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Gallium nitride substrate Grant 10,837,124 - Kiyama , et al. November 17, 2 | 2020-11-17 |
Gallium Nitride Substrate App 20200032419 - KIYAMA; Makoto ;   et al. | 2020-01-30 |
Gallium nitride substrate Grant 10,458,043 - Kiyama , et al. Oc | 2019-10-29 |
Gallium nitride substrate Grant 10,443,151 - Kiyama , et al. Oc | 2019-10-15 |
Gallium Nitride Substrate App 20180237946 - KIYAMA; Makoto ;   et al. | 2018-08-23 |
Gallium nitride substrate Grant 10,006,147 - Kiyama , et al. June 26, 2 | 2018-06-26 |
Gallium Nitride Substrate App 20170137966 - KIYAMA; Makoto ;   et al. | 2017-05-18 |
Gallium Nitride Substrate App 20170101724 - KIYAMA; Makoto ;   et al. | 2017-04-13 |
Fabrication Method And Fabrication Apparatus Of Group Iii Nitride Crystal Substance App 20130244406 - KASAI; Hitoshi ;   et al. | 2013-09-19 |
Fabrication method and fabrication apparatus of group III nitride crystal substance Grant 8,404,569 - Kasai , et al. March 26, 2 | 2013-03-26 |
III-nitride crystal substrate and III-nitride semiconductor device Grant 8,310,030 - Hirota , et al. November 13, 2 | 2012-11-13 |
III-V compound crystal and semiconductor electronic circuit element Grant 8,304,334 - Nakahata , et al. November 6, 2 | 2012-11-06 |
Al.sub.xIn.sub.yGa.sub.l-x-yN mixture crystal substrate, method of growing same and method of producing same Grant 8,198,177 - Nakahata , et al. June 12, 2 | 2012-06-12 |
III-V Compound Crystal and Semiconductor Electronic Circuit Element App 20120142168 - Nakahata; Seiji ;   et al. | 2012-06-07 |
III-V compound crystal and semiconductor electronic circuit element Grant 8,134,223 - Nakahata , et al. March 13, 2 | 2012-03-13 |
AlxInyGa1-x-yN MIXTURE CRYSTAL SUBSTRATE, METHOD OF GROWING SAME AND METHOD OF PRODUCING SAME App 20120040511 - NAKAHATA; Seiji ;   et al. | 2012-02-16 |
Al.sub.xIn.sub.yGa.sub.1-x-yN mixture crystal substrate, method of growing same and method of producing same Grant 8,067,300 - Nakahata , et al. November 29, 2 | 2011-11-29 |
III-Nitride Crystal Substrate and III-Nitride Semiconductor Device App 20110260295 - Hirota; Ryu ;   et al. | 2011-10-27 |
Group III-nitride crystal, manufacturing method thereof, group III-nitride crystal substrate and semiconductor device Grant 8,038,794 - Sasaki , et al. October 18, 2 | 2011-10-18 |
Group III nitride crystal substrate, method of its manufacture, and group III nitride semiconductor device Grant 8,002,892 - Hirota , et al. August 23, 2 | 2011-08-23 |
III-nitride crystal manufacturing method, III-nitride crystal substrate, and III-nitride semiconductor device Grant 7,998,847 - Hirota , et al. August 16, 2 | 2011-08-16 |
Fabrication Method And Fabrication Apparatus Of Group Iii Nitride Crystal Substance App 20110065265 - KASAI; Hitoshi ;   et al. | 2011-03-17 |
Group III-nitride semiconductor crystal and manufacturing method thereof, and group III-nitride semiconductor device Grant 7,905,958 - Sasaki , et al. March 15, 2 | 2011-03-15 |
Group III nitride crystal and method of its growth Grant 7,892,513 - Fujiwara , et al. February 22, 2 | 2011-02-22 |
Fabrication method and fabrication apparatus of group III nitride crystal substance Grant 7,858,502 - Kasai , et al. December 28, 2 | 2010-12-28 |
Method for Growing Group III Nitride Crystal App 20100229786 - Uematsu; Koji ;   et al. | 2010-09-16 |
Method of growing GaN crystal, method of producing single crystal GaN substrate, and single crystal GaN substrate Grant 7,794,543 - Motoki , et al. September 14, 2 | 2010-09-14 |
Nitride semiconductor substrate and method of producing same Grant 7,772,585 - Uematsu , et al. August 10, 2 | 2010-08-10 |
Nitride semiconductor substrate and method of producing same Grant 7,771,532 - Uematsu , et al. August 10, 2 | 2010-08-10 |
Group Iii Nitride Crystal And Method Of Its Growth App 20100189624 - Fujiwara; Shinsuke ;   et al. | 2010-07-29 |
III-V Compound Crystal and Semiconductor Electronic Circuit Element App 20100090313 - Nakahata; Seiji ;   et al. | 2010-04-15 |
A1.sub.xIn.sub.yGa.sub.1-x-yN mixture crystal substrate, method of growing same and method of producing same Grant 7,655,960 - Nakahata , et al. February 2, 2 | 2010-02-02 |
Fabrication Method And Fabrication Apparatus Of Group Iii Nitride Crystal Substance App 20100009526 - KASAI; Hitoshi ;   et al. | 2010-01-14 |
III-Nitride Crystal Manufacturing Method, III-Nitride Crystal Substrate, and III-Nitride Semiconductor Device App 20090315150 - Hirota; Ryu ;   et al. | 2009-12-24 |
Fabrication method and fabrication apparatus of group III nitride crystal substance Grant 7,589,000 - Kasai , et al. September 15, 2 | 2009-09-15 |
AlxInyGa1-x-yN MIXTURE CRYSTAL SUBSTRATE, METHOD OF GROWING SAME AND METHOD OF PRODUCING SAME App 20090215248 - NAKAHATA; Seiji ;   et al. | 2009-08-27 |
Nitride Semiconductor Substrate And Method Of Producing Same App 20090155989 - UEMATSU; Koji ;   et al. | 2009-06-18 |
Single crystal GaN substrate, method of growing single crystal GaN and method of producing single crystal GaN substrate Grant 7,534,310 - Motoki , et al. May 19, 2 | 2009-05-19 |
AlxInyGa1-x-yN MIXTURE CRYSTAL SUBSTRATE, METHOD OF GROWING AlxInyGa1-x-yN MIXTURE CRYSTAL SUBSTRATE AND METHOD OF PRODUCING AlxInyGa1-x-yN MIXTURE CRYSTAL SUBSTRATE App 20090071394 - NAKAHATA; Seiji ;   et al. | 2009-03-19 |
Method for Producing GaxIn1-xN(0<x>) Crystal Gaxin1-xn(0<x<1) Crystalline Substrate, Method for Producing GaN Crystal, GaN Crystalline Substrate, and Product App 20090032907 - Uemura; Tomoki ;   et al. | 2009-02-05 |
Group III-V crystal Grant 7,485,484 - Nakahata , et al. February 3, 2 | 2009-02-03 |
Al.sub.xIn.sub.yGa.sub.1-x-yN mixture crystal substrate, method of growing Al.sub.xIn.sub.yGa.sub.1-x-yN mixture crystal substrate and method of producing Al.sub.xIn.sub.yGa.sub.1-x-yN mixture crystal substrate Grant 7,473,315 - Nakahata , et al. January 6, 2 | 2009-01-06 |
Group III-V Crystal App 20080299748 - Nakahata; Seiji ;   et al. | 2008-12-04 |
Group III-Nitride Semiconductor Crystal and Manufacturing Method Thereof, and Group III-Nitride Semiconductor Device App 20080283968 - Sasaki; Takatomo ;   et al. | 2008-11-20 |
Method of growing GaN crystal, method of producing single crystal GaN substrate, and single crystal GaN substrate App 20080202409 - Motoki; Kensaku ;   et al. | 2008-08-28 |
Method of growing GaN crystal, method of producing single crystal GaN substrate, and single crystal GaN substrate Grant 7,354,477 - Motoki , et al. April 8, 2 | 2008-04-08 |
Group III-V Crystal App 20080038580 - Nakahata; Seiji ;   et al. | 2008-02-14 |
Group III-Nitride Crystal, Manufacturing Method Thereof, Group III-Nitride Crystal Substrate and Semiconductor Device App 20080022921 - Sasaki; Takatomo ;   et al. | 2008-01-31 |
Method of growing gallium nitride crystal App 20080006201 - Hirota; Ryu ;   et al. | 2008-01-10 |
Group III-Nitride Crystal Substrate and Manufacturing Method Thereof, and Group III-Nitride Semiconductor Device App 20070296061 - Sasaki; Takatomo ;   et al. | 2007-12-27 |
Method of growing gallium nitride crystal and gallium nitride substrate App 20070280872 - Okahisa; Takuji ;   et al. | 2007-12-06 |
Method of growing GaN crystal, method of producing single crystal GaN substrate, and single crystal GaN substrate Grant 7,303,630 - Motoki , et al. December 4, 2 | 2007-12-04 |
Group III-V crystal and manufacturing method thereof Grant 7,297,625 - Nakahata , et al. November 20, 2 | 2007-11-20 |
Method of manufacturing group-III nitride crystal Grant 7,288,151 - Sasaki , et al. October 30, 2 | 2007-10-30 |
Fabrication method and fabrication apparatus of group III nitride crystal substance App 20070148920 - Kasai; Hitoshi ;   et al. | 2007-06-28 |
A1xInyGa1-x-yN mixture crystal substrate, method of growing same and method of producing same App 20060273343 - Nakahata; Seiji ;   et al. | 2006-12-07 |
Nitride semiconductor substrate and method of producing same App 20060272572 - Uematsu; Koji ;   et al. | 2006-12-07 |
Semiconductor light-emitting device Grant 7,129,525 - Uematsu , et al. October 31, 2 | 2006-10-31 |
Single crystal GaN substrate, method of growing single crystal GaN and method of producing single crystal GaN substrate App 20060213429 - Motoki; Kensaku ;   et al. | 2006-09-28 |
Single crystal GaN substrate semiconductor device Grant 7,112,826 - Motoki , et al. September 26, 2 | 2006-09-26 |
Al.sub.xIn.sub.yGa.sub.1-x-yN mixture crystal substrate Grant 7,105,865 - Nakahata , et al. September 12, 2 | 2006-09-12 |
Single crystal GaN substrate, method of growing single crystal GaN and method of producing single crystal GaN substrate Grant 7,087,114 - Motoki , et al. August 8, 2 | 2006-08-08 |
Mehtod for processing nitride semiconductor crystal surface and nitride semiconductor crystal obtained by such method App 20060012011 - Nakahata; Seiji ;   et al. | 2006-01-19 |
Semiconductor Light-Emitting Device App 20050242357 - Uematsu, Koji ;   et al. | 2005-11-03 |
Group III-V Crystal and Manufacturing method thereof App 20050227472 - Nakahata, Seiji ;   et al. | 2005-10-13 |
AlxInyGa1-x-yN mixture crystal substrate, method of growing AlxInyGa1-x-yN mixture crystal substrate and method of producing AlxInyGa1-x-yN mixture crystal substrate App 20050183658 - Nakahata, Seiji ;   et al. | 2005-08-25 |
AlxInyGa1-x-yN mixture crystal substrate, method of growing same and method of producing same App 20050161697 - Nakahata, Seiji ;   et al. | 2005-07-28 |
Group III Nitride Crystal Substrate, Method of Its Manufacture, and Group-III Nitride Semiconductor Device App 20050164419 - Hirota, Ryu ;   et al. | 2005-07-28 |
Method of manufacturing group-III nitride crystal App 20050153471 - Sasaki, Takatomo ;   et al. | 2005-07-14 |
Group III Nitride Crystal, Method of Its Manufacture, and Equipment for Manufacturing Group III Nitride Crystal App 20050098090 - Hirota, Ryu ;   et al. | 2005-05-12 |
Method of growing GaN crystal, method of producing single crystal GaN substrate, and single crystal GaN substrate App 20050092234 - Motoki, Kensaku ;   et al. | 2005-05-05 |
Method of growing GaN crystal, method of producing single crystal GaN substrate, and single crystal GaN substrate App 20050076830 - Motoki, Kensaku ;   et al. | 2005-04-14 |
Single crystal GaN substrate, method of growing same and method of producing same App 20040089919 - Motoki, Kensaku ;   et al. | 2004-05-13 |
Single crystal GaN substrate, method of growing same and method of producing same Grant 6,667,184 - Motoki , et al. December 23, 2 | 2003-12-23 |
Single crystal GaN substrate, method of growing single crystal GaN and method of producing single crystal GaN substrate App 20030145783 - Motoki, Kensaku ;   et al. | 2003-08-07 |
Single crystal GaN substrate, method of growing same and method of producing same App 20030080345 - Motoki, Kensaku ;   et al. | 2003-05-01 |