Hirschfeld; Botho
Patent Applications and Registrations
Patent applications and USPTO patent grants for Hirschfeld; Botho.The latest application filed is for "systems and methods for providing wafer access in a wafer processing system".
- Hirschfeld; Botho - Dresden DE
- - Dresden DE
| Patent | Date |
|---|---|
| Systems and methods for handling substrates at below dew point temperatures Grant 9,377,423 - Hirschfeld , et al. June 28, 2 | 2016-06-28 |
| Systems and methods for providing wafer access in a wafer processing system Grant 9,373,533 - Fehrmann , et al. June 21, 2 | 2016-06-21 |
| Modular prober and method for operating same Grant 9,194,885 - Kanev , et al. November 24, 2 | 2015-11-24 |
| Method and device for contacting a row of contact areas with probe tips Grant 9,110,131 - Dietrich , et al. August 18, 2 | 2015-08-18 |
| Method for measurement of a power device Grant 8,922,229 - Hirschfeld , et al. December 30, 2 | 2014-12-30 |
| Method for measurement of a power device Grant 08922229 - | 2014-12-30 |
| Systems And Methods For Handling Substrates At Below Dew Point Temperatures App 20140185649 - Hirschfeld; Botho ; et al. | 2014-07-03 |
| Systems And Methods For Providing Wafer Access In A Wafer Processing System App 20140186145 - Fehrmann; Frank ; et al. | 2014-07-03 |
| Modular Prober And Method For Operating Same App 20140145743 - Kanev; Stojan ; et al. | 2014-05-29 |
| Method And Device For Contacting A Row Of Contact Areas With Probe Tips App 20130027070 - Dietrich; Claus ; et al. | 2013-01-31 |
| Probe station for on-wafer-measurement under EMI-shielding Grant 8,344,744 - Schmidt , et al. January 1, 2 | 2013-01-01 |
| Method For Measurement Of A Power Device App 20120146676 - Hirschfeld; Botho ; et al. | 2012-06-14 |
| Probe Station For On-wafer-measurement Under Emi-shielding App 20110227602 - SCHMIDT; Axel ; et al. | 2011-09-22 |
| Device for testing thin elements Grant 7,282,930 - Beier , et al. October 16, 2 | 2007-10-16 |
| Device for testing thin elements App 20070139067 - Beier; Uwe ; et al. | 2007-06-21 |
| Tester for pressure sensors Grant 6,688,156 - Dietrich , et al. February 10, 2 | 2004-02-10 |
| Tester for pressure sensors App 20020152794 - Dietrich, Claus ; et al. | 2002-10-24 |
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