Patent | Date |
---|
Apparatus and method for bearing a lithography mask Grant 9,964,862 - Hof May 8, 2 | 2018-05-08 |
Apparatus And Method For Bearing A Lithography Mask App 20170153555 - Hof; Albrecht | 2017-06-01 |
Method Of Measuring A Shape Of An Optical Surface Based On Computationally Combined Surface Region Measurements And Interferometric Measuring Device App 20140078513 - FREIMANN; Rolf ;   et al. | 2014-03-20 |
Optical system, in particular in a microlithographic projection exposure apparatus Grant 8,654,345 - Hof , et al. February 18, 2 | 2014-02-18 |
Method of measuring a shape of an optical surface based on computationally combined surface region measurements and interferometric measuring device Grant 8,593,642 - Freimann , et al. November 26, 2 | 2013-11-26 |
Method Of Measuring A Shape Of An Optical Surface And Interferometric Measuring Device App 20120229814 - FREIMANN; Rolf ;   et al. | 2012-09-13 |
Device and method for measuring lithography masks Grant 8,253,947 - Hof , et al. August 28, 2 | 2012-08-28 |
Optical System, In Particular In A Microlithographic Projection Exposure Apparatus App 20120140241 - Hof; Albrecht ;   et al. | 2012-06-07 |
Device And Method For Measuring Lithography Masks App 20110205549 - Hof; Albrecht ;   et al. | 2011-08-25 |
Apparatus And Method For Measuring The Positions Of Marks On A Mask App 20100153059 - Klose; Gerd ;   et al. | 2010-06-17 |
Device for sealing a projection exposure apparatus Grant 7,130,017 - Hof , et al. October 31, 2 | 2006-10-31 |
Device for sealing a projection exposure apparatus App 20050206860 - Hof, Albrecht ;   et al. | 2005-09-22 |
Optical system with isolated measuring structure Grant 6,864,988 - Hof , et al. March 8, 2 | 2005-03-08 |
Lithographic apparatus and device manufacturing method Grant 6,750,949 - Loopstra , et al. June 15, 2 | 2004-06-15 |
Lithographic apparatus and device manufacturing method App 20030058422 - Loopstra, Erik Roelof ;   et al. | 2003-03-27 |
Process for manufacturing optical surfaces and shaping machine for carrying out this process Grant 6,523,443 - Hof , et al. February 25, 2 | 2003-02-25 |
Optical system with a plurality of optical elements App 20030010902 - Hof, Albrecht ;   et al. | 2003-01-16 |
Spectacle lens with spherical front side and multifocal back side and process for its production Grant 6,089,713 - Hof , et al. July 18, 2 | 2000-07-18 |
Process and apparatus for the measurement of object topographies by means of projected fringe patterns Grant 5,379,107 - Hanssen , et al. January 3, 1 | 1995-01-03 |
Method for analyzing periodic brightness patterns Grant 5,343,294 - Kuchel , et al. August 30, 1 | 1994-08-30 |
Method and apparatus for three-dimensional optical measurement of object surfaces Grant 5,307,151 - Hof , et al. April 26, 1 | 1994-04-26 |
Method and apparatus for non-contact measuring of object surfaces Grant 5,135,309 - Kuchel , et al. August 4, 1 | 1992-08-04 |
Coordinate measuring apparatus having an optical sensing head Grant 4,963,728 - Hof , et al. October 16, 1 | 1990-10-16 |