Patent | Date |
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Defect Inspection Device And Defect Inspection Method App 20220291140 - Honda; Toshifumi ;   et al. | 2022-09-15 |
Defect classification device, inspection device, and inspection system Grant 11,442,024 - Kondo , et al. September 13, 2 | 2022-09-13 |
Inspection device and inspection method thereof Grant 11,346,791 - Makuuchi , et al. May 31, 2 | 2022-05-31 |
Defect Inspection Device And Inspection Method, And Optical Module App 20220074868 - Honda; Toshifumi ;   et al. | 2022-03-10 |
Defect inspection device Grant 11,143,600 - Honda , et al. October 12, 2 | 2021-10-12 |
Defect inspection apparatus and defect inspection method Grant 11,143,598 - Honda , et al. October 12, 2 | 2021-10-12 |
Inspection information generation device, inspection information generation method, and defect inspection device Grant 11,041,815 - Urano , et al. June 22, 2 | 2021-06-22 |
Defect inspection apparatus and pattern chip Grant 10,955,361 - Urano , et al. March 23, 2 | 2021-03-23 |
Defect inspection device, pattern chip, and defect inspection method Grant 10,948,424 - Urano , et al. March 16, 2 | 2021-03-16 |
Defect Inspection Apparatus And Defect Inspection Method App 20210025829 - HONDA; Toshifumi ;   et al. | 2021-01-28 |
Inspection Device And Inspection Method Thereof App 20200393388 - Makuuchi; Masami ;   et al. | 2020-12-17 |
Defect inspection device and defect inspection method Grant 10,861,145 - Honda , et al. December 8, 2 | 2020-12-08 |
Defect Inspection Device App 20200371047 - Honda; Toshifumi ;   et al. | 2020-11-26 |
Defect inspection apparatus and defect inspection method Grant 10,830,706 - Honda , et al. November 10, 2 | 2020-11-10 |
Flaw inspection device and flaw inspection method Grant 10,816,484 - Honda , et al. October 27, 2 | 2020-10-27 |
Defect Classification Device, Inspection Device, and Inspection System App 20200256807 - KONDO; Takanori ;   et al. | 2020-08-13 |
Defect Inspection Apparatus And Defect Inspection Method App 20200256804 - HONDA; Toshifumi ;   et al. | 2020-08-13 |
Defect Inspection Apparatus And Pattern Chip App 20200182804 - URANO; Yuta ;   et al. | 2020-06-11 |
Defect detection device and defect observation device Grant 10,642,164 - Otani , et al. | 2020-05-05 |
Flaw Inspection Device And Flaw Inspection Method App 20200057003 - Honda; Toshifumi ;   et al. | 2020-02-20 |
Flaw inspection device and flaw inspection method Grant 10,466,181 - Honda , et al. No | 2019-11-05 |
Defect observation method and device and defect detection device Grant 10,401,300 - Otani , et al. Sep | 2019-09-03 |
Defect Inspection Device And Defect Inspection Method App 20190206047 - HONDA; Toshifumi ;   et al. | 2019-07-04 |
Inspection Information Generation Device, Inspection Information Generation Method, And Defect Inspection Device App 20190154593 - URANO; Takahiro ;   et al. | 2019-05-23 |
Defect inspection method, low light detecting method, and low light detector Grant 10,261,026 - Urano , et al. | 2019-04-16 |
Defect Inspection Device, Pattern Chip, And Defect Inspection Method App 20190107498 - URANO; Yuta ;   et al. | 2019-04-11 |
Flaw Inspection Device And Flaw Inspection Method App 20190094155 - HONDA; Toshifumi ;   et al. | 2019-03-28 |
Defect inspection device and defect inspection method Grant 10,228,332 - Honda , et al. | 2019-03-12 |
Defect inspection method and its device Grant 9,976,966 - Shibata , et al. May 22, 2 | 2018-05-22 |
Defect Detection Device And Defect Observation Device App 20180088469 - OTANI; Yuko ;   et al. | 2018-03-29 |
Defect inspection method and defect inspection device Grant 9,865,046 - Urano , et al. January 9, 2 | 2018-01-09 |
Defect inspection device and defect inspection method Grant 9,778,206 - Honda , et al. October 3, 2 | 2017-10-03 |
Method and apparatus for observing defects Grant 9,773,641 - Otani , et al. September 26, 2 | 2017-09-26 |
Method for reviewing a defect and apparatus Grant 9,733,194 - Otani , et al. August 15, 2 | 2017-08-15 |
Method and device for detecting defects and method and device for observing defects Grant 9,683,946 - Otani , et al. June 20, 2 | 2017-06-20 |
Method and apparatus for inspecting defects Grant 9,678,021 - Urano , et al. June 13, 2 | 2017-06-13 |
Defect Inspection Device and Defect Inspection Method App 20170146463 - HONDA; Toshifumi ;   et al. | 2017-05-25 |
Defect inspection device and defect inspection method Grant 9,645,094 - Honda , et al. May 9, 2 | 2017-05-09 |
Defect Inspection Method, Low Light Detecting Method, And Low Light Detector App 20170115231 - Urano; Yuta ;   et al. | 2017-04-27 |
Defect Observation Method And Device And Defect Detection Device App 20170108444 - OTANI; Yuko ;   et al. | 2017-04-20 |
Defect Inspection Method And Its Device App 20170102338 - SHIBATA; Yukihiro ;   et al. | 2017-04-13 |
Defect Inspection Device And Defect Inspection Method App 20170102339 - HONDA; Toshifumi ;   et al. | 2017-04-13 |
Defect inspection method and device using same Grant 9,606,071 - Shibata , et al. March 28, 2 | 2017-03-28 |
Defect inspection method, low light detecting method and low light detector Grant 9,588,054 - Urano , et al. March 7, 2 | 2017-03-07 |
Defect inspection apparatus and defect inspection method Grant 9,588,055 - Urano , et al. March 7, 2 | 2017-03-07 |
Defect inspection device and defect inspection method Grant 9,568,439 - Honda , et al. February 14, 2 | 2017-02-14 |
Defect inspection device and defect inspection method Grant 9,523,648 - Urano , et al. December 20, 2 | 2016-12-20 |
Defect inspection method and its device Grant 9,513,228 - Shibata , et al. December 6, 2 | 2016-12-06 |
X-ray inspection device, inspection method, and X-ray detector Grant 9,506,876 - Urano , et al. November 29, 2 | 2016-11-29 |
Defect inspection method and device for same Grant 9,488,596 - Honda , et al. November 8, 2 | 2016-11-08 |
Defect Inspection Method And Device Using Same App 20160305893 - SHIBATA; Yukihiro ;   et al. | 2016-10-20 |
Defect inspection method and defect inspection device Grant 9,470,640 - Matsumoto , et al. October 18, 2 | 2016-10-18 |
Defect observation method and device therefor Grant 9,436,990 - Otani , et al. September 6, 2 | 2016-09-06 |
Defect Inspection Device And Defect Inspection Method App 20160216217 - Honda; Toshifumi ;   et al. | 2016-07-28 |
Method and device for testing defect using SEM Grant 9,390,490 - Takagi , et al. July 12, 2 | 2016-07-12 |
Defect Inspection Method And Defect Inspection Device App 20160161422 - MATSUMOTO; Shunichi ;   et al. | 2016-06-09 |
Optical inspection apparatus and method thereof Grant 9,360,434 - Nakahira , et al. June 7, 2 | 2016-06-07 |
Defect inspection device and defect inspection method Grant 9,329,136 - Honda , et al. May 3, 2 | 2016-05-03 |
Defect inspection method and device using same Grant 9,329,137 - Shibata , et al. May 3, 2 | 2016-05-03 |
Defect Inspection Method And Device For Same App 20160109382 - Honda; Toshifumi ;   et al. | 2016-04-21 |
Defect inspection method and defect inspection device Grant 9,310,318 - Urano , et al. April 12, 2 | 2016-04-12 |
Defect inspection method and defect inspection device Grant 9,291,574 - Matsumoto , et al. March 22, 2 | 2016-03-22 |
Optical inspection method and optical inspection apparatus Grant 9,267,898 - Nakahira , et al. February 23, 2 | 2016-02-23 |
Method And Apparatus For Inspecting Defects App 20160041092 - URANO; Yuta ;   et al. | 2016-02-11 |
Defect inspection method and device thereof Grant 9,255,793 - Shibata , et al. February 9, 2 | 2016-02-09 |
Defect inspection method and device for same Grant 9,255,888 - Honda , et al. February 9, 2 | 2016-02-09 |
Method For Reviewing A Defect And Apparatus App 20160018340 - Otani; Yuko ;   et al. | 2016-01-21 |
Defect inspection method and device therefor Grant 9,239,283 - Honda , et al. January 19, 2 | 2016-01-19 |
Defect Inspection Method And Device Using Same App 20160011123 - SHIBATA; Yukihiro ;   et al. | 2016-01-14 |
Defect Inspection Device And Defect Inspection Method App 20150369752 - HONDA; Toshifumi ;   et al. | 2015-12-24 |
Defect Inspection Method And Defect Inspection Device App 20150356727 - URANO; Takahiro ;   et al. | 2015-12-10 |
Method And Device For Detecting Defects And Method And Device For Observing Defects App 20150276622 - Otani; Yuko ;   et al. | 2015-10-01 |
Defect Inspection Method and Defect Inspection Device App 20150276623 - URANO; Yuta ;   et al. | 2015-10-01 |
Defect Inspection Device and Defect Inspection Method App 20150241361 - Urano; Yuta ;   et al. | 2015-08-27 |
Device for harvesting bacterial colony and method therefor Grant 9,109,194 - Honda , et al. August 18, 2 | 2015-08-18 |
Defect inspection device and defect inspection method Grant 9,075,026 - Urano , et al. July 7, 2 | 2015-07-07 |
Defect Inspection Device And Defect Inspection Method App 20150146200 - Honda; Toshifumi ;   et al. | 2015-05-28 |
Defect inspection device and defect inspection method Grant 9,041,921 - Nakao , et al. May 26, 2 | 2015-05-26 |
Defect Inspection Method And Defect Inspection Device App 20150116702 - Matsumoto; Shunichi ;   et al. | 2015-04-30 |
Defect inspection device and defect inspection method Grant 9,019,492 - Taniguchi , et al. April 28, 2 | 2015-04-28 |
Method and apparatus for reviewing defects Grant 8,975,582 - Nishiyama , et al. March 10, 2 | 2015-03-10 |
Defect Inspection Apparatus And Defect Inspection Method App 20150062581 - Urano; Yuta ;   et al. | 2015-03-05 |
Defect inspecting apparatus and defect inspecting method Grant 8,970,836 - Taniguchi , et al. March 3, 2 | 2015-03-03 |
Defect inspection method and device using same Grant 8,958,062 - Shibata , et al. February 17, 2 | 2015-02-17 |
Defect Inspection Method And Its Device App 20150022806 - Shibata; Yukihiro ;   et al. | 2015-01-22 |
Optical Inspection Apparatus and Method Thereof App 20150015893 - Nakahira; Kenji ;   et al. | 2015-01-15 |
Defect Observation Method And Device Therefor App 20150003722 - Otani; Yuko ;   et al. | 2015-01-01 |
Defect inspection method and defect inspection apparatus Grant 8,922,764 - Urano , et al. December 30, 2 | 2014-12-30 |
Defect inspection method and defect inspection apparatus Grant 08922764 - | 2014-12-30 |
Defect inspection device and method of inspecting defect Grant 8,908,172 - Urano , et al. December 9, 2 | 2014-12-09 |
X-ray Inspection Device, Inspection Method, And X-ray Detector App 20140328459 - Urano; Yuta ;   et al. | 2014-11-06 |
Defect inspection method, and device thereof Grant 8,853,628 - Hosoya , et al. October 7, 2 | 2014-10-07 |
Defect Inspection Method And Defect Inspection Device App 20140268122 - Matsumoto; Shunichi ;   et al. | 2014-09-18 |
Defect Inspection Method And Device For Same App 20140253912 - Honda; Toshifumi ;   et al. | 2014-09-11 |
Defect Inspecting Apparatus and Defect Inspecting Method App 20140233024 - Taniguchi; Atsushi ;   et al. | 2014-08-21 |
Fault inspection device and fault inspection method Grant 8,804,110 - Urano , et al. August 12, 2 | 2014-08-12 |
Method of defect inspection and device of defect inspection Grant 8,804,112 - Shibata , et al. August 12, 2 | 2014-08-12 |
Defect Observation Method And Device Therefor App 20140204194 - Otani; Yuko ;   et al. | 2014-07-24 |
Defect inspection method and device therefor Grant 8,711,347 - Honda , et al. April 29, 2 | 2014-04-29 |
Method and device for inspecting for defects Grant 8,670,116 - Nakao , et al. March 11, 2 | 2014-03-11 |
Defect Inspection Method And Device Using Same App 20140009755 - Shibata; Yukihiro ;   et al. | 2014-01-09 |
Optical Inspection Method And Optical Inspection Apparatus App 20130329227 - Nakahira; Kenji ;   et al. | 2013-12-12 |
Defect Inspection Method, Low Light Detecting Method And Low Light Detector App 20130321798 - Urano; Yuta ;   et al. | 2013-12-05 |
Defect inspection device and inspection method Grant 8,599,369 - Urano , et al. December 3, 2 | 2013-12-03 |
Defect Inspection Method And Defect Inspection Apparatus App 20130301042 - Urano; Yuta ;   et al. | 2013-11-14 |
Method and apparatus for reviewing defects of semiconductor device Grant 8,581,976 - Kurihara , et al. November 12, 2 | 2013-11-12 |
Defect Testing Method And Device For Defect Testing App 20130293880 - Honda; Toshifumi ;   et al. | 2013-11-07 |
Defect Inspection Method And Device Therefor App 20130293879 - Honda; Toshifumi ;   et al. | 2013-11-07 |
Defect Inspection Method And Defect Inspection Device App 20130294677 - Urano; Takahiro ;   et al. | 2013-11-07 |
Method And Apparatus For Observing Defects App 20130277553 - Otani; Yuko ;   et al. | 2013-10-24 |
Apparatus and method for monitoring semiconductor device manufacturing process Grant 8,547,429 - Honda , et al. October 1, 2 | 2013-10-01 |
Defect Inspection Device And Defect Inspection Method App 20130242294 - Taniguchi; Atsushi ;   et al. | 2013-09-19 |
Flaw inspecting method and device therefor Grant 8,514,388 - Maruyama , et al. August 20, 2 | 2013-08-20 |
Circuit pattern examining apparatus and circuit pattern examining method Grant 8,509,516 - Hiroi , et al. August 13, 2 | 2013-08-13 |
Defect Inspection Method, Defect Inspection Apparatus, Program Product And Output Unit App 20130202188 - URANO; Takahiro ;   et al. | 2013-08-08 |
Method And Device For Inspecting For Defects App 20130155400 - Nakao; Toshiyuki ;   et al. | 2013-06-20 |
Scanning electron microscope and method for processing an image obtained by the scanning electron microscope Grant 8,461,527 - Nakahira , et al. June 11, 2 | 2013-06-11 |
Fault Inspection Device And Fault Inspection Method App 20130141715 - Urano; Yuta ;   et al. | 2013-06-06 |
Defect classifier using classification recipe based on connection between rule-based and example-based classifiers Grant 8,452,076 - Nakagaki , et al. May 28, 2 | 2013-05-28 |
Defect Inspection Method, And Device Thereof App 20130119250 - Hosoya; Naoki ;   et al. | 2013-05-16 |
Defect Inspection Method And Device Therefor App 20130114078 - Honda; Toshifumi ;   et al. | 2013-05-09 |
Scanning electron microscope and method for detecting an image using the same Grant 8,405,025 - Honda , et al. March 26, 2 | 2013-03-26 |
Method And Device For Testing Defect Using Sem App 20130070078 - Takagi; Yuji ;   et al. | 2013-03-21 |
Defect Inspection Device And Defect Inspection Method App 20130003052 - Nakao; Toshiyuki ;   et al. | 2013-01-03 |
Defect Inspection Device And Method Of Inspecting Defect App 20120293795 - Urano; Takahiro ;   et al. | 2012-11-22 |
Defect Inspection Method And Device Thereof App 20120296576 - Shibata; Yukihiro ;   et al. | 2012-11-22 |
Device For Harvesting Bacterial Colony And Method Therefor App 20120275681 - Honda; Toshifumi ;   et al. | 2012-11-01 |
Defect Inspection Device And Defect Inspection Method App 20120229618 - Urano; Takahiro ;   et al. | 2012-09-13 |
Flaw Inspecting Method And Device Therefor App 20120194807 - Maruyama; Shigenobu ;   et al. | 2012-08-02 |
Defect Inspection Device And Inspection Method App 20120133928 - Urano; Yuta ;   et al. | 2012-05-31 |
Defect Classifier Using Classification Recipe Based On Connection Between Rule-based And Example-based Classifiers App 20120128233 - NAKAGAKI; Ryo ;   et al. | 2012-05-24 |
Scanning Electron Microscope And Method For Processing An Image Obtained By The Scanning Electron Microscope App 20120126117 - NAKAHIRA; Kenji ;   et al. | 2012-05-24 |
Method Of Defect Inspection And Device Of Defect Inspection App 20120092657 - Shibata; Yukihiro ;   et al. | 2012-04-19 |
Defect classifier using classification recipe based on connection between rule-based and example-based classifiers Grant 8,150,141 - Nakagaki , et al. April 3, 2 | 2012-04-03 |
Method And Apparatus For Reviewing Defects App 20120074319 - NISHIYAMA; Hidetoshi ;   et al. | 2012-03-29 |
Inspection apparatus and an inspection method for inspecting a circuit pattern Grant 8,121,395 - Hiroi , et al. February 21, 2 | 2012-02-21 |
Scanning electron microscope and method for processing an image obtained by the scanning electron microscope Grant 8,106,357 - Nakahira , et al. January 31, 2 | 2012-01-31 |
Defect Inspection Method And Defect Inspection Apparatus App 20120019816 - Shibata; Yukihiro ;   et al. | 2012-01-26 |
Method and apparatus for reviewing defects Grant 8,093,557 - Nishiyama , et al. January 10, 2 | 2012-01-10 |
Method and apparatus for reviewing defects Grant 8,090,190 - Nakagaki , et al. January 3, 2 | 2012-01-03 |
Defect Classifier Using Classification Recipe Based On Connection Between Rule-based And Example-based Classifiers App 20110268345 - NAKAGAKI; Ryo ;   et al. | 2011-11-03 |
Flat Surface Inspection Apparatus App 20110242524 - SHIMIZU; YUKI ;   et al. | 2011-10-06 |
Method And Device For Defect Inspection App 20110188735 - Hosoya; Naoki ;   et al. | 2011-08-04 |
Defect classifier using classification recipe based on connection between rule-based and example-based classifiers Grant 7,991,217 - Nakagaki , et al. August 2, 2 | 2011-08-02 |
Circuit Pattern Examining Apparatus And Circuit Pattern Examining Method App 20110129141 - Hiroi; Takashi ;   et al. | 2011-06-02 |
Method and Apparatus For Reviewing Defects of Semiconductor Device App 20110102573 - KURIHARA; Masaki ;   et al. | 2011-05-05 |
Method and apparatus for displaying detected defects Grant 7,903,867 - Nakahira , et al. March 8, 2 | 2011-03-08 |
Method and apparatus for reviewing defects of semiconductor device Grant 7,873,202 - Kurihara , et al. January 18, 2 | 2011-01-18 |
Apparatus and method for classifying defects using multiple classification modules Grant 7,873,205 - Okuda , et al. January 18, 2 | 2011-01-18 |
Scanning electron microscope and system for inspecting semiconductor device Grant 7,834,317 - Nakagaki , et al. November 16, 2 | 2010-11-16 |
Method and apparatus of reviewing defects on a semiconductor device Grant 7,764,826 - Miyamoto , et al. July 27, 2 | 2010-07-27 |
Defect classification using a logical equation for high stage classification Grant 7,756,320 - Honda , et al. July 13, 2 | 2010-07-13 |
Defect inspection method Grant 7,734,082 - Honda , et al. June 8, 2 | 2010-06-08 |
Method And Apparatus For Reviewing Defects App 20100128970 - NAKAGAKI; Ryo ;   et al. | 2010-05-27 |
Method and apparatus for reviewing defects by detecting images having voltage contrast Grant 7,656,171 - Honda , et al. February 2, 2 | 2010-02-02 |
Method and apparatus for reviewing defects Grant 7,657,078 - Nakagaki , et al. February 2, 2 | 2010-02-02 |
Method And Apparatus For Reviewing Defects App 20100019150 - Nishiyama; Hidetoshi ;   et al. | 2010-01-28 |
Defect Inspection Method and Apparatus App 20100004875 - Urano; Yuta ;   et al. | 2010-01-07 |
Apparatus For Inspecting A Substrate, A Method Of Inspecting A Substrate, A Scanning Electron Microscope, And A Method Of Producing An Image Using A Scanning Electron Microscope App 20090309022 - GUNJI; Yasuhiro ;   et al. | 2009-12-17 |
Defect review method and device for semiconductor device Grant 7,626,163 - Honda December 1, 2 | 2009-12-01 |
Method and apparatus for reviewing defects Grant 7,601,954 - Nishiyama , et al. October 13, 2 | 2009-10-13 |
Method of classifying defects using multiple inspection machines Grant 7,602,962 - Miyamoto , et al. October 13, 2 | 2009-10-13 |
Observing method and its apparatus using electron microscope Grant 7,598,491 - Fukunishi , et al. October 6, 2 | 2009-10-06 |
SEM-type reviewing apparatus and a method for reviewing defects using the same Grant 7,598,490 - Kurihara , et al. October 6, 2 | 2009-10-06 |
System and method for monitoring semiconductor device manufacturing process App 20090231424 - Honda; Toshifumi ;   et al. | 2009-09-17 |
Inspection Apparatus And An Inspection Method For Inspecting A Circuit Pattern App 20090226075 - Hiroi; Takashi ;   et al. | 2009-09-10 |
Method and its apparatus for classifying defects Grant 7,583,832 - Okuda , et al. September 1, 2 | 2009-09-01 |
Method and apparatus for reviewing defects by detecting images having voltage contrast App 20090058437 - Honda; Toshifumi ;   et al. | 2009-03-05 |
Scanning Electron Microscope And Method For Detecting An Image Using The Same App 20090039258 - HONDA; Toshifumi ;   et al. | 2009-02-12 |
Defect Inspection Method App 20090010527 - Honda; Toshifumi ;   et al. | 2009-01-08 |
Defect Review Method And Device For Semiconductor Device App 20080290274 - Honda; Toshifumi | 2008-11-27 |
Method and apparatus for reviewing defects by detecting images having voltage contrast Grant 7,449,898 - Honda , et al. November 11, 2 | 2008-11-11 |
Scanning Electron Microscope And Method For Processing An Image Obtained By The Scanning Electron Microscope App 20080251719 - Nakahira; Kenji ;   et al. | 2008-10-16 |
Scanning electron microscope and method for detecting an image using the same Grant 7,432,503 - Honda , et al. October 7, 2 | 2008-10-07 |
Defect inspection method Grant 7,424,146 - Honda , et al. September 9, 2 | 2008-09-09 |
Scanning electron microscope and a method for adjusting a focal point of an electron beam of said scanning electron microscope Grant 7,361,896 - Honda , et al. April 22, 2 | 2008-04-22 |
Method And Apparatus For Reviewing Defects App 20080073524 - Nishiyama; Hidetoshi ;   et al. | 2008-03-27 |
Sem-type Reviewing Apparatus And A Method For Reviewing Defects Using The Same App 20080067371 - Kurihara; Masaki ;   et al. | 2008-03-20 |
Reviewing Apparatus Using A Sem And Method For Reviewing Defects Or Detecting Defects Using The Reviewing Apparatus App 20080058977 - Honda; Toshifumi | 2008-03-06 |
Method and apparatus for reviewing defects by detecting images having voltage contrast App 20070222464 - Honda; Toshifumi ;   et al. | 2007-09-27 |
Method and apparatus for reviewing defects App 20070201739 - Nakagaki; Ryo ;   et al. | 2007-08-30 |
Method And Apparatus For Displaying Detected Defects App 20070194231 - Nakahira; Kenji ;   et al. | 2007-08-23 |
Method and apparatus of reviewing defects on a semiconductor device App 20070145270 - Miyamoto; Atsushi ;   et al. | 2007-06-28 |
Defect inspection apparatus and defect inspection method Grant 7,205,555 - Okuda , et al. April 17, 2 | 2007-04-17 |
Defect inspection method Grant 7,181,060 - Honda , et al. February 20, 2 | 2007-02-20 |
Method and apparatus for reviewing defects of semiconductor device App 20070031026 - Kurihara; Masaki ;   et al. | 2007-02-08 |
Method of reviewing detected defects Grant 7,170,593 - Honda , et al. January 30, 2 | 2007-01-30 |
Observing method and its apparatus using electron microscope App 20060289752 - Fukunishi; Munenori ;   et al. | 2006-12-28 |
Method and apparatus for reviewing defects App 20060215901 - Nakagaki; Ryo ;   et al. | 2006-09-28 |
Method and apparatus for reviewing defects App 20060210144 - Yamaguchi; Kazuo ;   et al. | 2006-09-21 |
Method and apparatus for collecting defect images Grant 7,105,815 - Obara , et al. September 12, 2 | 2006-09-12 |
Scanning electron microscope and method for detecting an image using the same App 20060151700 - Honda; Toshifumi ;   et al. | 2006-07-13 |
Method of observing a specimen using a scanning electron microscope Grant 7,075,077 - Okuda , et al. July 11, 2 | 2006-07-11 |
Scanning electron microscope and system for inspecting semiconductor device App 20060108525 - Nakagaki; Ryo ;   et al. | 2006-05-25 |
Method and its apparatus for classifying defects App 20060078188 - Kurihara; Masaki ;   et al. | 2006-04-13 |
Method of reviewing detected defects App 20060038986 - Honda; Toshifumi ;   et al. | 2006-02-23 |
Scanning electron microscope and a method for adjusting a focal point of an electron beam of said scanning electron microscope App 20050258366 - Honda, Toshifumi ;   et al. | 2005-11-24 |
Method of reviewing detected defects Grant 6,965,429 - Honda , et al. November 15, 2 | 2005-11-15 |
Method and apparatus for collecting defect images App 20050199808 - Obara, Kenji ;   et al. | 2005-09-15 |
Method of observing a specimen using a scanning electron microscope App 20050194533 - Okuda, Hirohito ;   et al. | 2005-09-08 |
Defect inspection apparatus and defect inspection method App 20050121612 - Okuda, Hirohito ;   et al. | 2005-06-09 |
Method of observing defects App 20050087686 - Honda, Toshifumi ;   et al. | 2005-04-28 |
Defect inspection apparatus and defect inspection method Grant 6,855,930 - Okuda , et al. February 15, 2 | 2005-02-15 |
Method and its apparatus for classifying defects App 20040252878 - Okuda, Hirohito ;   et al. | 2004-12-16 |
Defect classification method App 20040234120 - Honda, Toshifumi ;   et al. | 2004-11-25 |
Method of classifying defects App 20040218806 - Miyamoto, Atsushi ;   et al. | 2004-11-04 |
Defect inspection method App 20040032979 - Honda, Toshifumi ;   et al. | 2004-02-19 |
Method and its apparatus for classifying defects App 20040028276 - Okuda, Hirohito ;   et al. | 2004-02-12 |
Method monitoring a quality of electronic circuits and its manufacturing condition and system for it Grant 6,622,054 - Okuda , et al. September 16, 2 | 2003-09-16 |
Defect inspection apparatus and defect inspection method App 20030118149 - Okuda, Hirohito ;   et al. | 2003-06-26 |
Method of reviewing detected defects App 20030058435 - Honda, Toshifumi ;   et al. | 2003-03-27 |
Defect inspection method App 20030015659 - Honda, Toshifumi ;   et al. | 2003-01-23 |
Defect judgement processing method and apparatus Grant 6,333,992 - Yamamura , et al. December 25, 2 | 2001-12-25 |
Solder testing apparatus Grant 6,249,598 - Honda , et al. June 19, 2 | 2001-06-19 |