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Method and device for array threshold voltage control by trapped charge in trench isolation Grant 6,348,394 - Mandelman , et al. February 19, 2 | 2002-02-19 |
Shallow trench isolation (STI) with bilayer of oxide-nitride for VLSI applications Grant 6,140,208 - Agahi , et al. October 31, 2 | 2000-10-31 |
Shallow trench isolation with oxide-nitride/oxynitride liner Grant 5,763,315 - Benedict , et al. June 9, 1 | 1998-06-09 |
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