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Patent applications and USPTO patent grants for HIROSE; Katsuhito.The latest application filed is for "substrate processing apparatus, substrate processing system, and abnormality detection method".
Patent | Date |
---|---|
Substrate Processing Apparatus, Substrate Processing System, And Abnormality Detection Method App 20220251705 - HIKAWA; Kazushi ;   et al. | 2022-08-11 |
Processing apparatus and processing method Grant 11,276,592 - Hirose , et al. March 15, 2 | 2022-03-15 |
Film forming apparatus, cleaning method for film forming apparatus and recording medium Grant 11,081,322 - Noro , et al. August 3, 2 | 2021-08-03 |
Deposition device and deposition method Grant 10,815,567 - Hirose , et al. October 27, 2 | 2020-10-27 |
Processing Apparatus And Processing Method App 20200328100 - HIROSE; Katsuhito ;   et al. | 2020-10-15 |
Abnormality Detection System And Control Board App 20200299841 - Hirose; Katsuhito ;   et al. | 2020-09-24 |
Film Forming Apparatus, Cleaning Method For Film Forming Apparatus And Recording Medium App 20180108518 - Noro; Naotaka ;   et al. | 2018-04-19 |
Deposition Device And Deposition Method App 20170314130 - HIROSE; Katsuhito ;   et al. | 2017-11-02 |
Processing apparatus Grant 9,725,804 - Hirose , et al. August 8, 2 | 2017-08-08 |
Processing apparatus and process status checking method Grant 9,708,711 - Hirose , et al. July 18, 2 | 2017-07-18 |
Processing Apparatus App 20160047039 - HIROSE; Katsuhito ;   et al. | 2016-02-18 |
Processing apparatus and valve operation checking method Grant 8,834,631 - Hirose , et al. September 16, 2 | 2014-09-16 |
Processing Apparatus And Process Status Checking Method App 20130186332 - HIROSE; Katsuhito ;   et al. | 2013-07-25 |
Substrate Transfer Device And Substrate Processing System App 20130180448 - Sakaue; Hiromitsu ;   et al. | 2013-07-18 |
Processing Apparatus And Valve Operation Checking Method App 20130183443 - HIROSE; Katsuhito ;   et al. | 2013-07-18 |
Processing Apparatus, Processing Method, Method Of Recognizing Target Object And Storage Medium App 20100080444 - Yamaguchi; Hirofumi ;   et al. | 2010-04-01 |
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