loadpatents
Patent applications and USPTO patent grants for Hoffman; Jerzy R..The latest application filed is for "drive laser for euv light source".
Patent | Date |
---|---|
Drive laser for EUV light source Grant 9,735,535 - Ershov , et al. August 15, 2 | 2017-08-15 |
Drive Laser For Euv Light Source App 20130321901 - Ershov; Alexander I. ;   et al. | 2013-12-05 |
Drive laser for EUV light source Grant 8,514,486 - Ershov , et al. August 20, 2 | 2013-08-20 |
EUV light producing system and method utilizing an alignment laser Grant 8,304,752 - Fomenkov , et al. November 6, 2 | 2012-11-06 |
Drive laser for EUV light source App 20110058588 - Ershov; Alexander I. ;   et al. | 2011-03-10 |
Alignment Laser App 20100327192 - Fomenkov; Igor V. ;   et al. | 2010-12-30 |
Extreme ultraviolet light source App 20100176313 - Melnychuk; Stephan T. ;   et al. | 2010-07-15 |
Drive laser for EUV light source App 20090161201 - Ershov; Alexander I. ;   et al. | 2009-06-25 |
Drive laser for EUV light source Grant 7,518,787 - Bykanov , et al. April 14, 2 | 2009-04-14 |
LPP EUV drive laser input system Grant 7,402,825 - Simmons , et al. July 22, 2 | 2008-07-22 |
Systems and methods for EUV light source metrology Grant 7,394,083 - Bowering , et al. July 1, 2 | 2008-07-01 |
Extreme ultraviolet light source Grant 7,368,741 - Melnychuk , et al. May 6, 2 | 2008-05-06 |
Extreme ultraviolet light source App 20080023657 - Melnychuk; Stephen T. ;   et al. | 2008-01-31 |
Drive laser for EUV light source App 20070291350 - Ershov; Alexander I. ;   et al. | 2007-12-20 |
Systems and methods for deflecting plasma-generated ions to prevent the ions from reaching an internal component of an EUV light source Grant 7,217,941 - Rettig , et al. May 15, 2 | 2007-05-15 |
Systems and methods for EUV light source metrology App 20070008517 - Fomenkov; Igor V. ;   et al. | 2007-01-11 |
LPP EUV drive laser input system App 20060289806 - Simmons; Rodney D. ;   et al. | 2006-12-28 |
Systems and methods for deflecting plasma-generated ions to prevent the ions from reaching an internal component of an EUV light source App 20050279946 - Rettig, Curtis L. ;   et al. | 2005-12-22 |
Extreme ultraviolet light source Grant 6,972,421 - Melnychuk , et al. December 6, 2 | 2005-12-06 |
Extreme ultraviolet light source App 20050230645 - Melnychuk, Stephan T. ;   et al. | 2005-10-20 |
Extreme ultraviolet light source App 20040108473 - Melnychuk, Stephan T. ;   et al. | 2004-06-10 |
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