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Foreign substance removal apparatus and foreign substance detection apparatus
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Fastening member, and obstacle detecting device employing fastening member
Grant 10,422,875 - Hirakawa Sept | 2019-09-24 |
Foreign Substance Removal Apparatus And Foreign Substance Detection Apparatus
App 20190105691 - HIRAKAWA; Osamu ; et al. | 2019-04-11 |
Foreign substance removal apparatus and foreign substance detection apparatus
Grant 10,160,015 - Hirakawa , et al. Dec | 2018-12-25 |
Separation apparatus, separation system, and separation method
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Separation method, separation apparatus, and separation system
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Peeling device, peeling system and peeling method
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Separation apparatus, separation system, and separation method
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Ultrasonic sensor
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Substrate conveyance apparatus and substrate peeling system
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Ultrasonic transducer device and method of attaching the same
Grant 9,620,099 - Hirakawa April 11, 2 | 2017-04-11 |
Cleaning device, peeling system, cleaning method and computer-readable storage medium
Grant 9,613,797 - Hirakawa , et al. April 4, 2 | 2017-04-04 |
Fastening Member, And Obstacle Detecting Device Employing Fastening Member
App 20170038470 - HIRAKAWA; OSAMU | 2017-02-09 |
Foreign Substance Removal Apparatus And Foreign Substance Detection Apparatus
App 20160296982 - HIRAKAWA; Osamu ; et al. | 2016-10-13 |
Ultrasonic Sensor
App 20160291139 - TSUJI; Takashi ; et al. | 2016-10-06 |
Substrate holding apparatus and substrate holding method
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Separation system, separation method, program and computer storage medium
Grant 9,330,898 - Hirakawa , et al. May 3, 2 | 2016-05-03 |
Ultrasonic wave device
Grant 9,296,350 - Hirakawa , et al. March 29, 2 | 2016-03-29 |
Cleaning Device, Peeling System, Cleaning Method and Computer-Readable Storage Medium
App 20150314339 - HIRAKAWA; Osamu ; et al. | 2015-11-05 |
Substrate inverting device, substrate inverting method, and peeling system
Grant 8,997,822 - Iwashita , et al. April 7, 2 | 2015-04-07 |
Delamination system
Grant 8,997,821 - Hirakawa April 7, 2 | 2015-04-07 |
Ultrasonic Transducer Device And Method Of Attaching The Same
App 20140347959 - HIRAKAWA; Osamu | 2014-11-27 |
Ultrasonic Wave Device
App 20140346303 - HIRAKAWA; Osamu ; et al. | 2014-11-27 |
Separation Apparatus, Separation System, Separation Method And Non-transitory Computer Readable Storage Medium
App 20140284000 - SOMA; Yasutaka ; et al. | 2014-09-25 |
Substrate Conveyance Apparatus And Substrate Peeling System
App 20140234033 - IWASHITA; Yasuharu ; et al. | 2014-08-21 |
Bonding System, Substrate Processing System, And Bonding Method
App 20140158303 - Hirakawa; Osamu ; et al. | 2014-06-12 |
Delamination System
App 20140069588 - HIRAKAWA; Osamu | 2014-03-13 |
Separation Apparatus, Separation System, And Separation Method
App 20140020846 - Hirakawa; Osamu ; et al. | 2014-01-23 |
Separation Method, Separation Apparatus, And Separation System
App 20130327484 - Hirakawa; Osamu ; et al. | 2013-12-12 |
Substrate Inverting Device, Substrate Inverting Method, And Peeling System
App 20130292062 - Iwashita; Yasuharu ; et al. | 2013-11-07 |
Peeling Device, Peeling System And Peeling Method
App 20130269879 - Hirakawa; Osamu ; et al. | 2013-10-17 |
Substrate Holding Apparatus And Substrate Holding Method
App 20130264780 - IWASHITA; Yasuharu ; et al. | 2013-10-10 |
Joint apparatus, joint method, and computer storage medium
Grant 8,490,856 - Hirakawa July 23, 2 | 2013-07-23 |
Joint System, Substrate Processing System, And Joint Method
App 20130153116 - Hirakawa; Osamu ; et al. | 2013-06-20 |
Separation Apparatus, Separation System, And Separation Method
App 20130146228 - HIRAKAWA; Osamu ; et al. | 2013-06-13 |
Separation System, Separation Method, Program And Computer Storage Medium
App 20130146229 - Hirakawa; Osamu ; et al. | 2013-06-13 |
Cleaning Method And Cleaning Apparatus
App 20130000684 - SOMA; Yasutaka ; et al. | 2013-01-03 |
Substrate Processing Apparatus, Substrate Processing Method, Program And Computer Storage Medium
App 20120329000 - Hirakawa; Osamu | 2012-12-27 |
Joint Apparatus, Joint Method, And Computer Storage Medium
App 20120318856 - Hirakawa; Osamu | 2012-12-20 |
Exposure apparatus and device manufacturing method
Grant 8,330,934 - Nagasaka , et al. December 11, 2 | 2012-12-11 |
Exposure apparatus and device manufacturing method
Grant 7,924,402 - Nagasaka , et al. April 12, 2 | 2011-04-12 |
Heating apparatus, heating method, coating apparatus, and storage medium
Grant 7,838,801 - Hirakawa , et al. November 23, 2 | 2010-11-23 |
Exposure apparatus and device manufacturing method
App 20100157262 - Nagasaka; Hiroyuki ; et al. | 2010-06-24 |
Exposure apparatus and device manufacturing method
Grant 7,697,110 - Nagasaka , et al. April 13, 2 | 2010-04-13 |
Coater/developer and coating/developing method
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Exposure Apparatus and Device Manufacturing Method
App 20070242241 - Nagasaka; Hiroyuki ; et al. | 2007-10-18 |
Heating apparatus, heating method, coating apparatus, and storage medium
App 20070194005 - Hirakawa; Osamu ; et al. | 2007-08-23 |
Coater/developer and coating/developing method
App 20070122551 - Yamamoto; Taro ; et al. | 2007-05-31 |
Exposure apparatus and device manufacturing method
App 20060231206 - Nagasaka; Hiroyuki ; et al. | 2006-10-19 |
Coating apparatus and method for applying a liquid to a semiconductor wafer including selecting a nozzle on a stand by state
Grant 5,089,305 - Ushijima , et al. February 18, 1 | 1992-02-18 |
Resist process apparatus
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Exposure apparatus
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Coating apparatus and method for applying a liquid to a semiconductor wafer, including selecting a nozzle in a stand-by state
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