Holz; Markus

Patent Applications and Registrations

Patent applications and USPTO patent grants for Holz; Markus.The latest application filed is for "facet mirror for an illumination optical unit of a projection exposure apparatus".

Company Profile

11.14.16

Holz; Markus - Aalen DE
Holz; Markus - Bruchkoebel DE
Holz; Markus - Bruchkobel DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Facet Mirror For An Illumination Optical Unit Of A Projection Exposure Apparatus App 20220206398 - Anderl; Willi ; et al.	2022-06-30
Levitation melting process Grant 11,370,020 - Spitans , et al. June 28, 2	2022-06-28
Method For Generating A Mathematical Model For Positioning Individual Mirrors Of A Facet Mirror In An Optical System App 20220066196 - KRETZSCHMAR; Norman ; et al.	2022-03-03
Device and method for levitation melting using induction units which are arranged in a tilted manner Grant 11,102,850 - Spitans , et al. August 24, 2	2021-08-24
Device And Method For Levitation Melting Using Induction Units Which Are Arranged In A Tilted Manner App 20210251055 - SPITANS; Sergejs ; et al.	2021-08-12
Method for producing an illumination system for an EUV projection exposure system, and illumination system Grant 11,048,172 - Baier , et al. June 29, 2	2021-06-29
Levitation Melting Process App 20210146431 - SPITANS; Sergejs ; et al.	2021-05-20
Casting method Grant 10,843,259 - Franz , et al. November 24, 2	2020-11-24
Apparatus and method for operating an apparatus Grant 10,838,307 - Holz , et al. November 17, 2	2020-11-17
Control device Grant 10,678,151 - Holz , et al.	2020-06-09
Method For Producing An Illumination System For An Euv Projection Exposure System, And Illumination System App 20200110340 - Baier; Juergen ; et al.	2020-04-09
Sensor arrangement for a lithography system, lithography system, and method for operating a lithography system Grant 10,514,619 - Bihr , et al. Dec	2019-12-24
Method for producing an illumination system for an EUV projection exposure system, and illumination system Grant 10,514,608 - Baier , et al. Dec	2019-12-24
Casting Method App 20190366427 - FRANZ; Henrik ; et al.	2019-12-05
Apparatus And Method For Operating An Apparatus App 20190346772 - Holz; Markus ; et al.	2019-11-14
Control Device App 20190187574 - Holz; Markus ; et al.	2019-06-20
Lithography apparatus and method for operating a lithography apparatus Grant 10,261,424 - Dinger , et al.	2019-04-16
Method For Producing An Illumination System For An Euv Projection Exposure System, And Illumination System App 20180373158 - Baier; Juergen ; et al.	2018-12-27
Mirror device Grant 10,101,507 - Sarov , et al. October 16, 2	2018-10-16
Device and method for controlling positioning of multiple adjustable mirror elements in a multi-mirror arrangement Grant 10,018,803 - Horn , et al. July 10, 2	2018-07-10
Sensor Arrangement For A Lithography System, Lithography System, And Method For Operating A Lithography System App 20180188656 - Bihr; Ulrich ; et al.	2018-07-05
Device for determining a tilt angle of at least one mirror of a lithography system, and method Grant 10,007,195 - Horn , et al. June 26, 2	2018-06-26
Lithography Apparatus And Method For Operating A Lithography Apparatus App 20180107122 - Dinger; Udo ; et al.	2018-04-19
Optical component Grant 9,851,555 - Holz , et al. December 26, 2	2017-12-26
Mirror Device App 20170276842 - Sarov; Yanko ; et al.	2017-09-28
Melting device for consolidating contaminated scrap Grant 9,721,690 - Franz , et al. August 1, 2	2017-08-01
Device And Method For Controlling Positioning Of Multiple Adjustable Mirror Elements In A Multi-mirror Arrangement App 20170038555 - Horn; Jan ; et al.	2017-02-09
Device For Determining A Tilt Angle Of At Least One Mirror Of A Lithography System, And Method App 20160246186 - Horn; Jan ; et al.	2016-08-25
Optical Component App 20160170201 - Holz; Markus ; et al.	2016-06-16
Melting Device For Consolidating Contaminated Scrap App 20150380118 - FRANZ; Henrik ; et al.	2015-12-31

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