Holzapfel; Paul

Patent Applications and Registrations

Patent applications and USPTO patent grants for Holzapfel; Paul.The latest application filed is for "multiprobe detection system for chemical-mechanical planarization tool".

Company Profile

0.8.2

Holzapfel; Paul - Mercer PA
Holzapfel; Paul - Chandler AZ
HOLZAPFEL, PAUL - TEMPE AZ

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Multiprobe detection system for chemical-mechanical planarization tool Grant 6,960,115 - Weldon , et al. November 1, 2	2005-11-01
Multiprobe detection system for chemical-mechanical planarization tool Grant 6,805,613 - Weldon , et al. October 19, 2	2004-10-19
Multiprobe detection system for chemical-mechanical planarization tool App 20040038624 - Weldon, Matthew ; et al.	2004-02-26
Polishing pad conditioning device with cutting elements Grant 6,371,838 - Holzapfel April 16, 2	2002-04-16
Method and apparatus for conditioning polishing pads utilizing brazed diamond technology and titanium nitride Grant 6,347,981 - Holzapfel February 19, 2	2002-02-19
Methods And Apparatus For The In-process Measurement Of Thin Film Layers App 20010012108 - HOLZAPFEL, PAUL ; et al.	2001-08-09
Apparatus for cleaning workpiece surfaces and monitoring probes during workpiece processing Grant 6,217,410 - Holzapfel , et al. April 17, 2	2001-04-17
Methods and apparatus for detecting removal of thin film layers during planarization Grant 5,872,633 - Holzapfel , et al. February 16, 1	1999-02-16
Apparatus for the in-process detection of workpieces with a monochromatic light source Grant 5,823,853 - Bartels , et al. October 20, 1	1998-10-20
Apparatus for the in-process detection of workpieces in a CMP environment Grant 5,733,171 - Allen , et al. March 31, 1	1998-03-31

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