HIROI; Takashi

Patent Applications and Registrations

Patent applications and USPTO patent grants for HIROI; Takashi.The latest application filed is for "defect inspection method and defect inspection device".

Company Profile

1.78.78

HIROI; Takashi - Tokyo JP
Hiroi; Takashi - Yokohama JP
Hiroi; Takashi - Yokohama-shi JP
Hiroi; Takashi - Yokahama JP
Hiroi; Takashi - Kanagawa JP

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Defect Inspection Method and Defect Inspection Device App 20220301136 - HIROI; Takashi ; et al.	2022-09-22
Defect Inspection Apparatus and Defect Inspection Program App 20220084856 - HIROI; Takashi ; et al.	2022-03-17
Defect Inspection Device and Defect Inspection Method App 20210381989 - HIROI; Takashi ; et al.	2021-12-09
Inspection information generation device, inspection information generation method, and defect inspection device Grant 11,041,815 - Urano , et al. June 22, 2	2021-06-22
Inspection Information Generation Device, Inspection Information Generation Method, And Defect Inspection Device App 20190154593 - URANO; Takahiro ; et al.	2019-05-23
Pattern inspecting and measuring device and program Grant 9,858,659 - Minakawa , et al. January 2, 2	2018-01-02
Pattern inspection device and pattern inspection method Grant 9,188,554 - Shishido , et al. November 17, 2	2015-11-17
Pattern Inspecting and Measuring Device and Program App 20150228063 - Minakawa; Tsuyoshi ; et al.	2015-08-13
Pattern Inspection Device And Pattern Inspection Method App 20150212019 - Shishido; Chie ; et al.	2015-07-30
Defect inspection method and defect inspection apparatus Grant 8,953,868 - Murakami , et al. February 10, 2	2015-02-10
Defect inspection method, and device thereof Grant 8,853,628 - Hosoya , et al. October 7, 2	2014-10-07
Circuit-pattern inspection device Grant 8,658,987 - Yamamoto , et al. February 25, 2	2014-02-25
Defect Inspection Method And Defect Inspection Apparatus App 20130322737 - MURAKAMI; Shinya ; et al.	2013-12-05
Circuit Pattern Inspecting Device And Inspecting Method Thereof App 20130271595 - Hiroi; Takashi ; et al.	2013-10-17
Defect Inspecting Apparatus App 20130248709 - Yamamoto; Takuma ; et al.	2013-09-26
Circuit pattern examining apparatus and circuit pattern examining method Grant 8,509,516 - Hiroi , et al. August 13, 2	2013-08-13
Defect Inspection Method, And Device Thereof App 20130119250 - Hosoya; Naoki ; et al.	2013-05-16
Charged particle beam device for scanning a sample using a charged particle beam to inspect the sample Grant 8,421,010 - Hiroi , et al. April 16, 2	2013-04-16
Circuit Pattern Inspection Apparatus And Circuit Pattern Inspection Method App 20130082177 - Hiroi; Takashi ; et al.	2013-04-04
Image Generating Method And Device Using Scanning Charged Particle Microscope, Sample Observation Method, And Observing Device App 20130010100 - Kotaki; Go ; et al.	2013-01-10
Circuit-Pattern Inspection Device App 20120305768 - Yamamoto; Takuma ; et al.	2012-12-06
Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus Grant 8,212,227 - Watanabe , et al. July 3, 2	2012-07-03
Defect Inspection Device And Defect Inspection Method App 20120045115 - Dong; Shuangqi ; et al.	2012-02-23
Inspection apparatus and an inspection method for inspecting a circuit pattern Grant 8,121,395 - Hiroi , et al. February 21, 2	2012-02-21
Method and apparatus for inspecting defects of circuit patterns Grant 8,111,902 - Hiroi , et al. February 7, 2	2012-02-07
Pattern Inspecting Apparatus And Pattern Inspecting Method App 20110298915 - Hiroi; Takashi ; et al.	2011-12-08
Method And Device For Defect Inspection App 20110188735 - Hosoya; Naoki ; et al.	2011-08-04
Charged Particle Beam Device App 20110163230 - Hiroi; Takashi ; et al.	2011-07-07
Pattern inspection method and apparatus Grant 7,957,579 - Hiroi , et al. June 7, 2	2011-06-07
Circuit Pattern Examining Apparatus And Circuit Pattern Examining Method App 20110129141 - Hiroi; Takashi ; et al.	2011-06-02
Method and apparatus for inspecting integrated circuit pattern Grant 7,952,074 - Shinada , et al. May 31, 2	2011-05-31
Pattern inspection method and apparatus Grant 7,894,658 - Hiroi , et al. February 22, 2	2011-02-22
Image processing unit for wafer inspection tool Grant 7,889,911 - Nakano , et al. February 15, 2	2011-02-15
Pattern Inspection Method And Apparatus App 20100246933 - Hiroi; Takashi ; et al.	2010-09-30
Electron Beam Exposure Or System Inspection Or Measurement Apparatus And Its Method And Height Detection Apparatus App 20100193686 - Watanabe; Masahiro ; et al.	2010-08-05
Semiconductor wafer inspection tool and semiconductor wafer inspection method Grant 7,728,294 - Hiroi , et al. June 1, 2	2010-06-01
Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus Grant 7,692,144 - Watanabe , et al. April 6, 2	2010-04-06
Apparatus For Inspecting A Substrate, A Method Of Inspecting A Substrate, A Scanning Electron Microscope, And A Method Of Producing An Image Using A Scanning Electron Microscope App 20090309022 - GUNJI; Yasuhiro ; et al.	2009-12-17
Method of classifying defects using multiple inspection machines Grant 7,602,962 - Miyamoto , et al. October 13, 2	2009-10-13
Inspection Apparatus And An Inspection Method For Inspecting A Circuit Pattern App 20090226075 - Hiroi; Takashi ; et al.	2009-09-10
Circuit-pattern inspection apparatus Grant 7,532,328 - Nara , et al. May 12, 2	2009-05-12
Method and apparatus for inspecting pattern defects and mirror electron projection type or multi-beam scanning type electron beam apparatus Grant 7,521,676 - Okuda , et al. April 21, 2	2009-04-21
Method And Apparatus For Inspecting Integrated Circuit Pattern App 20080302964 - Shinada; Hiroyuki ; et al.	2008-12-11
Pattern inspection method and apparatus Grant 7,457,453 - Hiroi , et al. November 25, 2	2008-11-25
Image Processing Unit For Wafer Inspection Tool App 20080285841 - NAKANO; Michio ; et al.	2008-11-20
Pattern inspection method and apparatus using electron beam Grant 7,439,504 - Hiroi , et al. October 21, 2	2008-10-21
Apparatus and method for electron beam inspection with projection electron microscopy Grant 7,420,167 - Okuda , et al. September 2, 2	2008-09-02
Image processing unit for wafer inspection tool Grant 7,421,110 - Nakano , et al. September 2, 2	2008-09-02
Method and apparatus for inspecting integrated circuit pattern Grant 7,417,444 - Shinada , et al. August 26, 2	2008-08-26
Circuit-pattern inspection apparatus App 20080174772 - Nara; Yasuhiko ; et al.	2008-07-24
Inspection apparatus and an inspection method App 20080099675 - Hiroi; Takashi ; et al.	2008-05-01
Electron Beam Exposure or System Inspection Or Measurement Apparatus And Its Method And Height Detection Apparatus App 20080078933 - WATANABE; Masahiro ; et al.	2008-04-03
Semiconductor wafer inspection tool and semiconductor wafer inspection method App 20080067381 - Hiroi; Takashi ; et al.	2008-03-20
Pattern Inspection Method And Apparatus App 20080063257 - HIROI; Takashi ; et al.	2008-03-13
Pattern Inspection Method And Apparatus App 20080056559 - Hiroi; Takashi ; et al.	2008-03-06
Electron beam apparatus and method with surface height calculator and a dual projection optical unit Grant 7,329,889 - Watanabe , et al. February 12, 2	2008-02-12
Method And Its Apparatus For Inspecting A Pattern App 20080002876 - Hiroi; Takashi ; et al.	2008-01-03
Pattern Inspection Method And Apparatus App 20070269101 - HIROI; Takashi ; et al.	2007-11-22
Circuit-pattern inspection apparatus Grant 7,292,327 - Nara , et al. November 6, 2	2007-11-06
Method and its apparatus for inspecting a pattern Grant 7,269,280 - Hiroi , et al. September 11, 2	2007-09-11
Pattern inspection method and apparatus Grant 7,266,235 - Hiroi , et al. September 4, 2	2007-09-04
Pattern inspecting method and apparatus thereof, and pattern inspecting method on basis of electron beam images and apparatus thereof Grant 7,263,216 - Shishido , et al. August 28, 2	2007-08-28
Method and apparatus for inspecting pattern defects and mirror electron projection Type or multi-beam scanning type electron beam apparatus App 20070194229 - Okuda; Hirohito ; et al.	2007-08-23
Method and system for inspecting a pattern Grant 7,260,256 - Hiroi , et al. August 21, 2	2007-08-21
Pattern inspection method and system therefor App 20070131877 - Hiroi; Takashi ; et al.	2007-06-14
Method and apparatus for inspecting defects of circuit patterns App 20070047800 - Hiroi; Takashi ; et al.	2007-03-01
Pattern inspection method and apparatus Grant 7,133,550 - Hiroi , et al. November 7, 2	2006-11-07
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same Grant 7,122,796 - Hiroi , et al. October 17, 2	2006-10-17
Method of inspecting a pattern and an apparatus thereof and a method of processing a specimen Grant 7,116,816 - Tanaka , et al. October 3, 2	2006-10-03
Apparatus for inspecting a specimen Grant 7,049,587 - Hiroi , et al. May 23, 2	2006-05-23
Method and apparatus for inspection App 20060078189 - Hosoya; Naoki ; et al.	2006-04-13
Method and apparatus for inspecting integrated circuit pattern Grant 7,026,830 - Shinada , et al. April 11, 2	2006-04-11
Method and apparatus for inspecting integrated circuit pattern App 20060043982 - Shinada; Hiroyuki ; et al.	2006-03-02
Circuit pattern inspection method and apparatus Grant 6,975,754 - Hiroi , et al. December 13, 2	2005-12-13
Pattern inspection method and apparatus using electron beam App 20050263703 - Hiroi, Takashi ; et al.	2005-12-01
Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus App 20050242286 - Watanabe, Masahiro ; et al.	2005-11-03
Pattern inspection method and apparatus using electron beam Grant 6,940,069 - Hiroi , et al. September 6, 2	2005-09-06
Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus Grant 6,919,577 - Watanabe , et al. July 19, 2	2005-07-19
Inspection method, apparatus and system for circuit pattern Grant 6,919,564 - Nara , et al. July 19, 2	2005-07-19
Inspection method, apparatus and system for circuit pattern Grant 6,903,821 - Nara , et al. June 7, 2	2005-06-07
Circuit pattern inspection method and apparatus Grant 6,898,305 - Hiroi , et al. May 24, 2	2005-05-24
Convergent charged particle beam apparatus and inspection method using same Grant 6,885,012 - Tanaka , et al. April 26, 2	2005-04-26
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same App 20050082476 - Hiroi, Takashi ; et al.	2005-04-21
Circuit-pattern inspection apparatus App 20050043903 - Nara, Yasuhiko ; et al.	2005-02-24
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same Grant 6,828,554 - Hiroi , et al. December 7, 2	2004-12-07
Method of classifying defects App 20040218806 - Miyamoto, Atsushi ; et al.	2004-11-04
Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus App 20040217287 - Watanabe, Masahiro ; et al.	2004-11-04
Convergent charged particle beam apparatus and inspection method using same App 20040211919 - Tanaka, Maki ; et al.	2004-10-28
Image processing unit for wafer inspection tool App 20040170313 - Nakano, Michio ; et al.	2004-09-02
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same App 20040164244 - Hiroi, Takashi ; et al.	2004-08-26
Inspection method, apparatus and system for circuit pattern Grant 6,759,655 - Nara , et al. July 6, 2	2004-07-06
Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus Grant 6,753,518 - Watanabe , et al. June 22, 2	2004-06-22
Convergent charged particle beam apparatus and inspection method using same Grant 6,744,057 - Tanaka , et al. June 1, 2	2004-06-01
Pattern inspecting method and apparatus thereof, and pattern inspecting method on basis of electron beam images and apparatus thereof App 20040086170 - Shishido, Chie ; et al.	2004-05-06
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same Grant 6,717,142 - Hiroi , et al. April 6, 2	2004-04-06
Pattern inspection method and apparatus using electron beam App 20040028272 - Hiroi, Takashi ; et al.	2004-02-12
Image classification method, observation method, and apparatus thereof with different stage moving velocities Grant 6,657,221 - Nakagaki , et al. December 2, 2	2003-12-02
Convergent charged particle beam apparatus and inspection method using same App 20030197130 - Tanaka, Maki ; et al.	2003-10-23
Method and apparatus for inspecting integrated circuit pattern App 20030169060 - Shinada, Hiroyuki ; et al.	2003-09-11
Pattern inspection method and apparatus using electron beam Grant 6,614,022 - Hiroi , et al. September 2, 2	2003-09-02
Pattern inspecting method and apparatus thereof, and pattern inspecting method on basis of electron beam images and apparatus thereof Grant 6,614,923 - Shishido , et al. September 2, 2	2003-09-02
Visual inspection method and apparatus therefor Grant 6,587,581 - Matsuyama , et al. July 1, 2	2003-07-01
Inspection method, apparatus and system for circuit pattern Grant 6,567,168 - Nara , et al. May 20, 2	2003-05-20
Convergent charged particle beam apparatus and inspection method using same Grant 6,559,459 - Tanaka , et al. May 6, 2	2003-05-06
Pattern inspection method and system therefor App 20030062487 - Hiroi, Takashi ; et al.	2003-04-03
Apparatus for inspecting a specimen App 20030063792 - Hiroi, Takashi ; et al.	2003-04-03
Method and its apparatus for inspecting a pattern App 20030007677 - Hiroi, Takashi ; et al.	2003-01-09
Inspection method, apparatus and system for circuit pattern Grant 6,504,609 - Nara , et al. January 7, 2	2003-01-07
Inspection method, apparatus and system for circuit pattern Grant 6,493,082 - Nara , et al. December 10, 2	2002-12-10
Image classification method, obervation method, and apparatus thereof App 20020171051 - Nakagaki, Ryo ; et al.	2002-11-21
Inspection method, apparatus and system for circuit pattern Grant 6,480,279 - Nara , et al. November 12, 2	2002-11-12
Circuit pattern inspection method and apparatus App 20020114506 - Hiroi, Takashi ; et al.	2002-08-22
Inspection method, apparatus and system for circuit pattern App 20020113967 - Nara, Yasuhiko ; et al.	2002-08-22
Inspection method, apparatus and system for circuit pattern App 20020109088 - Nara, Yasuhiko ; et al.	2002-08-15
Inspection method, apparatus and system for circuit pattern App 20020105648 - Nara, Yasuhiko ; et al.	2002-08-08
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same App 20020100872 - Hiroi, Takashi ; et al.	2002-08-01
Method and system for inspecting a pattern App 20020094120 - Hiroi, Takashi ; et al.	2002-07-18
Inspection method, apparatus and system for circuit pattern Grant 6,421,122 - Nara , et al. July 16, 2	2002-07-16
Pattern inspection method and apparatus App 20020057831 - Hiroi, Takashi ; et al.	2002-05-16
Convergent charged particle beam apparatus and inspection method using same App 20020053643 - Tanaka, Maki ; et al.	2002-05-09
Pattern inspection method and apparatus App 20020054703 - Hiroi, Takashi ; et al.	2002-05-09
Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus App 20020053634 - Watanabe, Masahiro ; et al.	2002-05-09
Circuit pattern inspection method and apparatus App 20020051565 - Hiroi, Takashi ; et al.	2002-05-02
Method of inspecting a pattern on a substrate Grant 6,376,854 - Shishido , et al. April 23, 2	2002-04-23
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same Grant 6,373,054 - Hiroi , et al. April 16, 2	2002-04-16
Pattern inspection method and apparatus using electron beam App 20020030166 - Hiroi, Takashi ; et al.	2002-03-14
Method and apparatus for inspecting integrated circuit pattern App 20020027440 - Shinada, Hiroyuki ; et al.	2002-03-07
Convergent charged particle beam apparatus and inspection method using same Grant 6,335,532 - Tanaka , et al. January 1, 2	2002-01-01
Electron beam exposure or system inspection of measurement apparatus and its method and height detection apparatus Grant 6,333,510 - Watanabe , et al. December 25, 2	2001-12-25
Method of inspecting a pattern and an apparatus thereof and a method of processing a specimen App 20010033683 - Tanaka, Maki ; et al.	2001-10-25
Method of inspecting pattern and apparatus thereof App 20010030300 - Shishido, Chie ; et al.	2001-10-18
Inspection method, apparatus and system for circuit pattern App 20010021019 - Nara, Yasuhiko ; et al.	2001-09-13
Inspection method, apparatus and system for circuit pattern App 20010019411 - Nara, Yasuhiko ; et al.	2001-09-06
Inspection method, apparatus and system for circuit pattern App 20010015805 - Nara, Yasuhiko ; et al.	2001-08-23
Inspection method, apparatus and system for circuit pattern App 20010011706 - Nara, Yasuhiko ; et al.	2001-08-09
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same App 20010002697 - Hiroi, Takashi ; et al.	2001-06-07
Method of inspecting pattern and apparatus thereof with a differential brightness image detection Grant 6,236,057 - Shishido , et al. May 22, 2	2001-05-22
Method and apparatus for inspecting integrated circuit pattern Grant 6,172,363 - Shinada , et al. January 9, 2	2001-01-09
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same Grant 6,172,365 - Hiroi , et al. January 9, 2	2001-01-09
Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus Grant 6,107,637 - Watanabe , et al. August 22, 2	2000-08-22
Method of inspecting pattern and apparatus thereof Grant 6,087,673 - Shishido , et al. July 11, 2	2000-07-11
Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same Grant 5,986,263 - Hiroi , et al. November 16, 1	1999-11-16
Pattern checking method and checking apparatus Grant 5,649,022 - Maeda , et al. July 15, 1	1997-07-15
Method and apparatus for pattern detection Grant 5,430,548 - Hiroi , et al. July 4, 1	1995-07-04
Chipping detection system and method Grant 5,157,735 - Maeda , et al. October 20, 1	1992-10-20
Method and apparatus for detecting patterns Grant 5,153,444 - Maeda , et al. October 6, 1	1992-10-06
Apparatus and method for inspecting soldered portions Grant 4,772,125 - Yoshimura , et al. September 20, 1	1988-09-20
Inspection method and apparatus for joint junction states Grant 4,641,527 - Hiroi , et al. February 10, 1	1987-02-10