Hiura; Mitsuru

Patent Applications and Registrations

Patent applications and USPTO patent grants for Hiura; Mitsuru.The latest application filed is for "imprint apparatus and article manufacturing method".

Company Profile

0.9.9

Hiura; Mitsuru - Utsunomiya JP
Hiura; Mitsuru - Utsunomiya-shi JP
Hiura; Mitsuru - Tochigi JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Imprint apparatus Grant 10,073,339 - Nakagawa , et al. September 11, 2	2018-09-11
Imprint apparatus and article manufacturing method Grant 9,910,351 - Shinoda , et al. March 6, 2	2018-03-06
Imprint apparatus Grant 9,851,634 - Matsuda , et al. December 26, 2	2017-12-26
Imprint apparatus including alignment and overlay measurement Grant 9,616,613 - Suzuki , et al. April 11, 2	2017-04-11
Imprint Apparatus And Article Manufacturing Method App 20170080633 - Shinoda; Ken-ichiro ; et al.	2017-03-23
Imprint apparatus and article manufacturing method Grant 9,541,825 - Shinoda , et al. January 10, 2	2017-01-10
Imprinting method, imprinting apparatus, and device manufacturing method Grant 9,442,370 - Sato , et al. September 13, 2	2016-09-13
Imprint Apparatus, Imprint Method, And Method Of Manufacturing Article App 20150190961 - Nakagawa; Kazuki ; et al.	2015-07-09
Imprint Apparatus And Article Manufacturing Method Using Same App 20150001751 - Matsuda; Yozo ; et al.	2015-01-01
Imprinting Method, Imprinting Apparatus, And Device Manufacturing Method App 20140346700 - Sato; Hiroshi ; et al.	2014-11-27
Imprint Apparatus And Method Of Manufacturing Article App 20130193602 - Suzuki; Akiyoshi ; et al.	2013-08-01
Imprint Apparatus And Article Manufacturing Method App 20130181365 - Shinoda; Ken-ichiro ; et al.	2013-07-18
Exposure apparatus and device manufacturing method Grant 7,295,285 - Hiura November 13, 2	2007-11-13
Exposure apparatus and device fabrication method using the same Grant 7,274,435 - Hiura , et al. September 25, 2	2007-09-25
Exposure apparatus and device manufacturing method App 20060214118 - Hiura; Mitsuru	2006-09-28
Exposure apparatus and device fabrication method using the same App 20050225739 - Hiura, Mitsuru	2005-10-13
Exposure apparatus and device manufacturing method using the same Grant 6,891,175 - Hiura May 10, 2	2005-05-10
Exposure apparatus and device manufacturing method using the same App 20020024646 - Hiura, Mitsuru	2002-02-28

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