Holderer; Hubert

Patent Applications and Registrations

Patent applications and USPTO patent grants for Holderer; Hubert.The latest application filed is for "facet mirror for an illumination optical unit of a projection exposure apparatus".

Company Profile

4.58.59

Holderer; Hubert - Oberkochen DE
Holderer; Hubert - Konigsbronn DE
Holderer; Hubert - Koenigsbronn DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Beam-forming and illuminating system for a lithography system, lithography system, and method Grant 11,448,968 - Holderer , et al. September 20, 2	2022-09-20
Imaging optical unit for EUV microlithography Grant 11,422,470 - Ruoff , et al. August 23, 2	2022-08-23
Facet Mirror For An Illumination Optical Unit Of A Projection Exposure Apparatus App 20220206398 - Anderl; Willi ; et al.	2022-06-30
Measurement Illumination Optical Unit For Guiding Illumination Light Into An Object Field Of A Projection Exposure System For Euv Lithography App 20220057717 - Fischer; Thomas ; et al.	2022-02-24
Method for producing an illumination system for an EUV projection exposure system, and illumination system Grant 11,048,172 - Baier , et al. June 29, 2	2021-06-29
Beam-forming And Illuminating System For A Lithography System, Lithography System, And Method App 20210003925 - Holderer; Hubert ; et al.	2021-01-07
Imaging Optical Unit For Euv Microlithography App 20200348602 - Ruoff; Johannes ; et al.	2020-11-05
Method For Producing An Illumination System For An Euv Projection Exposure System, And Illumination System App 20200110340 - Baier; Juergen ; et al.	2020-04-09
Method for producing an illumination system for an EUV projection exposure system, and illumination system Grant 10,514,608 - Baier , et al. Dec	2019-12-24
Method For Producing An Illumination System For An Euv Projection Exposure System, And Illumination System App 20180373158 - Baier; Juergen ; et al.	2018-12-27
Optical Imaging Device With Thermal Attenuation App 20180181007 - Gellrich; Bernhard ; et al.	2018-06-28
Optical imaging device with thermal attenuation Grant 9,810,996 - Gellrich , et al. November 7, 2	2017-11-07
Optical Imaging Device With Thermal Attenuation App 20150109591 - Gellrich; Bernhard ; et al.	2015-04-23
Optical imaging device with thermal attenuation Grant 8,902,401 - Gellrich , et al. December 2, 2	2014-12-02
Imaging device in a projection exposure facility Grant 8,514,371 - Hummel , et al. August 20, 2	2013-08-20
Holding arrangement for an optical element Grant 8,508,868 - Weber , et al. August 13, 2	2013-08-13
Holding arrangement for an optical element Grant 8,456,771 - Weber , et al. June 4, 2	2013-06-04
Optical system having heat dissipation arrangement Grant 8,456,615 - Holderer , et al. June 4, 2	2013-06-04
Optical Imaging Device With Thermal Attenuation App 20130114057 - Gellrich; Bernhard ; et al.	2013-05-09
Optical imaging device with thermal attenuation Grant 8,363,206 - Gellrich , et al. January 29, 2	2013-01-29
Reflective optical element for use in an EUV system Grant 8,342,701 - Kierey , et al. January 1, 2	2013-01-01
Holding Arrangement For An Optical Element App 20120154935 - Weber; Ulrich ; et al.	2012-06-21
Holding Arrangement For An Optical Element App 20120140341 - Weber; Ulrich ; et al.	2012-06-07
Imaging Device In A Projection Exposure Facility App 20110199597 - Hummel; Wolfgang ; et al.	2011-08-18
Projection objective of a microlithographic projection exposure apparatus Grant 7,990,622 - Conradi , et al. August 2, 2	2011-08-02
Imaging device in a projection exposure facility Grant 7,961,294 - Hummel , et al. June 14, 2	2011-06-14
Reflective Optical Element For Use In An Euv System App 20110051267 - Kierey; Holger ; et al.	2011-03-03
Optical System Having An Optical Arrangement App 20110025992 - Holderer; Hubert ; et al.	2011-02-03
Projection Objective Of A Microlithographic Projection Exposure Apparatus App 20110019169 - Conradi; Olaf ; et al.	2011-01-27
Projection objective of a microlithographic projection exposure apparatus Grant 7,830,611 - Conradi , et al. November 9, 2	2010-11-09
Composite structure for microlithography and optical arrangement Grant 7,816,022 - Ekstein , et al. October 19, 2	2010-10-19
Apparatus for mounting two or more elements and method for processing the surface of an optical element Grant 7,800,849 - Holderer , et al. September 21, 2	2010-09-21
Projection method including pupillary filtering and a projection lens therefor Grant 7,791,711 - Holderer , et al. September 7, 2	2010-09-07
Imaging device in a projection exposure machine Grant 7,710,542 - Hummel , et al. May 4, 2	2010-05-04
Adjustment arrangement of an optical element Grant 7,656,595 - Beck , et al. February 2, 2	2010-02-02
Microlithographic projection exposure apparatus Grant 7,570,343 - Dodoc , et al. August 4, 2	2009-08-04
Process for connecting an optical element of a microlithographic projection exposure apparatus to a mount, and assembly Grant 7,551,375 - Rau , et al. June 23, 2	2009-06-23
Composite Structure For Microlithography And Optical Arrangement App 20090142615 - EKSTEIN; Claudia ; et al.	2009-06-04
Imaging Device in a Projection Exposure Machine App 20090141258 - Back; Stephan ; et al.	2009-06-04
Optical Imaging Device With Thermal Attenuation App 20090135385 - Gellrich; Bernhard ; et al.	2009-05-28
Imaging Device In A Projection Exposure Facility App 20090040487 - Hummel; Wolfgang ; et al.	2009-02-12
Imaging device in a projection exposure machine Grant 7,486,382 - Back , et al. February 3, 2	2009-02-03
Apparatus For Mounting Two Or More Elements And Method For Processing The Surface Of An Optical Element App 20090015947 - Holderer; Hubert ; et al.	2009-01-15
Adjustment Arrangement of an Optical Element App 20090009892 - Beck; Klaus ; et al.	2009-01-08
Adjustment arrangement of an optical element Grant 7,457,059 - Beck , et al. November 25, 2	2008-11-25
Projection Objective Of A Microlithographic Projection Exposure Apparatus App 20080239503 - Conradi; Olaf ; et al.	2008-10-02
Imaging Device In A Projection Exposure Machine App 20080174757 - Hummel; Wolfgang ; et al.	2008-07-24
Method for connection of an optical element to a mount structure Grant 7,400,460 - Holderer , et al. July 15, 2	2008-07-15
Projection Method Including Pupillary Filtering And A Projection Lens Therefor App 20080143984 - HOLDERER; Hubert ; et al.	2008-06-19
Optical measuring system, and a projection objective App 20080100930 - Holderer; Hubert ; et al.	2008-05-01
Arrangement Of Two Connected Bodies App 20080100815 - Holderer; Hubert ; et al.	2008-05-01
Facet mirror having a number of mirror facets Grant 7,354,168 - Holderer , et al. April 8, 2	2008-04-08
Projection method including pupillary filtering and a projection lens therefor Grant 7,336,342 - Holderer , et al. February 26, 2	2008-02-26
Support structure for temporarily supporting a substrate App 20070285647 - Kwan; Yim-Bun Patrick ; et al.	2007-12-13
Imaging device in a projection exposure facility Grant 7,304,717 - Hummel , et al. December 4, 2	2007-12-04
Holding and positioning apparatus for an optical element App 20070223116 - Weber; Ulrich ; et al.	2007-09-27
Apparatus for positioning an optical element in a structure Grant 7,251,086 - Weber , et al. July 31, 2	2007-07-31
Method for connection of an optical element to a mount structure App 20070171552 - Holderer; Hubert ; et al.	2007-07-26
Holding and positioning apparatus for an optical element Grant 7,242,537 - Weber , et al. July 10, 2	2007-07-10
Adjustment arrangement of an optical element Grant 7,193,794 - Beck , et al. March 20, 2	2007-03-20
Adjustment Arrangement Of An Optical Element App 20070014038 - Beck; Klaus ; et al.	2007-01-18
Process for connecting an optical element of a microlithographic projection exposure apparatus to a mount, and assembly App 20060243779 - Rau; Johannes ; et al.	2006-11-02
Objective, particularly a projection objective for use in semiconductor lithography Grant 7,123,427 - Kohl , et al. October 17, 2	2006-10-17
Microlithographic projection exposure apparatus App 20060187430 - Dodoc; Aurelian ; et al.	2006-08-24
Facet mirror having a number of mirror facets Grant 7,090,362 - Holderer , et al. August 15, 2	2006-08-15
Imaging device in a projection exposure machine App 20060164619 - Back; Stephan ; et al.	2006-07-27
Device for holding a beam splitter element Grant 7,079,331 - Weber , et al. July 18, 2	2006-07-18
Apparatus for positioning an optical element in a structure App 20060072217 - Weber; Ulrich ; et al.	2006-04-06
Apparatus for tilting a carrier for optical elements Grant 7,014,328 - Weber , et al. March 21, 2	2006-03-21
Objective, in particular a projection objective in microlithography App 20060012893 - Weber; Ulrich ; et al.	2006-01-19
Holding and positioning apparatus for an optical element App 20060007563 - Weber; Ulrich ; et al.	2006-01-12
Objective, especially a projection objective for microlithography App 20050286121 - Weber, Ulrich ; et al.	2005-12-29
Projection lens and microlithographic projection exposure apparatus App 20050264786 - Brunotte, Martin ; et al.	2005-12-01
Apparatus for positioning an optical element in a structure Grant 6,967,792 - Weber , et al. November 22, 2	2005-11-22
Device for holding a beam splitter element App 20050248858 - Weber, Ulrich ; et al.	2005-11-10
Method for correcting oscillation-induced imaging errors in an objective Grant 6,943,965 - Kohl , et al. September 13, 2	2005-09-13
Projection method including pupillary filtering and a projection lens therefor App 20050146701 - Holderer, Hubert ; et al.	2005-07-07
Projection Lens And Microlithographic Projection Exposure Apparatus App 20050134967 - Brunotte, Martin ; et al.	2005-06-23
Device for manipulating the angular position of an object relative to a fixed structure App 20050110447 - Weber, Ulrich ; et al.	2005-05-26
Projection lens and microlithographic projection exposure apparatus Grant 6,879,379 - Brunotte , et al. April 12, 2	2005-04-12
Facet mirror having a number of mirror facets App 20050030653 - Holderer, Hubert ; et al.	2005-02-10
Facet mirror having a number of mirror facets App 20050030656 - Holderer, Hubert ; et al.	2005-02-10
Catadioptric objective Grant 6,842,294 - Holderer , et al. January 11, 2	2005-01-11
Imaging device in a projection exposure facility App 20040263812 - Hummel, Wolfgang ; et al.	2004-12-30
Optical measuring system, and a projection objective App 20040257675 - Holderer, Hubert ; et al.	2004-12-23
Objective, particularly a projection objective for use in semiconductor lithography App 20040201909 - Kohl, Alexander ; et al.	2004-10-14
Adjustment arrangement of an optical element App 20040174619 - Beck, Klaus ; et al.	2004-09-09
Projection exposure system as well as a process for compensating image defects occuring in the projection optics of a projection exposure system, in particular for microlithography Grant 6,784,977 - von Bunau , et al. August 31, 2	2004-08-31
Optical arrangement Grant 6,781,668 - Schuster , et al. August 24, 2	2004-08-24
Projection lens and microlithographic projection exposure apparatus App 20040150806 - Brunotte, Martin ; et al.	2004-08-05
Mount for an optical element in an optical imaging device Grant 6,744,574 - Weber , et al. June 1, 2	2004-06-01
Optical component and method of inducing a desired alteration of an optical property therein Grant 6,728,021 - Kohl , et al. April 27, 2	2004-04-27
Apparatus for positioning an optical element in a structure App 20030231412 - Weber, Ulrich ; et al.	2003-12-18
Method for correcting oscillation-induced imaging errors in an objective App 20030147150 - Kohl, Alexander ; et al.	2003-08-07
Mount for an optical element in an optical imaging device App 20030058551 - Weber, Ulrich ; et al.	2003-03-27
Optical arrangement having improved temperature distribution within an optical element Grant 6,521,877 - Muller-Rissmann , et al. February 18, 2	2003-02-18
Optical arrangement Grant 6,504,597 - Schuster , et al. January 7, 2	2003-01-07
Projection exposure system as well as a process for compensating image defects occurring in the projection optics of a projection exposure system, in particular for microlithography App 20030002023 - Bunau, Rudolf von ; et al.	2003-01-02
Catadioptric objective App 20020181125 - Holderer, Hubert ; et al.	2002-12-05
Apparatus for tilting a carrier for optical elements App 20020171952 - Weber, Ulrich ; et al.	2002-11-21
Optical arrangement Grant 6,466,382 - Muller-Rissmann , et al. October 15, 2	2002-10-15
Optical Arrangement App 20020126400 - Muller-Rissmann, Wemer ; et al.	2002-09-12
Soldering process for optical materials to metal mountings, and mounted assemblies Grant 6,392,824 - Holderer , et al. May 21, 2	2002-05-21
Optical system, especially a projection light facility for microlithography Grant 6,388,823 - Gaber , et al. May 14, 2	2002-05-14
Assembly comprising an optical element and a mount Grant 6,369,959 - Trunz , et al. April 9, 2	2002-04-09
Optical arrangement App 20010019403 - Schuster, Karl-Heinz ; et al.	2001-09-06
Optical system App 20010008440 - Hummel, Wolfgang ; et al.	2001-07-19
Adjustable assembly Grant 6,259,571 - Holderer , et al. July 10, 2	2001-07-10
Optical arrangement App 20010006412 - Karl-Heinz, Schuster ; et al.	2001-07-05
Assembly of optical element and mount Grant 6,229,657 - Holderer , et al. May 8, 2	2001-05-08
Method of welding an optical component to a metal attachment element and an optical assembly incorporating the metal attachment element Grant 6,108,144 - Holderer , et al. August 22, 2	2000-08-22
UV-resistant jointing technique for lenses and mounts Grant 5,991,101 - Holderer , et al. November 23, 1	1999-11-23