Hisai; Akihiro
Patent Applications and Registrations
Patent applications and USPTO patent grants for Hisai; Akihiro.The latest application filed is for "developing apparatus".
- Hisai; Akihiro - Kyoto JP
- Hisai; Akihiro - Shimogyo-ku JP
- HISAI; Akihiro - Kyoto-shi JP
| Patent | Date |
|---|---|
| Developing apparatus Grant 9,581,907 - Harumoto , et al. February 28, 2 | 2017-02-28 |
| Developing Apparatus App 20150104747 - Harumoto; Masahiko ; et al. | 2015-04-16 |
| Developing method Grant 8,956,695 - Harumoto , et al. February 17, 2 | 2015-02-17 |
| Substrate processing apparatus and substrate processing method Grant 8,580,340 - Imamura , et al. November 12, 2 | 2013-11-12 |
| Substrate processing apparatus and substrate processing method Grant 8,496,761 - Kaneyama , et al. July 30, 2 | 2013-07-30 |
| Developing Apparatus App 20120122038 - Harumoto; Masahiko ; et al. | 2012-05-17 |
| Substrate developing method and developing apparatus Grant 8,137,576 - Harumoto , et al. March 20, 2 | 2012-03-20 |
| Substrate processing apparatus and substrate processing method Grant 8,034,190 - Yasuda , et al. October 11, 2 | 2011-10-11 |
| Substrate Processing Apparatus And Substrate Processing Method App 20110135820 - IMAMURA; Masanori ; et al. | 2011-06-09 |
| Substrate Processing Apparatus And Substrate Processing Method App 20100190116 - Kaneyama; Koji ; et al. | 2010-07-29 |
| Substrate Processing Apparatus And Substrate Processing Method App 20100159142 - Yasuda; Shuichi ; et al. | 2010-06-24 |
| Substrate processing apparatus and substrate processing method Grant 7,726,891 - Kaneyama , et al. June 1, 2 | 2010-06-01 |
| Developing Apparatus App 20090103960 - Harumoto; Masahiko ; et al. | 2009-04-23 |
| Substrate Developing Method And Developing Apparatus App 20080203058 - Harumoto; Masahiko ; et al. | 2008-08-28 |
| Heat treatment apparatus App 20060292515 - Hisai; Akihiro ; et al. | 2006-12-28 |
| Substrate processing apparatus and substrate processing method App 20060104635 - Kaneyama; Koji ; et al. | 2006-05-18 |
| Substrate processing apparatus and substrate processing method App 20060098979 - Kaneyama; Koji ; et al. | 2006-05-11 |
| Substrate processing apparatus and substrate processing method App 20060098978 - Yasuda; Schuichi ; et al. | 2006-05-11 |
| Heat processing device Grant 7,017,658 - Hisai , et al. March 28, 2 | 2006-03-28 |
| Substrate processing apparatus and substrate processing method App 20050220985 - Kaneyama, Koji ; et al. | 2005-10-06 |
| Substrate processing apparatus and method including a device for applying a coating and a device for measuring the film quality of the coating Grant 6,913,781 - Kaneyama , et al. July 5, 2 | 2005-07-05 |
| Thermal processor Grant 6,736,206 - Hisai May 18, 2 | 2004-05-18 |
| Heat processing device App 20030192686 - Hisai, Akihiro ; et al. | 2003-10-16 |
| Substrate processing apparatus App 20030155077 - Hisai, Akihiro ; et al. | 2003-08-21 |
| Substrate processing apparatus and substrate processing method App 20020192358 - Kaneyama, Koji ; et al. | 2002-12-19 |
| Thermal processor App 20020139523 - Hisai, Akihiro | 2002-10-03 |
| Apparatus for and method of thermally processing substrate Grant 6,080,969 - Goto , et al. June 27, 2 | 2000-06-27 |
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