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Magnet array for moving magnet planar motor
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Motor With Force Constant Modeling And Identification For Flexible Mode Control
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Method for determining a commutation offset and for determining a compensation map for a stage
Grant 9,465,305 - Yang , et al. October 11, 2 | 2016-10-11 |
Magnet Array For Moving Magnet Planar Motor
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Coil Switching Method for Moving Magnet Planar Motor
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Dynamic Correction to Remove the Influence of Motor Coil Flux on Hall Sensor Measurement
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Method for determing a commutation offset and for determining a compensation map for a stage
Grant 9,013,134 - Yang , et al. April 21, 2 | 2015-04-21 |
Movable body drive method, movable body apparatus, exposure method, exposure apparatus, and device manufacturing method
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Terminal and method for producing the same
Grant 8,341,999 - Hirano January 1, 2 | 2013-01-01 |
Synchronization control devices and methods
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Method For Determing A Commutation Offset And For Determining A Compensation Map For A Stage
App 20120127447 - Yang; Pai-Hsueh ; et al. | 2012-05-24 |
Method For Determining A Commutation Offset And For Determining A Compensation Map For A Stage
App 20120113405 - Yang; Pai-Hsueh ; et al. | 2012-05-10 |
On-machine methods for identifying and compensating force-ripple and side-forces produced by actuators on a multiple-axis stage
Grant 8,140,288 - Yang , et al. March 20, 2 | 2012-03-20 |
Movable Body Drive Method, Movable Body Apparatus, Exposure Method, Exposure Apparatus, And Device Manufacturing Method
App 20110177461 - SHIBAZAKI; Yuichi ; et al. | 2011-07-21 |
Terminal And Method For Producing The Same
App 20090104798 - Hirano; Kazuhiro | 2009-04-23 |
On-machine methods for identifying and compensating force-ripple and side-forces produced by actuators on a multiple-axis stage
App 20080275661 - Yang; Pai-Hsueh ; et al. | 2008-11-06 |
Minimum force output control method for counter-mass with cable
Grant 7,366,642 - Hsin , et al. April 29, 2 | 2008-04-29 |
E/I core actuator commutation formula and control method
Grant 7,253,576 - Yang , et al. August 7, 2 | 2007-08-07 |
Minimum force output control method for counter-mass with cable
App 20060241873 - Hsin; Yi-Ping ; et al. | 2006-10-26 |
Auto-calibration of attraction-only type actuator commutations
Grant 7,034,474 - Yang , et al. April 25, 2 | 2006-04-25 |
E/I core actuator commutation formula and control method
App 20050218842 - Yang, Pai-Hsueh ; et al. | 2005-10-06 |
Auto calibration of attraction-only type actuator commutations
App 20050173992 - Yang, Pai Hsueh ; et al. | 2005-08-11 |
Control system and method for improving tracking accuracy of a stage through processing of information from previous operations
App 20040128918 - Yang, Pai-Hsueh ; et al. | 2004-07-08 |
Client information collecting method, client information providing method, point assigning method, merchandise information providing method, and merchandise information collection apparatus using network
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Exposure method and apparatus
Grant 5,329,336 - Hirano , et al. July 12, 1 | 1994-07-12 |
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