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Diode laser for wafer heating for EPI processes Grant 11,171,023 - Chu , et al. November 9, 2 | 2021-11-09 |
Fiber array line generator Grant 10,537,965 - Holmgren , et al. Ja | 2020-01-21 |
Customized pupil stop shape for control of edge profile in laser annealing systems Grant 10,444,522 - Holmgren Oc | 2019-10-15 |
Thermal processing apparatus Grant 10,181,409 - Moffatt , et al. Ja | 2019-01-15 |
Multiple beam combiner for laser processing apparatus Grant 9,927,622 - Moffatt , et al. March 27, 2 | 2018-03-27 |
Semiconductor Processing Method And Semiconductor Device App 20170148726 - MOFFATT; Stephen ;   et al. | 2017-05-25 |
Optical design for line generation using microlens array Grant 9,636,778 - Holmgren , et al. May 2, 2 | 2017-05-02 |
Diode Laser For Wafer Heating For Epi Processes App 20170103907 - CHU; Schubert S. ;   et al. | 2017-04-13 |
Customized Pupil Stop Shape For Control Of Edge Profile In Laser Annealing Systems App 20160327801 - HOLMGREN; Douglas E. | 2016-11-10 |
Customized pupil stop shape for control of edge profile in laser annealing systems Grant 9,395,545 - Holmgren July 19, 2 | 2016-07-19 |
Multiple Beam Combiner For Laser Processing Apparatus App 20160139417 - Moffatt; Stephen ;   et al. | 2016-05-19 |
Multiple beam combiner for laser processing apparatus Grant 9,285,595 - Moffatt , et al. March 15, 2 | 2016-03-15 |
Scanned Pulse Anneal Apparatus And Methods App 20160020117 - HUNTER; Aaron Muir ;   et al. | 2016-01-21 |
Apparatus for speckle reduction, pulse stretching, and beam homogenization Grant 9,146,337 - Li , et al. September 29, 2 | 2015-09-29 |
Fiber Array Line Generator App 20150165551 - HOLMGREN; Douglas E. ;   et al. | 2015-06-18 |
Optical Design For Line Generation Using Microlens Array App 20150136755 - HOLMGREN; Douglas E. ;   et al. | 2015-05-21 |
Multiple Beam Combiner For Laser Processing Apparatus App 20150124329 - MOFFATT; Stephen ;   et al. | 2015-05-07 |
Multiple beam combiner for laser processing apparatus Grant 8,970,963 - Moffatt , et al. March 3, 2 | 2015-03-03 |
Optical design for line generation using microlens array Grant 8,946,594 - Holmgren , et al. February 3, 2 | 2015-02-03 |
Customized Pupil Stop Shape For Control Of Edge Profile In Laser Annealing Systems App 20140268749 - HOLMGREN; Douglas E. | 2014-09-18 |
Apparatus For Speckle Reduction, Pulse Stretching, And Beam Homogenization App 20140254022 - LI; Jiping ;   et al. | 2014-09-11 |
Novel Thermal Processing Apparatus App 20140138362 - MOFFATT; Stephen ;   et al. | 2014-05-22 |
Thermal processing apparatus Grant 8,569,187 - Moffatt , et al. October 29, 2 | 2013-10-29 |
Multiple Beam Combiner For Laser Processing Apparatus App 20130163091 - MOFFATT; STEPHEN ;   et al. | 2013-06-27 |
Optical Design For Line Generation Using Microlens Array App 20130112667 - Holmgren; Douglas E. ;   et al. | 2013-05-09 |
Novel Thermal Processing Apparatus App 20120329178 - Moffatt; Stephen ;   et al. | 2012-12-27 |
Novel Thermal Processing Apparatus App 20120325784 - Moffatt; Stephen ;   et al. | 2012-12-27 |
Systems and methods for processing semiconductor structures using laser pulses laterally distributed in a scanning window Grant 8,026,158 - Bruland , et al. September 27, 2 | 2011-09-27 |
Systems And Methods For Processing Semiconductor Structures Using Laser Pulses Laterally Distributed In A Scanning Window App 20110210103 - Bruland; Kelly J. ;   et al. | 2011-09-01 |
Systems And Methods For Processing Semiconductor Structures Using Laser Pulses Laterally Distributed In A Scanning Window App 20080299783 - Bruland; Kelly J. ;   et al. | 2008-12-04 |
Electron beam column using high numerical aperture photocathode source illumination Grant 6,448,568 - Allen , et al. September 10, 2 | 2002-09-10 |