Hitachi Tokyo Electronics Co., Ltd.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Hitachi Tokyo Electronics Co., Ltd..The latest application filed is for "method of inspecting pattern and inspecting instrument".

Company Profile

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Hitachi Tokyo Electronics Co., Ltd. - Tokyo JP
Hitachi Tokyo Electronics Co., Ltd. - Ome JP
Hitachi Tokyo Electronics Co., Ltd. - Ohme JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Method of inspecting pattern and inspecting instrument Grant 8,558,173 - Nozoe , et al. October 15, 2	2013-10-15
Semiconductor integrated circuit device and process for manufacturing the same Grant 7,163,886 - Fujiwara , et al. January 16, 2	2007-01-16
Method of inspecting pattern and inspecting instrument Grant 7,112,791 - Nozoe , et al. September 26, 2	2006-09-26
Method of inspecting pattern and inspecting instrument Grant 6,777,677 - Nozoe , et al. August 17, 2	2004-08-17
Manufacturing method of semiconductor device Grant 6,767,782 - Saikawa , et al. July 27, 2	2004-07-27
Method for manufacturing semiconductor device Grant 6,730,594 - Noguchi , et al. May 4, 2	2004-05-04
Process for manufacturing semiconductor integrated circuit device including treatment of gas used in the process Grant 6,723,665 - Tanabe , et al. April 20, 2	2004-04-20
Wafer chuck, exposure system, and method of manufacturing semiconductor device Grant 6,664,549 - Kobayashi , et al. December 16, 2	2003-12-16
Method of manufacturing IC cards Grant 6,615,390 - Takagi September 2, 2	2003-09-02
Process for manufacturing semiconductor integrated circuit device including treatment of gas used in the process Grant 6,602,808 - Tanabe , et al. August 5, 2	2003-08-05
Method of inspecting pattern and inspecting instrument Grant 6,583,414 - Nozoe , et al. June 24, 2	2003-06-24
Plasma etching system and plasma etching method Grant 5,593,540 - Tomita , et al. January 14, 1	1997-01-14
Atmospheric pressure ionization mass spectrometer Grant 5,485,016 - Irie , et al. January 16, 1	1996-01-16
Plasma etching system Grant 5,423,936 - Tomita , et al. June 13, 1	1995-06-13
Gas analyzer for determining impurity concentration of highly-purified gas Grant 5,304,797 - Irie , et al. April 19, 1	1994-04-19
Vacuum system with a secondary gas also connected to the roughing pump for a semiconductor processing chamber Grant 5,062,771 - Satou , et al. November 5, 1	1991-11-05
Semiconductor integrated circuit device, method for producing or assembling same, and producing or assembling apparatus for use in the method Grant 5,031,821 - Kaneda , et al. July 16, 1	1991-07-16
Frequency sensor Grant 5,027,107 - Matsuno , et al. June 25, 1	1991-06-25
Mass spectrometer Grant 4,996,422 - Mitsui , et al. February 26, 1	1991-02-26
Method for LPCVD of semiconductors using oil free vacuum pumps Grant 4,835,114 - Satou , et al. May 30, 1	1989-05-30
Container for electrical components Grant 4,702,371 - Hoshi , et al. October 27, 1	1987-10-27

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