Hochberg; Arthur Kenneth
Patent Applications and Registrations
Patent applications and USPTO patent grants for Hochberg; Arthur Kenneth.The latest application filed is for "precursors for cvd silicon carbo-nitride films".
- Hochberg; Arthur Kenneth - Solana Beach CA
- Hochberg; Arthur Kenneth - Torrance CA
| Patent | Date |
|---|---|
| Precursors for CVD silicon carbo-nitride films Grant 9,640,386 - Xiao , et al. May 2, 2 | 2017-05-02 |
| Precursors for CVD Silicon Carbo-Nitride Films App 20150147893 - Xiao; Manchao ; et al. | 2015-05-28 |
| Methods for depositing silicon carbo-nitride film Grant 8,932,675 - Xiao , et al. January 13, 2 | 2015-01-13 |
| Precursors for CVD Silicon Carbo-Nitride Films App 20130244448 - Xiao; Manchao ; et al. | 2013-09-19 |
| Precursors for CVD silicon carbo-nitride films Grant 8,383,849 - Xiao , et al. February 26, 2 | 2013-02-26 |
| Precursors for CVD Silicon Carbo-Nitride Films App 20110165346 - Xiao; Manchao ; et al. | 2011-07-07 |
| Precursors for CVD silicon carbo-nitride films Grant 7,932,413 - Xiao , et al. April 26, 2 | 2011-04-26 |
| Precursors for CVD silicon carbo-nitride and silicon nitride films Grant 7,875,556 - Xiao , et al. January 25, 2 | 2011-01-25 |
| Diethylsilane as a silicon source in the deposition of metal silicate films Grant 7,582,574 - Clark , et al. September 1, 2 | 2009-09-01 |
| Precursors for CVD Silicon Carbo-nitride Films App 20090069588 - Xiao; Manchao ; et al. | 2009-03-12 |
| Diethylsilane As A Silicon Source In The Deposition Of Metal Silicate Films App 20070281475 - Clark; Robert Daniel ; et al. | 2007-12-06 |
| Precursors for depositing silicon containing films Grant 7,288,145 - Xiao , et al. October 30, 2 | 2007-10-30 |
| Method and vessel for the delivery of precursor materials Grant 7,261,118 - Birtcher , et al. August 28, 2 | 2007-08-28 |
| Precursors for depositing silicon containing films App 20070004931 - Xiao; Manchao ; et al. | 2007-01-04 |
| Precursors for CVD silicon carbo-nitride films App 20060258173 - Xiao; Manchao ; et al. | 2006-11-16 |
| Precursors for depositing silicon containing films and processes thereof Grant 7,122,222 - Xiao , et al. October 17, 2 | 2006-10-17 |
| Preparation of metal silicon nitride films via cyclic deposition App 20060182885 - Lei; Xinjian ; et al. | 2006-08-17 |
| Single source mixtures of metal siloxides Grant 7,033,560 - Clark , et al. April 25, 2 | 2006-04-25 |
| Silicon nitride from aminosilane using PECVD App 20060045986 - Hochberg; Arthur Kenneth ; et al. | 2006-03-02 |
| Precursors for depositing silicon-containing films and processes thereof App 20050181633 - Hochberg, Arthur Kenneth ; et al. | 2005-08-18 |
| Method and vessel for the delivery of precursor materials App 20050039794 - Birtcher, Charles Michael ; et al. | 2005-02-24 |
| Process of CVD of Hf and Zr containing oxynitride films Grant 6,844,271 - Loftin , et al. January 18, 2 | 2005-01-18 |
| Process Of Cvd Of Hf And Zr Containing Oxynitride Films App 20040235312 - Loftin, John D. ; et al. | 2004-11-25 |
| Precursors for depositing silicon containing films and processes thereof App 20040146644 - Xiao, Manchao ; et al. | 2004-07-29 |
| Single source mixtures of metal siloxides App 20040044163 - Clark, Robert D. ; et al. | 2004-03-04 |
| Synthesis of metal oxide and oxynitride Grant 6,616,972 - Senzaki , et al. September 9, 2 | 2003-09-09 |
| Process for metal metalloid oxides and nitrides with compositional gradients Grant 6,537,613 - Senzaki , et al. March 25, 2 | 2003-03-25 |
| Liquid precursor mixtures for deposition of multicomponent metal containing materials Grant 6,503,561 - Senzaki , et al. January 7, 2 | 2003-01-07 |
| Synthesis of tantalum nitride Grant 6,319,567 - Senzaki , et al. November 20, 2 | 2001-11-20 |
| Deposition of silicon dioxide and silicon oxynitride using bis(tertiarybutylamino) silane Grant 5,976,991 - Laxman , et al. November 2, 1 | 1999-11-02 |
| Silicon nitride from bis(tertiarybutylamino)silane Grant 5,874,368 - Laxman , et al. February 23, 1 | 1999-02-23 |
| Microwave semiconductor device package Grant 3,898,594 - Hochberg , et al. August 5, 1 | 1975-08-05 |
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