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Patent applications and USPTO patent grants for Hofmeister; Chris.The latest application filed is for "configurable high temperature chuck for use in a semiconductor wafer processing system".
Patent | Date |
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Semiconductor wafer processing chamber Grant 11,342,215 - Breingan , et al. May 24, 2 | 2022-05-24 |
Collection chamber apparatus to separate multiple fluids during the semiconductor wafer processing cycle Grant 10,707,099 - Breingan , et al. | 2020-07-07 |
Semiconductor Wafer Processing Chamber App 20180308718 - Breingan; William Gilbert ;   et al. | 2018-10-25 |
Configurable High Temperature Chuck For Use In A Semiconductor Wafer Processing System App 20180308741 - Breingan; William Gilbert ;   et al. | 2018-10-25 |
Collection Chamber Apparatus To Separate Multiple Fluids During The Semiconductor Wafer Processing Cycle App 20170294324 - Breingan; William Gilbert ;   et al. | 2017-10-12 |
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