Hirahara; Robert T.

Patent Applications and Registrations

Patent applications and USPTO patent grants for Hirahara; Robert T..The latest application filed is for "substrate chucking and dechucking methods".

Company Profile

2.12.12

Hirahara; Robert T. - San Jose CA

*profile and listings may contain filings by different individuals or companies with the same name. Review application materials to confirm ownership/assignment.

Patent Activity

Patent	Date
Substrate chucking and dechucking methods Grant 11,114,326 - Boyd, Jr. , et al. September 7, 2	2021-09-07
Method to remove residual charge on a electrostatic chuck during the de-chucking step Grant 10,347,522 - Boyd, Jr. , et al. July 9, 2	2019-07-09
Substrate Chucking And Dechucking Methods App 20190206712 - BOYD, JR.; Wendell Glenn ; et al.	2019-07-04
Thermal radiation barrier for substrate processing chamber components Grant 10,177,014 - Raj , et al. J	2019-01-08
Methods and apparatus for electrostatic chuck repair and refurbishment Grant 10,049,908 - Raj , et al. August 14, 2	2018-08-14
High temperature fine grain aluminum heater Grant 9,917,001 - Desai , et al. March 13, 2	2018-03-13
Method To Remove Residual Charge On A Electrostatic Chuck During The De-chucking Step App 20170263487 - BOYD, JR.; Wendell Glen ; et al.	2017-09-14
Pad design for electrostatic chuck surface Grant 9,613,846 - Raj , et al. April 4, 2	2017-04-04
Methods And Apparatus For Electrostatic Chuck Repair And Refurbishment App 20160329230 - RAJ; Govinda ; et al.	2016-11-10
Radially Outward Pad Design For Electrostatic Chuck Surface App 20160230269 - RAJ; Govinda ; et al.	2016-08-11
Methods and apparatus for electrostatic chuck repair and refurbishment Grant 9,349,630 - Raj , et al. May 24, 2	2016-05-24
Pad Design For Electrostatic Chuck Surface App 20150146339 - RAJ; Govinda ; et al.	2015-05-28
Methods And Apparatus For Electrostatic Chuck Repair And Refurbishment App 20140268478 - RAJ; Govinda ; et al.	2014-09-18
Thermal Radiation Barrier For Substrate Processing Chamber Components App 20140165915 - RAJ; Govinda ; et al.	2014-06-19
Measuring flow properties of multiple gas nozzles of a gas distributor Grant 8,464,594 - Narendrnath , et al. June 18, 2	2013-06-18
Electrostatic chuck electrical balancing circuit repair Grant 8,320,099 - Hirahara , et al. November 27, 2	2012-11-27
Electrostatic Chuck Electrical Balancing Circuit Repair App 20120124819 - HIRAHARA; ROBERT T. ; et al.	2012-05-24
Electrostatic chuck electrical balancing circuit repair Grant 8,064,185 - Hirahara , et al. November 22, 2	2011-11-22
Measuring Flow Properties Of Multiple Gas Nozzles Of A Gas Distributor App 20110217208 - NARENDRNATH; Kadthala R. ; et al.	2011-09-08
Electrostatic Chuck Electrical Balancing Circuit Repair App 20100061032 - Hirahara; Robert T. ; et al.	2010-03-11
High Temperature Fine Grain Aluminum Heater App 20090184093 - DESAI; ABHI ; et al.	2009-07-23
Substrate Support Assembly App 20080190364 - Mahon; Christopher Richard ; et al.	2008-08-14

uspto.report is an independent third-party trademark research tool that is not affiliated, endorsed, or sponsored by the United States Patent and Trademark Office (USPTO) or any other governmental organization. The information provided by uspto.report is based on publicly available data at the time of writing and is intended for informational purposes only.

While we strive to provide accurate and up-to-date information, we do not guarantee the accuracy, completeness, reliability, or suitability of the information displayed on this site. The use of this site is at your own risk. Any reliance you place on such information is therefore strictly at your own risk.

All official trademark data, including owner information, should be verified by visiting the official USPTO website at www.uspto.gov. This site is not intended to replace professional legal advice and should not be used as a substitute for consulting with a legal professional who is knowledgeable about trademark law.