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Patent applications and USPTO patent grants for Hirota; Kousa.The latest application filed is for "plasma processing apparatus".
Patent | Date |
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Plasma processing apparatus and plasma processing method Grant 10,020,233 - Nakamoto , et al. July 10, 2 | 2018-07-10 |
Plasma processing apparatus and plasma processing method Grant 9,190,336 - Fukuchi , et al. November 17, 2 | 2015-11-17 |
Plasma Processing Apparatus App 20150041060 - Hirota; Kousa ;   et al. | 2015-02-12 |
Plasma Processing Apparatus And Plasma Processing Method App 20150024521 - Fukuchi; Kousuke ;   et al. | 2015-01-22 |
Plasma Processing Apparatus And Plasma Processing Method App 20140295583 - NAKAMOTO; Shigeru ;   et al. | 2014-10-02 |
Plasma processing method and plasma processing apparatus Grant 8,500,912 - Hirota August 6, 2 | 2013-08-06 |
Plasma Processing Apparatus And Plasma Processing Method App 20120252200 - Sumiya; Masahiro ;   et al. | 2012-10-04 |
Plasma processing apparatus and plasma processing method Grant 8,236,701 - Sumiya , et al. August 7, 2 | 2012-08-07 |
Plasma Processing Method And Plasma Processing Apparatus App 20120085366 - HIROTA; Kousa | 2012-04-12 |
Method for etching a sample Grant 8,114,244 - Hirota , et al. February 14, 2 | 2012-02-14 |
Plasma Processing Apparatus And Plasma Processing Method App 20100197137 - SUMIYA; Masahiro ;   et al. | 2010-08-05 |
Method For Seasoning Plasma Processing Apparatus, And Method For Determining End Point Of Seasoning App 20100178415 - NISHIMORI; Yasuhiro ;   et al. | 2010-07-15 |
Method For Etching A Sample App 20100159704 - HIROTA; Kousa ;   et al. | 2010-06-24 |
Semiconductor Fabrication Method and Etching System App 20070232067 - Hirota; Kousa ;   et al. | 2007-10-04 |
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