage node of a capacitor
App 20040048475 - Hong, Jun-Sik ; et al. | 2004-03-11 |
Method for forming fine patterns in a semiconductor device
Grant 5,476,807 - Lee , et al. December 19, 1 | 1995-12-19 |
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