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E-beam apparatus Grant 11,315,752 - Hempenius , et al. April 26, 2 | 2022-04-26 |
E-beam Apparatus App 20210151282 - HEMPENIUS; Peter Paul ;   et al. | 2021-05-20 |
E-beam apparatus Grant 10,867,770 - Hempenius , et al. December 15, 2 | 2020-12-15 |
Substrate Positioning Device And Electron Beam Inspection Tool App 20200373118 - BAGGEN; Marcel Koenraad Marie ;   et al. | 2020-11-26 |
Electron Beam Inspection Tool And Method For Positioning An Object Table App 20200303158 - Bosch; Niels Johannes Maria ;   et al. | 2020-09-24 |
Systems And Methods Of Colling Objective Lens Of A Charged-particle Beam System App 20200176215 - Gosen; Jeroen ;   et al. | 2020-06-04 |
E-beam Apparatus App 20190341224 - HEMPENIUS; Peter Paul ;   et al. | 2019-11-07 |
Method of calibrating a reluctance actuator assembly, reluctance actuator and lithographic apparatus comprising such reluctance actuator Grant 10,372,045 - Akkermans , et al. | 2019-08-06 |
Actuation mechanism, optical apparatus and lithography apparatus Grant 9,927,711 - Hol , et al. March 27, 2 | 2018-03-27 |
Lithographic apparatus comprising an actuator, and method for protecting such actuator Grant 9,921,494 - Cadee , et al. March 20, 2 | 2018-03-20 |
Actuation mechanism, optical apparatus, lithography apparatus and method of manufacturing devices Grant 9,785,051 - Van Schoot , et al. October 10, 2 | 2017-10-10 |
Support for a movable element and lithography apparatus Grant 9,535,340 - Boon , et al. January 3, 2 | 2017-01-03 |
Lithographic apparatus and device manufacturing method Grant 9,494,869 - Butler , et al. November 15, 2 | 2016-11-15 |
Actuation mechanism, optical apparatus, lithography apparatus and method of manufacturing devices Grant 9,494,878 - Buis , et al. November 15, 2 | 2016-11-15 |
Actuation Mechanism, Optical Apparatus and Lithography Apparatus App 20160313649 - HOL; Sven Antoin Johan ;   et al. | 2016-10-27 |
Lithographic apparatus, method of deforming a substrate table and device manufacturing method Grant 9,329,501 - Huang , et al. May 3, 2 | 2016-05-03 |
Lithographic apparatus and lorentz actuator Grant 9,293,951 - Boon , et al. March 22, 2 | 2016-03-22 |
Planar motor and lithographic apparatus comprising such planar motor Grant 9,172,294 - Hol , et al. October 27, 2 | 2015-10-27 |
Actuation Mechanism, Optical Apparatus, Lithography Apparatus And Method Of Manufacturing Devices App 20150277233 - Van Schoot; Jan Bernard Plechelmus ;   et al. | 2015-10-01 |
Actuation Mechanism, Optical Apparatus, Lithography Apparatus and Method of Manufacturing Devices App 20150261093 - Buis; Edwin Johan ;   et al. | 2015-09-17 |
Method of Calibrating a Reluctance Actuator Assembly, Reluctance Actuator and Lithographic Apparatus Comprising Such Reluctance Actuator App 20150234297 - Akkermans; Johannes Antonius Gerardus ;   et al. | 2015-08-20 |
Lithographic apparatus comprising a substrate table and a surface substrate actuator Grant 9,110,387 - Butler , et al. August 18, 2 | 2015-08-18 |
Support For A Movable Element And Lithography Apparatus App 20150205210 - Boon; Fidelus Adrianus ;   et al. | 2015-07-23 |
Variable reluctance device, stage apparatus, lithographic apparatus and device manufacturing method Grant 9,081,307 - Hol , et al. July 14, 2 | 2015-07-14 |
Lithographic Apparatus Comprising An Actuator, And Method For Protecting Such Actuator App 20150070678 - Cadee; Theodorus Petrus Maria ;   et al. | 2015-03-12 |
Positioning system and a method for positioning a substage with respect to a frame Grant 8,896,811 - Hol , et al. November 25, 2 | 2014-11-25 |
Lithographic Apparatus And Device Manufacturing Method App 20140340666 - Butler; Hans ;   et al. | 2014-11-20 |
Electromagnetic actuator, stage apparatus and lithographic apparatus Grant 8,687,171 - Hol , et al. April 1, 2 | 2014-04-01 |
Lithographic Apparatus And Lorentz Actuator App 20130175884 - Boon; Fidelus Adrianus ;   et al. | 2013-07-11 |
Actuator, positioning system and lithographic apparatus Grant 8,472,010 - Hol , et al. June 25, 2 | 2013-06-25 |
Lithographic Apparatus, Method Of Deforming A Substrate Table And Device Manufacturing Method App 20120327386 - Huang; Yang-Shan ;   et al. | 2012-12-27 |
Lithographic Apparatus Comprising A Substrate Table App 20120300188 - Butler; Hans ;   et al. | 2012-11-29 |
Planar Motor And Lithographic Apparatus Comprising Such Planar Motor App 20120249991 - HOL; Sven Antoin Johan ;   et al. | 2012-10-04 |
Electromagnetic Actuator, Stage Apparatus And Lithographic Apparatus App 20120212723 - Hol; Sven Antoin Johan ;   et al. | 2012-08-23 |
Variable Reluctance Device, Stage Apparatus, Lithographic Apparatus and Device Manufacturing Method App 20120019794 - HOL; Sven Antoin Johan ;   et al. | 2012-01-26 |
Apparatus for cooling Grant 7,956,982 - Hol , et al. June 7, 2 | 2011-06-07 |
Positioning System And A Method For Positioning A Substage With Respect To A Frame App 20110075122 - Hol; Sven Antoin Johan ;   et al. | 2011-03-31 |
Actuator, Positioning System And Lithographic Apparatus App 20110069293 - Hol; Sven Antoin Johan ;   et al. | 2011-03-24 |
Electromagnetic actuator, method of manufacturing a part of an electromagnetic actuator, and lithographic apparatus comprising and electromagnetic actuator Grant 7,696,652 - Hol , et al. April 13, 2 | 2010-04-13 |
Lithographic apparatus having a controlled motor, and motor control system and method Grant 7,468,589 - Cox , et al. December 23, 2 | 2008-12-23 |
Lithographic apparatus and motor Grant 7,459,808 - Hol , et al. December 2, 2 | 2008-12-02 |
Lithographic apparatus and device manufacturing method utilizing a positioning device for positioning an object table Grant 7,456,935 - Cox , et al. November 25, 2 | 2008-11-25 |
Lithographic apparatus having a controlled motor, and motor control system and method App 20070164697 - Cox; Henrikus Herman Marie ;   et al. | 2007-07-19 |
Lithographic apparatus and device manufacturing method Grant 7,245,047 - Vreugdewater , et al. July 17, 2 | 2007-07-17 |
Lithographic apparatus, device manufacturing method and positioning system Grant 7,224,429 - Hol , et al. May 29, 2 | 2007-05-29 |
Apparatus for cooling App 20070114655 - Hol; Sven Antoin Johan ;   et al. | 2007-05-24 |
Lithographic apparatus and motor App 20070108848 - Hol; Sven Antoin Johan ;   et al. | 2007-05-17 |
Electromagnetic actuator, method of manufacturing a part of an electromagnetic actuator, and lithographic apparatus comprising an electromagnetic actuator App 20070096566 - Hol; Sven Antoin Johan ;   et al. | 2007-05-03 |
Planar motor initialization method, planar motor, lithographic apparatus and device manufacturing method Grant 7,205,741 - Simons , et al. April 17, 2 | 2007-04-17 |
Actuator assembly and lithographic apparatus comprising such an actuator assembly Grant 7,167,234 - Cox , et al. January 23, 2 | 2007-01-23 |
Displacement apparatus, litographic apparatus, device manufacturing method, and device manufactured thereby Grant 7,161,267 - Hol , et al. January 9, 2 | 2007-01-09 |
Lithographic apparatus, Lorentz actuator, and device manufacturing method Grant 7,145,269 - Hol , et al. December 5, 2 | 2006-12-05 |
Lithographic apparatus and device manufacturing method utilizing a positioning device for positioning an object table App 20060221323 - Cox; Henrikus Herman Marie ;   et al. | 2006-10-05 |
Lithographic linear motor, lithographic apparatus, and device manufacturing method Grant 7,095,485 - Hol , et al. August 22, 2 | 2006-08-22 |
Lithographic actuator mechanism, lithographic apparatus, and device manufacturing method Grant 7,088,428 - Hol , et al. August 8, 2 | 2006-08-08 |
Lithographic actuator mechanism, lithographic apparatus, and device manufacturing method Grant 7,079,226 - Vreugdewater , et al. July 18, 2 | 2006-07-18 |
Lithographic apparatus and device manufacturing method Grant 7,072,025 - Cox , et al. July 4, 2 | 2006-07-04 |
Actuator assembly and lithographic apparatus comprising such an actuator assembly App 20060082753 - Cox; Henrikus Herman Marie ;   et al. | 2006-04-20 |
Planar motor initialization method, planar motro, lithographic apparatus and device manufacturing method App 20050285550 - Simons, Wilhelmus Franciscus Johannes ;   et al. | 2005-12-29 |
Lithographic apparatus and motor for use in the apparatus Grant 6,943,464 - Hol , et al. September 13, 2 | 2005-09-13 |
Lithographic apparatus and device manufacturing method App 20050190351 - Cox, Henrikus Herman Marie ;   et al. | 2005-09-01 |
Lithographic apparatus, device manufacturing method and positioning system App 20050146698 - Hol, Sven Antoin Johan ;   et al. | 2005-07-07 |
Lithographic apparatus and device manufacturing method Grant 6,906,786 - Cox , et al. June 14, 2 | 2005-06-14 |
Lithographic apparatus and device manufacturing method Grant 6,879,377 - Jacobs , et al. April 12, 2 | 2005-04-12 |
Displacement apparatus, litographic apparatus, device manufacturing method, and device manufactured thereby App 20050061626 - Hol, Sven Antoin Johan ;   et al. | 2005-03-24 |
Lithographic apparatus and device manufacturing method App 20040263000 - Vreugdewater, Patricia ;   et al. | 2004-12-30 |
Lithographic apparatus, magnetic support for use therein, device manufacturing method, and device manufactured thereby Grant 6,831,285 - Hol , et al. December 14, 2 | 2004-12-14 |
Lithographic linear motor, lithographic apparatus, and device manufacturing method App 20040246458 - Hol, Sven Antoin Johan ;   et al. | 2004-12-09 |
Lithographic actuator mechanism, lithographic apparatus, and device manufacturing method App 20040218166 - Vreugdewater, Patricia ;   et al. | 2004-11-04 |
Lithographic apparatus and motor for use in the apparatus Grant 6,717,296 - Hol , et al. April 6, 2 | 2004-04-06 |
Lithographic apparatus and device manufacturing method App 20040008331 - Cox, Henrikus Herman Marie ;   et al. | 2004-01-15 |
Lithographic apparatus and device manufacturing method App 20030137643 - Jacobs, Hernes ;   et al. | 2003-07-24 |
Lithographic apparatus, device manufacturing method, and device manufactured thereby App 20030052284 - Hol, Sven Antoin Johan ;   et al. | 2003-03-20 |
Lithographic apparatus and motor for use in the apparatus App 20030052548 - Hol, Sven Antoin Johan ;   et al. | 2003-03-20 |