Patent | Date |
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Polishing Method, Polishing Monitoring Method And Polishing Monitoring Apparatus For Workpiece App 20220176513 - Watanabe; Yuki ;   et al. | 2022-06-09 |
Substrate Processing Apparatus And Method For Controlling Dressing Of Polishing Member App 20220048160 - Hiroo; Yasumasa ;   et al. | 2022-02-17 |
Substrate polishing apparatus and method Grant 10,828,747 - Hiroo , et al. November 10, 2 | 2020-11-10 |
Polishing Apparatus And Polishing Member Dressing Method App 20200198094 - Yagi; Keita ;   et al. | 2020-06-25 |
Substrate Polishing Apparatus And Method App 20190009385 - HIROO; Yasumasa ;   et al. | 2019-01-10 |
Polishing apparatus and polishing method Grant 9,440,327 - Hiroo , et al. September 13, 2 | 2016-09-13 |
Method of correcting film thickness measurement value, film thickness corrector and eddy current sensor Grant 9,437,507 - Nakamura , et al. September 6, 2 | 2016-09-06 |
Method Of Correcting Film Thickness Measurement Value, Film Thickness Corrector And Eddy Current Sensor App 20150262893 - NAKAMURA; Akira ;   et al. | 2015-09-17 |
Polishing Apparatus And Polishing Method App 20130344773 - Hiroo; Yasumasa ;   et al. | 2013-12-26 |
Polishing method, polishing apparatus and method of monitoring a substrate Grant 8,398,456 - Kobayashi , et al. March 19, 2 | 2013-03-19 |
Polishing apparatus and polishing method Grant 8,246,417 - Kobayashi , et al. August 21, 2 | 2012-08-21 |
Polishing apparatus and polishing method Grant 8,112,169 - Kobayashi , et al. February 7, 2 | 2012-02-07 |
Polishing monitoring method and polishing apparatus Grant 8,078,419 - Kobayashi , et al. December 13, 2 | 2011-12-13 |
Polishing Apparatus And Polishing Method App 20100330878 - KOBAYASHI; Yoichi ;   et al. | 2010-12-30 |
Polishing Method, Polishing Apparatus And Method Of Monitoring A Substrate App 20100273396 - KOBAYASHI; Yoichi ;   et al. | 2010-10-28 |
Polishing apparatus and polishing method Grant 7,822,500 - Kobayashi , et al. October 26, 2 | 2010-10-26 |
Polishing apparatus and polishing method App 20100029177 - Kobayashi; Yoichi ;   et al. | 2010-02-04 |
Polishing monitoring method and polishing apparatus App 20090104847 - Kobayashi; Yoichi ;   et al. | 2009-04-23 |
Substrate transfer controlling apparatus and substrate transferring method Grant 7,313,452 - Kobayashi , et al. December 25, 2 | 2007-12-25 |
Polishing Apparatus And Polishing Method App 20070243795 - Kobayashi; Yoichi ;   et al. | 2007-10-18 |
Substrate transfer controlling apparatus and substrate transferring method App 20060161286 - Kobayashi; Yoichi ;   et al. | 2006-07-20 |
Substrate transfer controlling apparatus and substrate transferring method Grant 7,072,730 - Kobayashi , et al. July 4, 2 | 2006-07-04 |
Substrate transfer controlling apparatus and substrate transferring method App 20040249494 - Kobayashi, Yoichi ;   et al. | 2004-12-09 |
Wafer transfer control apparatus and method for transferring wafer Grant 6,772,029 - Kobayashi , et al. August 3, 2 | 2004-08-03 |
Wafer transfer control apparatus and method for transferring wafer App 20020192055 - Kobayachi, Yoichi ;   et al. | 2002-12-19 |