Holber; William M.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Holber; William M..The latest application filed is for "in-situ plasma cleaning of process chamber components".

Company Profile

0.37.29

Holber; William M. - Gloucester MA
Holber; William M. - Winchester MA
Holber; William M. - Cambridge MA
Holber; William M. - Boston MA
Holber; William M. - New York NY

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
In-situ plasma cleaning of process chamber components Grant 11,037,758 - Anglin , et al. June 15, 2	2021-06-15
In-situ Plasma Cleaning Of Process Chamber Components App 20210013001 - Anglin; Kevin ; et al.	2021-01-14
In-situ Plasma Cleaning Of Process Chamber Components App 20200126757 - Anglin; Kevin ; et al.	2020-04-23
In-situ plasma cleaning of process chamber components Grant 10,522,330 - Anglin , et al. Dec	2019-12-31
In-situ Plasma Cleaning Of Process Chamber Components App 20160365225 - Anglin; Kevin ; et al.	2016-12-15
Method and apparatus for processing metal bearing gases Grant 8,779,322 - Holber , et al. July 15, 2	2014-07-15
Chemical ionization reaction or proton transfer reaction mass spectrometry Grant 8,704,171 - Robinson , et al. April 22, 2	2014-04-22
Radio frequency power delivery system Grant 8,633,782 - Nagarkatti , et al. January 21, 2	2014-01-21
Chemical Ionization Reaction or Proton Transfer Reaction Mass Spectrometry App 20130203180 - Robinson; Timothy Roger ; et al.	2013-08-08
Chemical ionization reaction or proton transfer reaction mass spectrometry Grant 8,334,505 - Robinson , et al. December 18, 2	2012-12-18
Laser-driven light source Grant 8,309,943 - Smith , et al. November 13, 2	2012-11-13
Method and Apparatus for Processing Metal Bearing Gases App 20120160059 - Holber; William M. ; et al.	2012-06-28
Laser-heated infrared source Grant 8,173,986 - Holber , et al. May 8, 2	2012-05-08
Method and apparatus for processing metal bearing gases Grant 8,124,906 - Holber , et al. February 28, 2	2012-02-28
Chemical Ionization Reaction or Proton Transfer Reaction Mass Spectrometry App 20120003748 - Robinson; Timothy Roger ; et al.	2012-01-05
Laser-Driven Light Source App 20110204265 - Smith; Donald K. ; et al.	2011-08-25
Chemical ionization reaction or proton transfer reaction mass spectrometry with a quadrupole mass spectrometer Grant 8,003,935 - Robinson , et al. August 23, 2	2011-08-23
Chemical ionization reaction or proton transfer reaction mass spectrometry with a time-of-flight mass spectrometer Grant 8,003,936 - Robinson , et al. August 23, 2	2011-08-23
Laser-Heated Infrared Source App 20110127450 - Holber; William M. ; et al.	2011-06-02
Radio Frequency Power Delivery System App 20100231296 - Nagarkatti; Siddharth P. ; et al.	2010-09-16
Radio frequency power delivery system Grant 7,764,140 - Nagarkatti , et al. July 27, 2	2010-07-27
Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel Grant 7,659,489 - Holber , et al. February 9, 2	2010-02-09
Method and Apparatus for Processing Metal Bearing Gases App 20090288772 - Holber; William M. ; et al.	2009-11-26
Method and apparatus for processing metal bearing gases Grant 7,569,790 - Holber , et al. August 4, 2	2009-08-04
Inductively-coupled toroidal plasma source Grant 7,541,558 - Smith , et al. June 2, 2	2009-06-02
Chemical Ionization Reaction Or Proton Transfer Reaction Mass Spectrometry With A Quadrupole Mass Spectrometer App 20090095901 - Robinson; Timothy Roger ; et al.	2009-04-16
Chemical Ionization Reaction Or Proton Transfer Reaction Mass Spectrometry With A Time-of-flight Mass Spectrometer App 20090095902 - ROBINSON; TIMOTHY ROGER ; et al.	2009-04-16
Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel Grant 7,501,600 - Holber , et al. March 10, 2	2009-03-10
Laser-driven Light Source App 20090032740 - Smith; Donald K. ; et al.	2009-02-05
Oxygen conditioning of plasma vessels App 20080083701 - Shao; Shou-Qian ; et al.	2008-04-10
Oxygen Conditioning Of Plasma Vessels App 20080083609 - Shao; Shou-Qian ; et al.	2008-04-10
Methods and apparatus for downstream dissociation of gases App 20070272299 - Schuss; Jack J. ; et al.	2007-11-29
Method and apparatus for fluorine generation and recirculation Grant 7,238,266 - Smith , et al. July 3, 2	2007-07-03
Inductively-coupled toroidal plasma source App 20070145018 - Smith; Donald K. ; et al.	2007-06-28
Toroidal Low-Field Reactive Gas and Plasma Source Having a Dielectric Vacuum Vessel App 20070145023 - Holber; William M. ; et al.	2007-06-28
Radio Frequency Power Delivery System App 20070139122 - Nagarkatti; Siddharth P. ; et al.	2007-06-21
Inductively-coupled torodial plasma source Grant 7,166,816 - Chen , et al. January 23, 2	2007-01-23
Toroidal low-field reactive gas source Grant 7,161,112 - Smith , et al. January 9, 2	2007-01-09
Methods and apparatus for downstream dissociation of gases App 20060137612 - Holber; William M. ; et al.	2006-06-29
Methods and apparatus for downstream dissociation of gases App 20060118240 - Holber; William M. ; et al.	2006-06-08
Method and apparatus for processing metal bearing gases App 20060086699 - Holber; William M. ; et al.	2006-04-27
Integrated plasma chamber and inductively-coupled toroidal plasma source Grant 6,924,455 - Chen , et al. August 2, 2	2005-08-02
Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel App 20050145173 - Holber, William M. ; et al.	2005-07-07
RF power supply with integrated matching network Grant 6,887,339 - Goodman , et al. May 3, 2	2005-05-03
Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel Grant 6,872,909 - Holber , et al. March 29, 2	2005-03-29
Inductively-coupled toroidal plasma source Grant 6,815,633 - Chen , et al. November 9, 2	2004-11-09
Toroidal low-field reactive gas and plasma source having a dielectric vacuum vessel App 20040206730 - Holber, William M. ; et al.	2004-10-21
Method and apparatus for fluorine generation and recirculation App 20040109817 - Smith, Donald K. ; et al.	2004-06-10
Toroidal low-field reactive gas source App 20040079287 - Smith, Donald K. ; et al.	2004-04-29
Toroidal low-field reactive gas source Grant 6,664,497 - Smith , et al. December 16, 2	2003-12-16
Toroidal low-field reactive gas source Grant 6,559,408 - Smith , et al. May 6, 2	2003-05-06
Toroidal low-field reactive gas source Grant 6,552,296 - Smith , et al. April 22, 2	2003-04-22
Toroidal low-field reactive gas source Grant 6,486,431 - Smith , et al. November 26, 2	2002-11-26
Toroidal low-field reactive gas source App 20020125226 - Smith, Donald K. ; et al.	2002-09-12
Toroidal low-field reactive gas source App 20020125225 - Smith, Donald K. ; et al.	2002-09-12
Toroidal low-field reactive gas source Grant 6,388,226 - Smith , et al. May 14, 2	2002-05-14
Toroidal low-field reactive gas source App 20020046991 - Smith, Donald K. ; et al.	2002-04-25
Toroidal low-field reactive gas source Grant 6,150,628 - Smith , et al. November 21, 2	2000-11-21
Microwave plasma deposition source and method of filling high aspect-ratio features on a substrate Grant 5,688,382 - Besen , et al. November 18, 1	1997-11-18
Microwave plasma applicator with a helical fluid cooling channel surrounding a microwave transparent discharge tube Grant 5,625,259 - Holber , et al. April 29, 1	1997-04-29
Fluid-cooled dielectric window for a plasma system Grant 5,568,015 - Holber , et al. October 22, 1	1996-10-22
Etching of silicon dioxide selectively to silicon nitride and polysilicon Grant 5,505,816 - Barnes , et al. April 9, 1	1996-04-09
Method and apparatus for filing high aspect patterns with metal Grant 5,302,266 - Grabarz , et al. April 12, 1	1994-04-12
Scanned electron cyclotron resonance plasma source Grant 5,208,512 - Forster , et al. May 4, 1	1993-05-04