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Patent applications and USPTO patent grants for Holden; James Matthew.The latest application filed is for "methods and apparatus for substrate edge cleaning".
Patent | Date |
---|---|
Methods and apparatus for substrate edge cleaning Grant 10,217,650 - Holden , et al. Feb | 2019-02-26 |
Methods And Apparatus For Substrate Edge Cleaning App 20170018441 - HOLDEN; JAMES MATTHEW ;   et al. | 2017-01-19 |
Methods and apparatus for substrate edge cleaning Grant 9,443,714 - Holden , et al. September 13, 2 | 2016-09-13 |
Methods and apparatus for cleaning a substrate Grant 9,177,782 - Holden , et al. November 3, 2 | 2015-11-03 |
Approaches For Cleaning A Wafer During Hybrid Laser Scribing And Plasma Etching Wafer Dicing Processes App 20150255349 - Holden; James Matthew ;   et al. | 2015-09-10 |
Approaches for cleaning a wafer during hybrid laser scribing and plasma etching wafer dicing processes Grant 8,883,615 - Holden , et al. November 11, 2 | 2014-11-11 |
Methods And Apparatus For Substrate Edge Cleaning App 20140251375 - HOLDEN; JAMES MATTHEW ;   et al. | 2014-09-11 |
Methods And Apparatus For Cleaning A Substrate App 20140251374 - HOLDEN; JAMES MATTHEW ;   et al. | 2014-09-11 |
Laser Scribing Systems, Apparatus, And Methods App 20130122687 - Holden; James Matthew | 2013-05-16 |
Spectrographic metrology of patterned wafers Grant 7,969,568 - Holden , et al. June 28, 2 | 2011-06-28 |
Integrated Thin Film Metrology System Used In A Solar Cell Production Line App 20110033957 - Holden; James Matthew ;   et al. | 2011-02-10 |
Spectrographic Metrology Of Patterned Wafers App 20100103411 - HOLDEN; JAMES Matthew ;   et al. | 2010-04-29 |
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