Patent | Date |
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Production Control System App 20210116890 - Junginger; Markus ;   et al. | 2021-04-22 |
Production Control System App 20210116900 - Junginger; Markus ;   et al. | 2021-04-22 |
Extreme ultraviolet lithography mask blank manufacturing system and method of operation therefor Grant 10,788,744 - Hofmann , et al. September 29, 2 | 2020-09-29 |
Glass Ceramic For Ultraviolet Lithography And Method Of Manufacturing Thereof App 20200142292 - Hofmann; Ralf ;   et al. | 2020-05-07 |
Extreme Ultraviolet Mask Blank Production System With Thin Absorber And Manufacturing System Therefor App 20200058213 - Hassan; Vinayak Vishwanath ;   et al. | 2020-02-20 |
Glass ceramic for ultraviolet lithography and method of manufacturing thereof Grant 10,551,731 - Hofmann , et al. Fe | 2020-02-04 |
Extreme ultraviolet mask blank production system with thin absorber and manufacturing system therefor Grant 10,551,732 - Hassan , et al. Fe | 2020-02-04 |
Monitoring system for deposition and method of operation thereof Grant 10,522,375 - Budiarto , et al. Dec | 2019-12-31 |
Extreme Ultraviolet Mask Blank Production System With Thin Absorber And Manufacturing System Therefor App 20190130731 - Hassan; Vinayak Vishwanath ;   et al. | 2019-05-02 |
Methods for the continuous processing of substrates Grant 10,236,198 - Wu , et al. | 2019-03-19 |
System and method for manufacturing planarized extreme ultraviolet lithography blank Grant 10,209,613 - Beasley , et al. Feb | 2019-02-19 |
Shadow mask alignment and management system Grant 10,199,660 - Kwak , et al. Fe | 2019-02-05 |
Extreme ultraviolet mask blank production system with thin absorber and manufacturing system therefor Grant 10,197,907 - Hassan , et al. Fe | 2019-02-05 |
Planarized extreme ultraviolet lithography blank with absorber and manufacturing system therefor Grant 10,012,897 - Hassan , et al. July 3, 2 | 2018-07-03 |
Extreme ultraviolet reflective element with multilayer stack and method of manufacturing thereof Grant 10,012,908 - Hofmann , et al. July 3, 2 | 2018-07-03 |
Growing Graphene On Substrates App 20180158677 - BEASLEY; Cara ;   et al. | 2018-06-07 |
Monitoring System For Deposition And Method Of Operation Thereof App 20180114711 - Budiarto; Edward W. ;   et al. | 2018-04-26 |
Growing graphene on substrates Grant 9,905,418 - Beasley , et al. February 27, 2 | 2018-02-27 |
Monitoring system for deposition and method of operation thereof Grant 9,870,935 - Budiarto , et al. January 16, 2 | 2018-01-16 |
Continuous Substrate Processing System App 20170365491 - Wu; Banqiu ;   et al. | 2017-12-21 |
Continuous substrate processing system Grant 9,748,125 - Wu , et al. August 29, 2 | 2017-08-29 |
Extreme ultraviolet capping layer and method of manufacturing and lithography thereof Grant 9,739,913 - Beasley , et al. August 22, 2 | 2017-08-22 |
Extreme ultraviolet reflective element with amorphous layers and method of manufacturing thereof Grant 9,690,016 - Hofmann , et al. June 27, 2 | 2017-06-27 |
Amorphous Layer Extreme Ultraviolet Lithography Blank, And Manufacturing And Lithography Systems Therefor App 20170168383 - Hofmann; Ralf ;   et al. | 2017-06-15 |
Extreme Ultraviolet Mask Blank Production System With Thin Absorber And Manufacturing System Therefor App 20170160632 - Hassan; Vinayak Vishwanath ;   et al. | 2017-06-08 |
Growing Graphene On Substrates App 20170148631 - BEASLEY; Cara ;   et al. | 2017-05-25 |
Planarized Extreme Ultraviolet Lithography Blank With Absorber And Manufacturing System Therefor App 20170131627 - Hassan; Vinayak Vishwanath ;   et al. | 2017-05-11 |
Extreme Ultraviolet Reflective Element With Multilayer Stack And Method Of Manufacturing Thereof App 20170131637 - Hofmann; Ralf ;   et al. | 2017-05-11 |
Extreme Ultraviolet Lithography Mask Blank Manufacturing System And Method Of Operation Therefor App 20170115555 - Hofmann; Ralf ;   et al. | 2017-04-27 |
Extreme ultraviolet mask blank production system with thin absorber and manufacturing system therefor Grant 9,612,522 - Hassan , et al. April 4, 2 | 2017-04-04 |
Amorphous layer extreme ultraviolet lithography blank, and manufacturing and lithography systems therefor Grant 9,612,521 - Hofmann , et al. April 4, 2 | 2017-04-04 |
Growing graphene on substrates Grant 9,595,436 - Beasley , et al. March 14, 2 | 2017-03-14 |
Extreme ultraviolet reflective element with multilayer stack and method of manufacturing thereof Grant 9,581,890 - Hofmann , et al. February 28, 2 | 2017-02-28 |
Planarized extreme ultraviolet lithography blank with absorber and manufacturing system therefor Grant 9,581,889 - Hassan , et al. February 28, 2 | 2017-02-28 |
Glass Ceramic For Ultraviolet Lithography And Method Of Manufacturing Thereof App 20160377972 - Hofmann; Ralf ;   et al. | 2016-12-29 |
System And Method For Manufacturing Planarized Extreme Ultraviolet Lithography Blank App 20160274454 - Beasley; Cara ;   et al. | 2016-09-22 |
Ultra-smooth layer ultraviolet lithography mirrors and blanks, and manufacturing and lithography systems therefor Grant 9,417,515 - Barman , et al. August 16, 2 | 2016-08-16 |
Shadow Mask Alignment And Management System App 20160204451 - KWAK; Byung-Sung Leo ;   et al. | 2016-07-14 |
Monitoring System For Deposition And Method Of Operation Thereof App 20160181134 - Budiarto; Edward W. ;   et al. | 2016-06-23 |
Planarized extreme ultraviolet lithography blank, and manufacturing and lithography systems therefor Grant 9,354,508 - Beasley , et al. May 31, 2 | 2016-05-31 |
Portable electrostatic chuck carrier for thin substrates Grant 9,343,347 - Haas , et al. May 17, 2 | 2016-05-17 |
Shadow mask alignment and management system Grant 9,325,007 - Kwak , et al. April 26, 2 | 2016-04-26 |
Planarized Extreme Ultraviolet Lithography Blank With Absorber And Manufacturing System Therefor App 20160011500 - Hassan; Vinayak Vishwanath ;   et al. | 2016-01-14 |
Extreme Ultraviolet Capping Layer And Method Of Manufacturing And Lithography Thereof App 20160011344 - Beasley; Cara ;   et al. | 2016-01-14 |
Extreme Ultraviolet Mask Blank Production System With Thin Absorber And Manufacturing System Therefor App 20160011499 - Hassan; Vinayak Vishwanath ;   et al. | 2016-01-14 |
Extreme Ultraviolet Reflective Element With Multilayer Stack And Method Of Manufacturing Thereof App 20160011502 - Hofmann; Ralf ;   et al. | 2016-01-14 |
Extreme Ultraviolet Reflective Element With Amorphous Layers And Method Of Manufacturing Thereof App 20160011345 - Hofmann; Ralf ;   et al. | 2016-01-14 |
Growing Graphene On Substrates App 20150235847 - Beasley; Cara ;   et al. | 2015-08-20 |
Cooling ring for physical vapor deposition chamber target Grant 9,096,927 - West , et al. August 4, 2 | 2015-08-04 |
Apparatus and methods for microwave processing of semiconductor substrates Grant 9,018,110 - Stowell , et al. April 28, 2 | 2015-04-28 |
Method and control unit for operating an injector of an internal combustion engine Grant 8,904,996 - Porten , et al. December 9, 2 | 2014-12-09 |
Extreme Ultraviolet Lithography Mask Blank Manufacturing System And Method Of Operation Therefor App 20140272684 - Hofmann; Ralf ;   et al. | 2014-09-18 |
Planarized Extreme Ultraviolet Lithography Blank, And Manufacturing And Lithography Systems Therefor App 20140268080 - Beasley; Cara ;   et al. | 2014-09-18 |
Amorphous Layer Extreme Ultraviolet Lithography Blank, And Manufacturing And Lithography Systems Therefor App 20140268081 - Hofmann; Ralf ;   et al. | 2014-09-18 |
Ultra-smooth Layer Ultraviolet Lithography Mirrors And Blanks, And Manufacturing And Lithography Systems Therefor App 20140268083 - Barman; Soumendra N. ;   et al. | 2014-09-18 |
Load-balanced allocation of medical task flows to servers of a server farm Grant 8,782,206 - Hofmann , et al. July 15, 2 | 2014-07-15 |
Carbon nanotube-based solar cells Grant 8,747,942 - Nalamasu , et al. June 10, 2 | 2014-06-10 |
Interconnection interface for flexible online/offline deployment of an n-layered software application Grant 8,719,778 - Dorn , et al. May 6, 2 | 2014-05-06 |
Portable Electrostatic Chuck Carrier For Thin Substrates App 20140071581 - HAAS; DIETER ;   et al. | 2014-03-13 |
Apparatus And Methods For Microwave Processing Of Semiconductor Substrates App 20140038431 - Stowell; Michael W. ;   et al. | 2014-02-06 |
Continuous Substrate Processing System App 20130192524 - Wu; Banqiu ;   et al. | 2013-08-01 |
Multi-Chamber Substrate Processing System App 20130196078 - Yudovsky; Joseph ;   et al. | 2013-08-01 |
Rotary Substrate Processing System App 20130192761 - Yudovsky; Joseph ;   et al. | 2013-08-01 |
Cooling Ring For Physical Vapor Deposition Chamber Target App 20130056347 - WEST; BRIAN ;   et al. | 2013-03-07 |
Packaging container for bottles Grant D664,043 - Hofmann , et al. July 24, 2 | 2012-07-24 |
Alkali Metal Deposition System App 20120152727 - Kwak; Byung Sung ;   et al. | 2012-06-21 |
Method and control unit for operating an injector of an internal combustion engine App 20120152203 - Porten; Guido ;   et al. | 2012-06-21 |
Dielectric Deposition Using A Remote Plasma Source App 20110226617 - Hofmann; Ralf ;   et al. | 2011-09-22 |
Shadow Mask Alignment And Management System App 20110131792 - KWAK; Byung-Sung Leo ;   et al. | 2011-06-09 |
Carbon Nanotube-based Solar Cells App 20100313951 - Nalamasu; Omkaram ;   et al. | 2010-12-16 |
Apparatus for plasma-enhanced physical vapor deposition of copper with RF source power applied through the workpiece with a lighter-than-copper carrier gas Grant 7,820,020 - Brown , et al. October 26, 2 | 2010-10-26 |
Sulfurization Or Selenization In Molten (liquid) State For The Photovoltaic Applications App 20100255660 - Singh; Kaushal K. ;   et al. | 2010-10-07 |
Method and apparatus for processing data, and medical appliance system for processing data Grant 7,801,965 - Hofmann , et al. September 21, 2 | 2010-09-21 |
Load-balanced allocation of medical task flows to servers of a server farm App 20100057828 - Hofmann; Ralf ;   et al. | 2010-03-04 |
Coaxial Microwave Assisted Deposition And Etch Systems App 20090238998 - STOWELL; MICHAEL W. ;   et al. | 2009-09-24 |
Flexible interconnection system App 20080141213 - DORN; Karlheinz ;   et al. | 2008-06-12 |
Nanocrystal Formation App 20080135914 - Krishna; Nety M. ;   et al. | 2008-06-12 |
Interconnection interface for flexible online/offline deployment of an n-layered software application App 20080028384 - Dorn; Karlheinz ;   et al. | 2008-01-31 |
Reliable Fuel Cell Electrode Design App 20070243452 - Weidman; Timothy W. ;   et al. | 2007-10-18 |
Computer-based presentation manager and method for individual user-device data representation Grant 7,281,060 - Hofmann , et al. October 9, 2 | 2007-10-09 |
Network portal system and methods Grant 7,269,664 - Hutsch , et al. September 11, 2 | 2007-09-11 |
Physical vapor deposition plasma reactor with VHF source power applied through the workpiece Grant 7,244,344 - Brown , et al. July 17, 2 | 2007-07-17 |
Radio communication system Grant 7,092,736 - Auth , et al. August 15, 2 | 2006-08-15 |
Apparatus for plasma-enhanced physical vapor deposition of copper with RF source power applied through the workpiece App 20060172536 - Brown; Karl M. ;   et al. | 2006-08-03 |
Physical vapor deposition plasma reactor with VHF source power applied through the workpiece App 20060169576 - Brown; Karl M. ;   et al. | 2006-08-03 |
Apparatus for plasma-enhanced physical vapor deposition of copper with RF source power applied through the workpiece with a lighter-than-copper carrier gas App 20060169578 - Brown; Karl M. ;   et al. | 2006-08-03 |
Generation and management of a rights context for order handling in technical processes App 20060112020 - Dorn; Karlheinz ;   et al. | 2006-05-25 |
Monitoring a flow distribution of an energized gas App 20060093730 - Phan; See-Eng ;   et al. | 2006-05-04 |
Method and apparatus for processing data, and medical appliance system for processing data App 20050234325 - Hofmann, Ralf ;   et al. | 2005-10-20 |
Authentication system and method for providing access for a subsystem to a password-protected main system App 20050228721 - Hofmann, Ralf | 2005-10-13 |
Radio communication system App 20050079854 - Auth, Elisabeth ;   et al. | 2005-04-14 |
Method and structure for dynamic conversion of data App 20010039540 - Hofmann, Ralf ;   et al. | 2001-11-08 |
Network portal system and methods App 20010034771 - Hutsch, Matthias ;   et al. | 2001-10-25 |
Method and system for remote control and interaction with a run time environment component App 20010020255 - Hofmann, Ralf ;   et al. | 2001-09-06 |
Computer-based presentation manager and method for individual user-device data representation App 20010009016 - Hofmann, Ralf ;   et al. | 2001-07-19 |
Sputtering method and apparatus with small diameter RF coil Grant 6,146,508 - Gopalraja , et al. November 14, 2 | 2000-11-14 |
Apparatus and method for sputtering ionized material in a plasma Grant 6,132,566 - Hofmann , et al. October 17, 2 | 2000-10-17 |
Apparatus and method for enhancing uniformity of a metal film formed on a substrate with the aid of an inductively coupled plasma Grant 5,902,461 - Xu , et al. May 11, 1 | 1999-05-11 |
Magnet design for a sputtering chamber Grant 5,876,574 - Hofmann , et al. March 2, 1 | 1999-03-02 |
Slotted RF coil shield for plasma deposition system Grant 5,763,851 - Forster , et al. June 9, 1 | 1998-06-09 |