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Patent applications and USPTO patent grants for Hobbelen; Daniel Godfried Emma.The latest application filed is for "positioning system and a method for positioning a substage with respect to a frame".
Patent | Date |
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Positioning system and a method for positioning a substage with respect to a frame Grant 8,896,811 - Hol , et al. November 25, 2 | 2014-11-25 |
Actuator, positioning system and lithographic apparatus Grant 8,472,010 - Hol , et al. June 25, 2 | 2013-06-25 |
Positioning System And A Method For Positioning A Substage With Respect To A Frame App 20110075122 - Hol; Sven Antoin Johan ;   et al. | 2011-03-31 |
Actuator, Positioning System And Lithographic Apparatus App 20110069293 - Hol; Sven Antoin Johan ;   et al. | 2011-03-24 |
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