loadpatents
Patent applications and USPTO patent grants for Hiyama; Hirokuni.The latest application filed is for "dressing method, method of determining dressing conditions, program for determining dressing conditions, and polishing apparatus".
Patent | Date |
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Dressing method, method of determining dressing conditions, program for determining dressing conditions, and polishing apparatus Grant 8,965,555 - Fukuda , et al. February 24, 2 | 2015-02-24 |
Dressing Method, Method Of Determining Dressing Conditions, Program For Determining Dressing Conditions, And Polishing Apparatus App 20140120808 - FUKUDA; Akira ;   et al. | 2014-05-01 |
Dressing method, method of determining dressing conditions, program for determining dressing conditions, and polishing apparatus Grant 8,655,478 - Fukuda , et al. February 18, 2 | 2014-02-18 |
Substrate Processing Method And Substrate Processing Apparatus App 20100325913 - WANG; Xinming ;   et al. | 2010-12-30 |
Dressing Method, Method Of Determining Dressing Conditions, Program For Determining Dressing Conditions, And Polishing Apparatus App 20100081361 - Fukuda; Akira ;   et al. | 2010-04-01 |
Electrolytic processing apparatus and electrolytic processing method Grant 7,527,723 - Kobata , et al. May 5, 2 | 2009-05-05 |
Electrochemical polishing method and polishing method App 20090095637 - Toma; Yasushi ;   et al. | 2009-04-16 |
Electrochemical mechanical polishing method and electrochemical mechanical polishing apparatus App 20090078583 - Kobata; Itsuki ;   et al. | 2009-03-26 |
Method for estimating polishing profile or polishing amount, polishing method and polishing apparatus Grant 7,361,076 - Sakurai , et al. April 22, 2 | 2008-04-22 |
Etching method and apparatus Grant 7,314,574 - Ichiki , et al. January 1, 2 | 2008-01-01 |
Apparatus for polishing a substrate Grant 7,291,057 - Kimura , et al. November 6, 2 | 2007-11-06 |
Polishing Apparatus and Polishing Method App 20070254558 - Kodera; Masako ;   et al. | 2007-11-01 |
Polishing method and polishing apparatus App 20070232203 - Fukuda; Akira ;   et al. | 2007-10-04 |
Method for estimating polishing profile or polishing amount, polishing method and polishing apparatus App 20070224916 - Sakurai; Kunihiko ;   et al. | 2007-09-27 |
Polishing apparatus and polishing method App 20070205112 - Kodera; Masako ;   et al. | 2007-09-06 |
Method for estimating polishing profile or polishing amount, polishing method and polishing apparatus Grant 7,234,999 - Sakurai , et al. June 26, 2 | 2007-06-26 |
Method for estimating polishing profile or polishing amount, polishing method and polishing apparatus App 20070061036 - Sakurai; Kunihiko ;   et al. | 2007-03-15 |
Cleaning method and polishing apparatus employing such cleaning method Grant 7,169,235 - Wada , et al. January 30, 2 | 2007-01-30 |
Method for estimating polishing profile or polishing amount, polishing method and polishing apparatus Grant 7,150,673 - Sakurai , et al. December 19, 2 | 2006-12-19 |
Etching method and apparatus Grant 7,144,520 - Ichiki , et al. December 5, 2 | 2006-12-05 |
Substrate processing method and substrate processing apparatus App 20060234499 - Kodera; Akira ;   et al. | 2006-10-19 |
Polishing apparatus including turntable with polishing surface of different heights Grant RE39,262 - Hirose , et al. September 5, 2 | 2006-09-05 |
Beam source and beam processing apparatus Grant 7,078,862 - Fukuda , et al. July 18, 2 | 2006-07-18 |
Beam source and beam processing apparatus Grant 7,034,285 - Ichiki , et al. April 25, 2 | 2006-04-25 |
Method for estimating polishing profile or polishing amount, polishing method and polishing apparatus App 20060009127 - Sakurai; Kunihiko ;   et al. | 2006-01-12 |
Polishing method using an abrading plate Grant 6,942,548 - Wada , et al. September 13, 2 | 2005-09-13 |
Electrolytic processing apparatus and electrolytic processing method App 20050155868 - Kobata, Itsuki ;   et al. | 2005-07-21 |
Method of processing a surface of a workpiece Grant 6,909,087 - Ichiki , et al. June 21, 2 | 2005-06-21 |
Neutral particle beam processing apparatus Grant 6,909,086 - Samukawa , et al. June 21, 2 | 2005-06-21 |
Neutral particle beam processing apparatus Grant 6,861,642 - Ichiki , et al. March 1, 2 | 2005-03-01 |
Neutral particle beam processing apparatus Grant 6,861,643 - Ichiki , et al. March 1, 2 | 2005-03-01 |
Neutral particle beam processing apparatus Grant 6,858,838 - Ichiki , et al. February 22, 2 | 2005-02-22 |
Beam processing apparatus Grant 6,849,857 - Ichiki , et al. February 1, 2 | 2005-02-01 |
Etching method and apparatus App 20050020070 - Ichiki, Katsunori ;   et al. | 2005-01-27 |
Etching method and apparatus App 20040244687 - Ichiki, Katsunori ;   et al. | 2004-12-09 |
Beam source and beam processing apparatus App 20040222367 - Ichiki, Katsunori ;   et al. | 2004-11-11 |
Cleaning method and polishing apparatus employing such cleaning method App 20040221874 - Wada, Yutaka ;   et al. | 2004-11-11 |
Beam source and beam processing apparatus App 20040221815 - Fukuda, Akira ;   et al. | 2004-11-11 |
Neutral particle beam processing apparatus App 20040119006 - Samukawa, Seiji ;   et al. | 2004-06-24 |
Cleaning method and polishing apparatus employing such cleaning method Grant 6,752,692 - Wada , et al. June 22, 2 | 2004-06-22 |
Beam processing apparatus App 20040108469 - Ichiki, Katsunori ;   et al. | 2004-06-10 |
Neutral particle beam processing apparatus App 20040108470 - Ichiki, Katsunori ;   et al. | 2004-06-10 |
Method of processing a surface of a workpiece App 20040094400 - Ichiki, Kasunori ;   et al. | 2004-05-20 |
Neutral particle beam processing apparatus App 20040074604 - Ichiki, Katsunori ;   et al. | 2004-04-22 |
Neutral particle beam processing apparatus App 20040070348 - Ichiki, Katsunori ;   et al. | 2004-04-15 |
Polishing-product discharging device and polishing device Grant 6,712,678 - Wada , et al. March 30, 2 | 2004-03-30 |
Polishing apparatus and dressing method Grant 6,672,945 - Matsuo , et al. January 6, 2 | 2004-01-06 |
Apparatus for polishing a substrate App 20030232576 - Kimura, Norio ;   et al. | 2003-12-18 |
Polishing method and polishing apparatus Grant 6,626,739 - Wada , et al. September 30, 2 | 2003-09-30 |
Method for polishing a substrate Grant 6,609,950 - Kimura , et al. August 26, 2 | 2003-08-26 |
Polishing apparatus and dressing method App 20030100246 - Hirokawa, Kazuto ;   et al. | 2003-05-29 |
Polishing apparatus App 20020151259 - Hirokawa, Kazuto ;   et al. | 2002-10-17 |
Polishing apparatus App 20020137440 - Matsuo, Hisanori ;   et al. | 2002-09-26 |
Abrading plate and polishing method using the same Grant 6,413,149 - Wada , et al. July 2, 2 | 2002-07-02 |
Polishing solution feeder Grant 6,406,364 - Kimura , et al. June 18, 2 | 2002-06-18 |
Polishing apparatus Grant 6,390,901 - Hiyama , et al. May 21, 2 | 2002-05-21 |
Polishing tool and manufacturing method therefor App 20020016139 - Hirokawa, Kazuto ;   et al. | 2002-02-07 |
Apparatus and method for polishing substrate App 20020016074 - Kimura, Norio ;   et al. | 2002-02-07 |
Polishing method using an abrading plate App 20020006768 - Wada, Yutaka ;   et al. | 2002-01-17 |
Cleaning method and polishing apparatus employing such cleaning method App 20010055937 - Wada, Yutaka ;   et al. | 2001-12-27 |
Polishing apparatus and method of manufacturing grinding plate App 20010029161 - Hirokawa, Kazuto ;   et al. | 2001-10-11 |
Polishing apparatus App 20010009843 - Hirokawa, Kazuto ;   et al. | 2001-07-26 |
Polishing apparatus App 20010002359 - Matsuo, Hisanori ;   et al. | 2001-05-31 |
Polishing apparatus Grant 6,196,904 - Matsuo , et al. March 6, 2 | 2001-03-06 |
Polishing apparatus including turntable with polishing surface of different heights Grant 6,102,786 - Hirose , et al. August 15, 2 | 2000-08-15 |
Polishing apparatus Grant 6,015,337 - Hiyama , et al. January 18, 2 | 2000-01-18 |
Polishing apparatus including turntable with polishing surface of different heights Grant 5,888,126 - Hirose , et al. March 30, 1 | 1999-03-30 |
Polishing apparatus Grant 5,882,244 - Hiyama , et al. March 16, 1 | 1999-03-16 |
Polishing apparatus including thickness or flatness detector Grant 5,838,447 - Hiyama , et al. November 17, 1 | 1998-11-17 |
Vibrating column pump Grant 5,266,012 - Hashimoto , et al. November 30, 1 | 1993-11-30 |
Active magnetic bearing apparatus Grant 4,920,290 - Murakami , et al. April 24, 1 | 1990-04-24 |
System for preventing unbalance vibrations and synchronous disturbance vibrations Grant 4,910,449 - Hiyama , et al. March 20, 1 | 1990-03-20 |
Unstable vibration prevention apparatus for magnetic bearing system Grant 4,885,491 - Hiyama , et al. December 5, 1 | 1989-12-05 |
Mechanical seal Grant 4,489,951 - Kataoka , et al. December 25, 1 | 1984-12-25 |
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