Patent | Date |
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Substrate Processing Device And Etching Liquid App 20220213382 - Hiroshiro; Koukichi ;   et al. | 2022-07-07 |
Substrate processing method, substrate processing device and etching liquid Grant 11,306,249 - Hiroshiro , et al. April 19, 2 | 2022-04-19 |
Substrate Processing Apparatus And Method Of Processing Substrate App 20210391539 - HIROSHIRO; Koukichi ;   et al. | 2021-12-16 |
Substrate processing method and substrate processing apparatus Grant 11,049,723 - Hiroshiro , et al. June 29, 2 | 2021-06-29 |
Substrate Processing Method, Substrate Processing Device And Etching Liquid App 20210032537 - Hiroshiro; Koukichi ;   et al. | 2021-02-04 |
Substrate Processing Method And Substrate Processing Apparatus App 20200219730 - Hiroshiro; Koukichi ;   et al. | 2020-07-09 |
Chemical-liquid mixing method and chemical-liquid mixing apparatus Grant 9,415,356 - Tanaka , et al. August 16, 2 | 2016-08-16 |
Chemical-liquid Mixing Method And Chemical-liquid Mixing Apparatus App 20160228832 - TANAKA; Hiroshi ;   et al. | 2016-08-11 |
Chemical-liquid mixing method and chemical-liquid mixing apparatus Grant 9,339,775 - Tanaka , et al. May 17, 2 | 2016-05-17 |
Chemical-liquid Mixing Method And Chemical-liquid Mixing Apparatus App 20150290599 - TANAKA; Hiroshi ;   et al. | 2015-10-15 |
Chemical-liquid mixing method and chemical-liquid mixing apparatus Grant 9,099,502 - Tanaka , et al. August 4, 2 | 2015-08-04 |
Fluid heater, manufacturing method thereof, substrate processing apparatus including fluid heater, and substrate processing method Grant 8,701,308 - Hiroshiro , et al. April 22, 2 | 2014-04-22 |
Template treatment method, program, computer storage medium, template treatment apparatus and imprint system Grant 8,522,712 - Hiroshiro , et al. September 3, 2 | 2013-09-03 |
Imprint method, computer storage medium and imprint apparatus Grant 8,468,943 - Hiroshiro , et al. June 25, 2 | 2013-06-25 |
Substrate processing method and non-transitory storage medium for carrying out such method Grant 8,303,724 - Hiroshiro , et al. November 6, 2 | 2012-11-06 |
Imprint Method, Computer Storage Medium And Imprint Apparatus App 20120152136 - Hiroshiro; Koukichi ;   et al. | 2012-06-21 |
Substrate cleaning method, substrate cleaning system and program storage medium Grant 8,152,928 - Watanabe , et al. April 10, 2 | 2012-04-10 |
Substrate Processing Method And Non-transitory Storage Medium For Carrying Out Such Method App 20110290280 - HIROSHIRO; Koukichi ;   et al. | 2011-12-01 |
Substrate processing apparatus including a drying mechanism using a fluid mixture of purified water and a volatile organic solvent Grant 8,015,984 - Hiroshiro , et al. September 13, 2 | 2011-09-13 |
Substrate processing apparatus Grant 7,998,306 - Hiroshiro , et al. August 16, 2 | 2011-08-16 |
Template Treatment Method, Program, Computer Storage Medium, Template Treatment Apparatus And Imprint System App 20110117291 - HIROSHIRO; Koukichi ;   et al. | 2011-05-19 |
Fluid Heater, Manufacturing Method Thereof, Substrate Processing Apparatus Including Fluid Heater, And Substrate Processing Method App 20110099838 - Hiroshiro; Koukichi ;   et al. | 2011-05-05 |
Substrate Processing Method, Substrate Processing Apparatus, Program, Storage Medium, And Substitute Agent App 20100206337 - Hiroshiro; Koukichi ;   et al. | 2010-08-19 |
Substrate processing apparatus App 20090139656 - Hiroshiro; Koukichi ;   et al. | 2009-06-04 |
Substrate Processing Apparatus and Substrate Processing Method App 20090101186 - Hiroshiro; Koukichi ;   et al. | 2009-04-23 |
Substrate cleaning apparatus, substrate cleaning method, and storage medium App 20080178910 - Hiroshiro; Koukichi ;   et al. | 2008-07-31 |
Chemical-liquid mixing method and chemical-liquid mixing apparatus App 20080031083 - Tanaka; Hiroshi ;   et al. | 2008-02-07 |
Substrate cleaning method, substrate cleaning system and program storage medium App 20070267040 - Watanabe; Tsukasa ;   et al. | 2007-11-22 |