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Cantilever, Scanning Probe Microscope, And Measurement Method Using Scanning Probe Microscope App 20220260611 - ZHANG; Kaifeng ;   et al. | 2022-08-18 |
Pattern height measurement device and charged particle beam device Grant 10,393,509 - Kawada , et al. A | 2019-08-27 |
Pattern Height Measurement Device and Charged Particle Beam Device App 20170211929 - KAWADA; Hiroki ;   et al. | 2017-07-27 |
Inspection method and its apparatus for thermal assist type magnetic head element Grant 9,304,145 - Zhang , et al. April 5, 2 | 2016-04-05 |
Inspection Method And Its Apparatus For Thermal Assist Type Magnetic Head Element App 20160033548 - ZHANG; Kaifeng ;   et al. | 2016-02-04 |
Thermally assisted magnetic recording head inspection method and apparatus Grant 8,787,134 - Zhang , et al. July 22, 2 | 2014-07-22 |
Cantilever of scanning probe microscope and method for manufacturing the same, method for inspecting thermal assist type magnetic head device and its apparatus Grant 8,713,710 - Zhang , et al. April 29, 2 | 2014-04-29 |
Method And Apparatus For Inspecting Thermal Assist Type Magnetic Head App 20140096293 - KITANO; Yoshinori ;   et al. | 2014-04-03 |
Method And Apparatus For Inspecting Thermal Assist Type Magnetic Head App 20140092717 - TOKUTOMI; Teruaki ;   et al. | 2014-04-03 |
Method for defect determination in fine concave-convex pattern and method for defect determination on patterned medium Grant 8,638,430 - Sasazawa , et al. January 28, 2 | 2014-01-28 |
Cantilever for magnetic force microscope and method of manufacturing the same Grant 8,621,659 - Zhang , et al. December 31, 2 | 2013-12-31 |
Thermally Assisted Magnetic Recording Head Inspection Method And Apparatus App 20130265863 - Zhang; Kaifeng ;   et al. | 2013-10-10 |
Thermally assisted magnetic recording head inspection method and apparatus Grant 8,483,035 - Zhang , et al. July 9, 2 | 2013-07-09 |
Cantilever of Scanning Probe Microscope and Method for Manufacturing the Same, Method for Inspecting Thermal Assist Type Magnetic Head Device and its Apparatus App 20130097739 - Zhang; Kaifeng ;   et al. | 2013-04-18 |
Scatterometry method and device for inspecting patterned medium Grant 8,411,928 - Sasazawa , et al. April 2, 2 | 2013-04-02 |
Thermally Assisted Magnetic Recording Head Inspection Method and Apparatus App 20120307605 - Zhang; Kaifeng ;   et al. | 2012-12-06 |
Cantilever For Magnetic Force Microscope And Method Of Manufacturing The Same App 20120291161 - ZHANG; Kaifeng ;   et al. | 2012-11-15 |
Pattern Inspection Method And Device For Same App 20120287426 - Sasazawa; Hideaki ;   et al. | 2012-11-15 |
Spectral detection method and device, and defect inspection method and apparatus using the same Grant 8,279,431 - Hirose , et al. October 2, 2 | 2012-10-02 |
Pattern shape inspection method and apparatus thereof Grant 8,260,029 - Saito , et al. September 4, 2 | 2012-09-04 |
Magnetic recording disk having aligning pattern and method for aligning thereof Grant 8,259,414 - Hirose , et al. September 4, 2 | 2012-09-04 |
Method and apparatus for inspecting defects of patterns formed on a hard disk medium Grant 8,148,705 - Hirose , et al. April 3, 2 | 2012-04-03 |
SPM Probe and Inspection Device for Light Emission Unit App 20120054924 - ZHANG; Kaifeng ;   et al. | 2012-03-01 |
Method and apparatus for inspecting a pattern shape Grant 8,040,772 - Saito , et al. October 18, 2 | 2011-10-18 |
Method and device for detecting shape of surface of medium Grant 7,969,567 - Yoshida , et al. June 28, 2 | 2011-06-28 |
Method For Defect Determination In Fine Concave-convex Pattern And Method For Defect Determination On Patterned Medium App 20110001962 - Sasazawa; Hideaki ;   et al. | 2011-01-06 |
Spectral Detection Method And Device, And Defect Inspection Method And Apparatus Using The Same App 20100182589 - HIROSE; Takenori ;   et al. | 2010-07-22 |
Pattern Shape Inspection Method And Apparatus Thereof App 20100124370 - SAITO; Keiya ;   et al. | 2010-05-20 |
Method And Device For Inspecting Patterned Medium App 20100098320 - SASAZAWA; Hideaki ;   et al. | 2010-04-22 |
Method And Device For Detecting Shape Of Surface Of Medium App 20100085855 - YOSHIDA; Minoru ;   et al. | 2010-04-08 |
Method And Apparatus For Inspecting A Pattern Shape App 20090262621 - SAITO; Keiya ;   et al. | 2009-10-22 |
Method and apparatus for inspecting defects of patterns formed on a hard disk medium App 20090161244 - Hirose; Takenori ;   et al. | 2009-06-25 |
Hard disk media having alignment pattern and alignment method App 20080298222 - Hirose; Takenori ;   et al. | 2008-12-04 |
Method and apparatus for measuring depth of holes formed on a specimen Grant 7,243,441 - Watanabe , et al. July 17, 2 | 2007-07-17 |
Method and apparatus for measuring thickness of thin film and device manufacturing method using same Grant 7,119,908 - Nomoto , et al. October 10, 2 | 2006-10-10 |
Method and apparatus for measuring thickness of thin film and device manufacturing method using same Grant 7,057,744 - Nomoto , et al. June 6, 2 | 2006-06-06 |
Polishing pad surface condition evaluation method and an apparatus thereof and a method of producing a semiconductor device Grant 7,020,306 - Hirose , et al. March 28, 2 | 2006-03-28 |
Method and apparatus for managing surface image of thin film device, and method and apparatus for manufacturing thin film device using the same Grant 6,987,874 - Hirose , et al. January 17, 2 | 2006-01-17 |
Method and apparatus for measuring depth of holes formed on a specimen App 20050183282 - Watanabe, Masahiro ;   et al. | 2005-08-25 |
Method and apparatus for measuring thickness of thin film and device manufacturing method using same App 20050117164 - Nomoto, Mineo ;   et al. | 2005-06-02 |
Method of detecting and measuring endpoint of polishing processing and its apparatus and method of manufacturing semiconductor device using the same Grant 6,897,079 - Hirose , et al. May 24, 2 | 2005-05-24 |
Thin film thickness measuring method and apparatus, and method and apparatus for manufacturing a thin film device using the same Grant 6,806,970 - Hirose , et al. October 19, 2 | 2004-10-19 |
Method of polishing a film Grant 6,794,206 - Hirose , et al. September 21, 2 | 2004-09-21 |
Thin film thickness measuring method and apparatus, and method and apparatus for manufacturing a thin film device using the same Grant 6,753,972 - Hirose , et al. June 22, 2 | 2004-06-22 |
Thin film thickness measuring method and apparatus, and mehtod and apparatus for manufacturing a thin film device using the same App 20040070773 - Hirose, Takenori ;   et al. | 2004-04-15 |
Method and apparatus for managing surface image of thin film device, and method and apparatus for manufacturing thin film device using the same App 20030059105 - Hirose, Takenori ;   et al. | 2003-03-27 |
Method and apparatus for measuring thickness of thin film and device manufacturing method using same App 20030022400 - Nomoto, Mineo ;   et al. | 2003-01-30 |
Method of polishing a film App 20020197871 - Hirose, Takenori ;   et al. | 2002-12-26 |
Film thickness measuring method and apparatus, and thin film device manufacturing method and manufacturing apparatus using same App 20020163649 - Hirose, Takenori ;   et al. | 2002-11-07 |
Method of detecting and measuring endpoint of polishing processing and its apparatus and method of manufacturing semiconductor device using the same App 20020127950 - Hirose, Takenori ;   et al. | 2002-09-12 |
Polishing pad surface condition evaluation method and an apparatus thereof and a method of producing a semiconductor device App 20010015801 - Hirose, Takenori ;   et al. | 2001-08-23 |