Hofmann; Thorsten

Patent Applications and Registrations

Patent applications and USPTO patent grants for Hofmann; Thorsten.The latest application filed is for "device and method for analysing a defect of a photolithographic mask or of a wafer".

Company Profile

2.21.21

Hofmann; Thorsten - Rodgau DE

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Device And Method For Analysing A Defect Of A Photolithographic Mask Or Of A Wafer App 20210247336 - Baralia; Gabriel ; et al.	2021-08-12
Device and method for analysing a defect of a photolithographic mask or of a wafer Grant 10,983,075 - Baralia , et al. April 20, 2	2021-04-20
Method and device for permanently repairing defects of absent material of a photolithographic mask Grant 10,732,501 - Oster , et al.	2020-08-04
Method And Device For Permanently Repairing Defects Of Absent Material Of A Photolithographic Mask App 20190317395 - Oster; Jens ; et al.	2019-10-17
Method and device for permanently repairing defects of absent material of a photolithographic mask Grant 10,372,032 - Oster , et al.	2019-08-06
Method and apparatus for analyzing and for removing a defect of an EUV photomask Grant 10,060,947 - Budach , et al. August 28, 2	2018-08-28
Method And Apparatus For Analyzing And For Removing A Defect Of An Euv Photomask App 20180106831 - Budach; Michael ; et al.	2018-04-19
Apparatus and method for examining a surface of a mask Grant 9,910,065 - Budach , et al. March 6, 2	2018-03-06
Device And Method For Analysing A Defect Of A Photolithographic Mask Or Of A Wafer App 20170292923 - Baralia; Gabriel ; et al.	2017-10-12
Method And Device For Permanently Repairing Defects Of Absent Material Of A Photolithographic Mask App 20170248842 - Oster; Jens ; et al.	2017-08-31
Method and apparatus for processing a substrate with a focused particle beam Grant 9,721,754 - Bret , et al. August 1, 2	2017-08-01
Apparatus And Method For Examining A Surface Of A Mask App 20160341763 - Budach; Michael ; et al.	2016-11-24
Apparatus and method for investigating an object Grant 9,115,981 - Baur , et al. August 25, 2	2015-08-25
Method for electron beam induced etching Grant 9,023,666 - Auth , et al. May 5, 2	2015-05-05
Method And Apparatus For Protecting A Substrate During Processing By A Particle Beam App 20140255831 - Hofmann; Thorsten ; et al.	2014-09-11
Apparatus and method for analyzing and modifying a specimen surface Grant 8,769,709 - Baur , et al. July 1, 2	2014-07-01
Method And Apparatus For Analyzing And For Removing A Defect Of An Euv Photomask App 20140165236 - Budach; Michael ; et al.	2014-06-12
Method and apparatus for analyzing and/or repairing of an EUV mask defect Grant 8,674,329 - Budach , et al. March 18, 2	2014-03-18
Apparatus And Method For Investigating An Object App 20140027512 - Baur; Christof ; et al.	2014-01-30
Method for electron beam induced etching of layers contaminated with gallium Grant 8,632,687 - Auth , et al. January 21, 2	2014-01-21
Methods and systems for removing a material from a sample Grant 8,623,230 - Auth , et al. January 7, 2	2014-01-07
Apparatus And Method For Analyzing And Modifying A Specimen Surface App 20140007306 - Baur; Christof ; et al.	2014-01-02
Method And Apparatus For Analyzing And/or Repairing Of An Euv Mask Defect App 20130156939 - Budach; Michael ; et al.	2013-06-20
Method for electron beam induced deposition of conductive material Grant 8,318,593 - Auth , et al. November 27, 2	2012-11-27
Method And Apparatus For Processing A Substrate With A Focused Particle Beam App 20120273458 - Bret; Tristan ; et al.	2012-11-01
Apparatus and method for investigating and/or modifying a sample Grant 8,247,782 - Edinger , et al. August 21, 2	2012-08-21
Apparatus And Method For Investigating And/or Modifying A Sample App 20110210181 - Edinger; Klaus ; et al.	2011-09-01
Method For Electron Beam Induced Etching Of Layers Contaminated With Gallium App 20110183523 - Auth; Nicole ; et al.	2011-07-28
Method For Electron Beam Induced Etching App 20110183444 - Auth; Nicole ; et al.	2011-07-28
Method For Electron Beam Induced Deposition Of Conductive Material App 20110183517 - Auth; Nicole ; et al.	2011-07-28
Method For Processing An Object With Miniaturized Structures App 20100297362 - Budach; Michael ; et al.	2010-11-25
Methods And Systems For Removing A Material From A Sample App 20100282596 - Auth; Nicole ; et al.	2010-11-11
Method for high-resolution processing of thin layers using electron beams Grant 7,786,403 - Koops , et al. August 31, 2	2010-08-31
Apparatus and method for investigating or modifying a surface with a beam of charged particles Grant 7,232,997 - Edinger , et al. June 19, 2	2007-06-19
Apparatus and method for investigating or modifying a surface with a beam of charged particles App 20050230621 - Edinger, Klaus ; et al.	2005-10-20
Method for high-resolution processing of thin layers using electron beams App 20050087514 - Koops, Hans ; et al.	2005-04-28

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