Patent | Date |
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Exposure apparatus and device manufacturing method using original with phase-modulation diffraction grating to form interference pattern Grant 9,164,370 - Kishikawa , et al. October 20, 2 | 2015-10-20 |
Interferometer for aspherical or spherical surface measurements Grant 8,400,641 - Furukawa , et al. March 19, 2 | 2013-03-19 |
Recording medium storing original data generation program, original data generation method, original fabricating method, exposure method, and device manufacturing method Grant 8,321,815 - Yamazoe , et al. November 27, 2 | 2012-11-27 |
Interferometer App 20110090510 - Furukawa; Yasunori ;   et al. | 2011-04-21 |
Recording Medium Storing Original Data Generation Program, Original Data Generation Method, Original Fabricating Method, Exposure Method, And Device Manufacturing Method App 20100037199 - Yamazoe; Kenji ;   et al. | 2010-02-11 |
Exposure apparatus and method Grant 7,616,290 - Honda November 10, 2 | 2009-11-10 |
Exposure Apparatus And Device Manufacturing Method App 20090257039 - Kishikawa; Yasuhiro ;   et al. | 2009-10-15 |
Exposure apparatus and device manufacturing method Grant 7,292,309 - Honda November 6, 2 | 2007-11-06 |
Exposure apparatus and device manufacturing method Grant 7,239,372 - Honda July 3, 2 | 2007-07-03 |
Immersion optical system and optical apparatus having the same Grant 7,199,939 - Ohkubo , et al. April 3, 2 | 2007-04-03 |
Exposure apparatus and method App 20060256308 - Honda; Tokuyuki | 2006-11-16 |
Exposure Apparatus, Manufacturing Method of Optical Element, and Device Manufacturing Method App 20060170889 - Honda; Tokuyuki | 2006-08-03 |
Immersion optical system and optical apparatus having the same App 20060146662 - Ohkubo; Akinori ;   et al. | 2006-07-06 |
Diffraction-compensated integrated WDM Grant 7,031,610 - Honda , et al. April 18, 2 | 2006-04-18 |
Exposure apparatus and device manufacturing method App 20060072094 - Honda; Tokuyuki | 2006-04-06 |
Exposure apparatus and device manufacturing method App 20060050257 - Honda; Tokuyuki | 2006-03-09 |
Optical performance monitoring device Grant 6,836,349 - Morozov , et al. December 28, 2 | 2004-12-28 |
Optical channel monitoring device Grant 6,700,664 - Honda , et al. March 2, 2 | 2004-03-02 |
Optical Channel Monitoring Device App 20040032584 - Honda, Tokuyuki ;   et al. | 2004-02-19 |
Optical performance monitoring device App 20030123119 - Morozov, Valentine N. ;   et al. | 2003-07-03 |
Optical information storage medium Grant 6,540,397 - Yoshinari , et al. April 1, 2 | 2003-04-01 |
Diffraction-compensated integrated WDM App 20030002787 - Honda, Tokuyuki ;   et al. | 2003-01-02 |
Integrated optical device with polarization based signal routing App 20020171931 - McLeod, Robert W. ;   et al. | 2002-11-21 |
Optical information medium App 20020041564 - Yoshinari, Jiro ;   et al. | 2002-04-11 |
Volumetric track definition for data storage media used to record data by selective alteration of a format hologram Grant 6,322,933 - Daiber , et al. November 27, 2 | 2001-11-27 |