| Patent | Date |
|---|
Diaphragm Valve
App 20220268365 - HIRATA; Kaoru ; et al. | 2022-08-25 |
Pressure-type flow control device and flow control method
Grant 11,416,011 - Sugita , et al. August 16, 2 | 2022-08-16 |
Liquid level meter, vaporizer equipped with the same, and liquid level detection method
Grant 11,402,250 - Hidaka , et al. August 2, 2 | 2022-08-02 |
Self-diagnosis method for flow rate control device
Grant 11,391,608 - Sugita , et al. July 19, 2 | 2022-07-19 |
Flow Rate Control Device
App 20220197316 - HIRATA; Kaoru ; et al. | 2022-06-23 |
Piezoelectric driven valve, pressure-type flow rate control device, and vaporization supply device
Grant 11,346,457 - Dohi , et al. May 31, 2 | 2022-05-31 |
Flow rate control device and abnormality detection method using flow rate control device
Grant 11,313,756 - Nagase , et al. April 26, 2 | 2022-04-26 |
Flow rate control method and flow rate control device
Grant 11,269,362 - Hirata , et al. March 8, 2 | 2022-03-08 |
Fluid control device
Grant 11,226,641 - Hirata , et al. January 18, 2 | 2022-01-18 |
Flow rate control method and flow rate control device
Grant 11,216,016 - Hirata , et al. January 4, 2 | 2022-01-04 |
Fluid control device, method for controlling fluid control device, and fluid control system
Grant 11,137,779 - Hirata , et al. October 5, 2 | 2021-10-05 |
Flow Rate Control Method And Flow Rate Control Device
App 20210240208 - HIRATA; Kaoru ; et al. | 2021-08-05 |
Piezoelectric Driven Valve, Pressure-type Flow Rate Control Device, And Vaporization Supply Device
App 20210239230 - DOHI; Ryousuke ; et al. | 2021-08-05 |
Flow rate control device
Grant 11,079,774 - Sugita , et al. August 3, 2 | 2021-08-03 |
Piezoelectric-element-driven valve and flow rate control device
Grant 11,054,052 - Dohi , et al. July 6, 2 | 2021-07-06 |
Flow Rate Control Method And Flow Rate Control Device
App 20210157341 - HIRATA; Kaoru ; et al. | 2021-05-27 |
Flow Rate Control Device And Flow Rate Control Method
App 20210141399 - SUGITA; Katsuyuki ; et al. | 2021-05-13 |
Concentration detection method and pressure-type flow rate control device
Grant 10,962,513 - Nagase , et al. March 30, 2 | 2021-03-30 |
Pressure-type flow rate control device and flow rate self-diagnosis method using critical expansion condition
Grant 10,928,813 - Nagase , et al. February 23, 2 | 2021-02-23 |
Pressure-based flow rate control device and malfunction detection method therefor
Grant 10,883,866 - Sugita , et al. January 5, 2 | 2021-01-05 |
Flow rate signal correction method and flow rate control device employing same
Grant 10,884,436 - Sugita , et al. January 5, 2 | 2021-01-05 |
Pressure type flow rate control device, and flow rate calculating method and flow rate control method for same
Grant 10,884,435 - Nagase , et al. January 5, 2 | 2021-01-05 |
Pressure-type flow rate control device
Grant 10,838,435 - Hirata , et al. November 17, 2 | 2020-11-17 |
Self-diagnosis Method For Flow Rate Control Device
App 20200348158 - SUGITA; Katsuyuki ; et al. | 2020-11-05 |
Flow Rate Control Device
App 20200348704 - SUGITA; Katsuyuki ; et al. | 2020-11-05 |
Flow Rate Control Device And Abnormality Detection Method Using Flow Rate Control Device
App 20200232873 - NAGASE; Masaaki ; et al. | 2020-07-23 |
Valve with built-in orifice, and pressure-type flow rate control device
Grant 10,648,572 - Sawada , et al. | 2020-05-12 |
Vaporization supply apparatus
Grant 10,646,844 - Hidaka , et al. | 2020-05-12 |
Flow rate control device
Grant 10,641,407 - Hirai , et al. | 2020-05-05 |
Liquid level indicator and liquid raw material vaporization feeder
Grant 10,604,840 - Hidaka , et al. | 2020-03-31 |
Liquid Level Meter, Vaporizer Equipped With The Same, And Liquid Level Detection Method
App 20200088561 - HIDAKA; Atsushi ; et al. | 2020-03-19 |
Pressure-type Flow Control Device And Flow Control Method
App 20200033895 - SUGITA; Katsuyuki ; et al. | 2020-01-30 |
Piezoelectric-element-driven Valve And Flow Rate Control Device
App 20200018413 - DOHI; Ryousuke ; et al. | 2020-01-16 |
Concentration Detection Method And Pressure-type Flow Rate Control Device
App 20200018736 - NAGASE; Masaaki ; et al. | 2020-01-16 |
Gas divided flow supplying apparatus for semiconductor manufacturing equipment
Grant 10534376 - | 2020-01-14 |
Pressure-type flow controller
Grant 10,386,863 - Hirata , et al. A | 2019-08-20 |
Pressure type flow control system with flow monitoring, and method for detecting anomaly in fluid supply system and handling method at abnormal monitoring flow rate using the same
Grant 10,386,861 - Hirata , et al. A | 2019-08-20 |
Pressure-type Flow Rate Control Device
App 20190250648 - HIRATA; Kaoru ; et al. | 2019-08-15 |
Fluid Control Device
App 20190243391 - HIRATA; Kaoru ; et al. | 2019-08-08 |
Pressure-type flow rate control device
Grant 10,372,145 - Hirose , et al. | 2019-08-06 |
Pressure Type Flow Rate Control Device, And Flow Rate Calculating Method And Flow Rate Control Method For Same
App 20190227577 - NAGASE; Masaaki ; et al. | 2019-07-25 |
Valve With Built-in Orifice, And Pressure-type Flow Rate Control Device
App 20190178389 - SAWADA; Yohei ; et al. | 2019-06-13 |
Fluid Control Device, Method For Controlling Fluid Control Device, And Fluid Control System
App 20190129452 - HIRATA; Kaoru ; et al. | 2019-05-02 |
Liquid level detection circuit, liquid level meter, container provided with liquid level meter, and vaporizer using container
Grant 10,274,356 - Hirata , et al. | 2019-04-30 |
Pressure-type flow rate control device
Grant 10,261,522 - Nagase , et al. | 2019-04-16 |
Pressure-type Flow Rate Control Device And Flow Rate Self-diagnosis Method
App 20190094847 - NAGASE; Masaaki ; et al. | 2019-03-28 |
Flow Rate Control Device
App 20190085988 - HIRAI; Toru ; et al. | 2019-03-21 |
Piezoelectric element-driven valve and flow rate control device including piezoelectric element-driven valve
Grant 10,174,858 - Hirata , et al. J | 2019-01-08 |
Flow Rate Signal Correction Method And Flow Rate Control Device Employing Same
App 20180314271 - SUGITA; Katsuyuki ; et al. | 2018-11-01 |
Pressure-based Flow Rate Control Device And Malfunction Detection Method Therefor
App 20180283914 - SUGITA; Katsuyuki ; et al. | 2018-10-04 |
Flow rate range variable type flow rate control apparatus
Grant 9,921,089 - Ohmi , et al. March 20, 2 | 2018-03-20 |
Vaporization Supply Apparatus
App 20180071702 - HIDAKA; Atsushi ; et al. | 2018-03-15 |
Pressure type flow control system with flow monitoring
Grant 9,870,006 - Hirata , et al. January 16, 2 | 2018-01-16 |
Pressure-type flow control device and method for preventing overshooting at start of flow control performed by said device
Grant 9,841,770 - Hirata , et al. December 12, 2 | 2017-12-12 |
Liquid Level Indicator And Liquid Raw Material Vaporization Feeder
App 20170327949 - Hidaka; Atsushi ; et al. | 2017-11-16 |
Liquid Level Detection Circuit, Liquid Level Meter, Container Provided With Liquid Level Meter, And Vaporizer Using Container
App 20170268919 - HIRATA; Kaoru ; et al. | 2017-09-21 |
Piezoelectric Element-driven Valve And Flow Rate Control Device Including Piezoelectric Element-driven Valve
App 20170254430 - Hirata; Kaoru ; et al. | 2017-09-07 |
Multi-hole orifice plate for flow control, and flow controller using the same
Grant 9,746,856 - Hirata , et al. August 29, 2 | 2017-08-29 |
Pressure Type Flow Control System With Flow Monitoring, And Method For Detecting Anomaly In Fluid Supply System And Handling Method At Abnormal Monitoring Flow Rate Using The Same
App 20170234455 - Hirata; Kaoru ; et al. | 2017-08-17 |
Pressure-type Flow Rate Control Device
App 20170212531 - NAGASE; Masaaki ; et al. | 2017-07-27 |
Pressure type flow control system with flow monitoring, and method for detecting anomaly in fluid supply system and handling method at abnormal monitoring flow rate using the same
Grant 9,632,511 - Hirata , et al. April 25, 2 | 2017-04-25 |
Raw material vaporizing and supplying apparatus equipped with raw material concentration
Grant 9,631,777 - Nagase , et al. April 25, 2 | 2017-04-25 |
Raw material gas supply apparatus for semiconductor manufacturing equipment
Grant 9,556,518 - Nagase , et al. January 31, 2 | 2017-01-31 |
Pressure Type Flow Control System With Flow Monitoring
App 20160370808 - Hirata; Kaoru ; et al. | 2016-12-22 |
Pressure-type Flow Rate Control Device
App 20160349763 - Hirose; Takashi ; et al. | 2016-12-01 |
Pressure type flow control system with flow monitoring
Grant 9,494,947 - Hirata , et al. November 15, 2 | 2016-11-15 |
Pressure-type Flow Control Device And Method For Preventing Overshooting At Start Of Flow Control Performed By Said Device
App 20160327963 - HIRATA; Kaoru ; et al. | 2016-11-10 |
Flow Rate Range Variable Type Flow Rate Control Apparatus
App 20160274595 - Ohmi; Tadahiro ; et al. | 2016-09-22 |
Pressure-type Flow Controller
App 20160252913 - HIRATA; Kaoru ; et al. | 2016-09-01 |
Flow rate range variable type flow rate control apparatus
Grant 9,383,758 - Ohmi , et al. July 5, 2 | 2016-07-05 |
Flow Rate Range Variable Type Flow Rate Control Apparatus
App 20160109886 - Ohmi; Tadahiro ; et al. | 2016-04-21 |
Multi-hole Orifice Plate For Flow Control, And Flow Controller Using The Same
App 20160070271 - HIRATA; Kaoru ; et al. | 2016-03-10 |
Piezoelectrically driven valve and piezoelectrically driven flow rate control device
Grant 9,163,743 - Hidaka , et al. October 20, 2 | 2015-10-20 |
Gasket type orifice and pressure type flow rate control apparatus for which the orifice is employed
Grant 9,133,951 - Ohmi , et al. September 15, 2 | 2015-09-15 |
Gas Divided Flow Supplying Apparatus For Semiconductor Manufacturing Equipment
App 20150192932 - Nishino; Kouji ; et al. | 2015-07-09 |
Flow Rate Range Variable Type Flow Rate Control Apparatus
App 20150160662 - Ohmi; Tadahiro ; et al. | 2015-06-11 |
Flow rate range variable type flow rate control apparatus
Grant 9,010,369 - Ohmi , et al. April 21, 2 | 2015-04-21 |
Gas supply apparatus equipped with vaporizer
Grant 8,931,506 - Nagata , et al. January 13, 2 | 2015-01-13 |
Gas Branched Flow Supplying Apparatus For Semiconductor Manufacturing Equipment
App 20140373935 - Nishino; Kouji ; et al. | 2014-12-25 |
Raw Material Vaporizing And Supplying Apparatus Equipped With Raw Material Concentration
App 20140299206 - Nagase; Masaaki ; et al. | 2014-10-09 |
Pressure Type Flow Control System With Flow Monitoring, And Method For Detecting Anomaly In Fluid Supply System And Handling Method At Abnormal Monitoring Flow Rate Using The Same
App 20140230911 - Hirata; Kaoru ; et al. | 2014-08-21 |
Raw Material Vaporizing And Supplying Apparatus
App 20140216339 - Nagase; Masaaki ; et al. | 2014-08-07 |
Raw Material Gas Supply Apparatus For Semiconductor Manufacturing Equipment
App 20140190581 - Nagase; Masaaki ; et al. | 2014-07-10 |
Pressure Type Flow Control System With Flow Monitoring
App 20140182692 - Hirata; Kaoru ; et al. | 2014-07-03 |
Automatic pressure regulator for flow rate regulator
Grant 8,757,197 - Hirata , et al. June 24, 2 | 2014-06-24 |
Raw Material Vaporizing And Supplying Apparatus
App 20140124064 - Hidaka; Atsushi ; et al. | 2014-05-08 |
Method for detecting malfunction of valve on the downstream side of throttle mechanism of pressure type flow control apparatus
Grant 8,606,412 - Nagase , et al. December 10, 2 | 2013-12-10 |
Gas supply system for semiconductor manufacturing facilities
Grant 8,601,976 - Nishino , et al. December 10, 2 | 2013-12-10 |
Pressure control valve driving circuit for pressure type flow rate control device with flow rate self-diagnosis function
Grant 8,587,180 - Sugita , et al. November 19, 2 | 2013-11-19 |
Flow rate ratio variable type fluid supply apparatus
Grant 8,555,920 - Hirata , et al. October 15, 2 | 2013-10-15 |
Flow Rate Range Variable Type Flow Rate Control Apparatus
App 20130220451 - Ohmi; Tadahiro ; et al. | 2013-08-29 |
Flow rate range variable type flow rate control apparatus
Grant 8,418,714 - Ohmi , et al. April 16, 2 | 2013-04-16 |
Piezoelectrically Driven Valve and Piezoelectrically Driven Flow Rate Control Device
App 20120273061 - Hidaka; Atsushi ; et al. | 2012-11-01 |
Piezoelectric element driven metal diaphragm control valve
Grant 8,191,856 - Matsumoto , et al. June 5, 2 | 2012-06-05 |
Normally open type piezoelectric element driven metal diaphragm control valve
Grant 8,181,932 - Matsumoto , et al. May 22, 2 | 2012-05-22 |
Piezoelectric driven control valve
Grant 8,162,286 - Sawada , et al. April 24, 2 | 2012-04-24 |
Evaporation supply apparatus for raw material and automatic pressure regulating device used therewith
Grant 8,047,510 - Hirata , et al. November 1, 2 | 2011-11-01 |
Automatic Pressure Regulator For Flow Rate Regulator
App 20110139271 - Hirata; Kaoru ; et al. | 2011-06-16 |
Discontinuous Switching Fluid Flow Rate Control Method Using Pressure Type Flow Rate Control Device
App 20110120566 - OHMI; Tadahiro ; et al. | 2011-05-26 |
Method for detecting abnormality in fluid supply line using fluid control apparatus with pressure sensor
Grant 7,945,414 - Nagase , et al. May 17, 2 | 2011-05-17 |
Pressure Control Valve Driving Circuit For Pressure Type Flow Rate Control Device With Flow Rate Self-diagnosis Function
App 20110108138 - Sugita; Katsuyuki ; et al. | 2011-05-12 |
Gas Supply Apparatus Equipped With Vaporizer
App 20110100483 - Nagata; Atsushi ; et al. | 2011-05-05 |
Piezoelectric Element Driven Metal Diaphragm Control Valve
App 20110042595 - MATSUMOTO; Atsushi ; et al. | 2011-02-24 |
Normally Open Type Piezoelectric Element Driven Metal Diaphragm Control Valve
App 20100294964 - Matsumoto; Atsushi ; et al. | 2010-11-25 |
Flow Rate Ratio Variable Type Fluid Supply Apparatus
App 20100229976 - Hirata; Kaoru ; et al. | 2010-09-16 |
Gas Supply System For Semiconductor Manufactruing Facilities
App 20100192854 - Nishino; Kouji ; et al. | 2010-08-05 |
Flow Rate Range Variable Type Flow Rate Control Apparatus
App 20100139775 - Ohmi; Tadahiro ; et al. | 2010-06-10 |
Piezoelectric Driven Control Valve
App 20100127196 - Sawada; Yohei ; et al. | 2010-05-27 |
Corrosion-resistant metal made sensor for fluid and a fluid supply device for which the sensor is employed
Grant 7,654,137 - Hirata , et al. February 2, 2 | 2010-02-02 |
Evaporation Supply Apparatus For Raw Material And Automatic Pressure Regulating Device Used Therewith
App 20100012026 - Hirata; Kaoru ; et al. | 2010-01-21 |
Method For Detecting Abnormality In Fluid Supply Line Using Fluid Control Apparatus With Pressure Sensor
App 20090326719 - Nagase; Masaaki ; et al. | 2009-12-31 |
Method For Detecting Malfunction Of Valve On The Downstream Side Of Throttle Mechanism Of Pressure Type Flow Control Apparatus
App 20090292399 - Nagase; Masaaki ; et al. | 2009-11-26 |
Gasket Type Orifice And Pressure Type Flow Rate Control Apparatus For Which The Orifice Is Employed
App 20090171507 - Ohmi; Tadahiro ; et al. | 2009-07-02 |
Corrosion resistant metal made thermal type mass flow rate sensor and a fluid supply device using the same
Grant 7,363,810 - Ikeda , et al. April 29, 2 | 2008-04-29 |
Corrosion-resistant metal made sensor for fluid and a fluid supply device for which the sensor is employed
App 20070168150 - Hirata; Kaoru ; et al. | 2007-07-19 |
Thermal type mass flow rate sensor made of corrosion resistant metal, and fluid supply equipment using the same
App 20060053878 - Ikeda; Nobukazu ; et al. | 2006-03-16 |
Oscillatory type pressure sensor
Grant 6,938,489 - Esashi , et al. September 6, 2 | 2005-09-06 |
Vibrating type pressure sensor
App 20040231424 - Esashi, Masayoshi ; et al. | 2004-11-25 |
Fragrant fiber
Grant 4,713,291 - Sasaki , et al. December 15, 1 | 1987-12-15 |
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