loadpatents
Patent applications and USPTO patent grants for HIRAHARA; Kazuhiro.The latest application filed is for "polymer material for self-assembly, self-assembled film, method for producing self-assembled film, pattern, and method for forming pattern".
Patent | Date |
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Polymer Material For Self-assembly, Self-assembled Film, Method For Producing Self-assembled Film, Pattern, And Method For Forming Pattern App 20190040177 - HIMI; Toshiyuki ;   et al. | 2019-02-07 |
Polymer Material For Self-assembly, Self-assembled Film, And Method For Producing Self-assembled Film App 20170129984 - TAKANO; Atsushi ;   et al. | 2017-05-11 |
Continuous Reaction Apparatus And Method Of Continuous Polymerization Using The Same App 20170022300 - HIRAHARA; Kazuhiro ;   et al. | 2017-01-26 |
Substrate processing system Grant 8,641,829 - Horita , et al. February 4, 2 | 2014-02-04 |
Silicone resin composition and optical material Grant 8,604,126 - Hamada , et al. December 10, 2 | 2013-12-10 |
Substrate Processing System App 20130298947 - HORITA; Tomoki ;   et al. | 2013-11-14 |
Substrate processing system Grant 8,506,714 - Horita , et al. August 13, 2 | 2013-08-13 |
Preparation process of trisilylamine Grant 8,461,367 - Hamada , et al. June 11, 2 | 2013-06-11 |
Silicone Resin Composition And Optical Material App 20120184674 - HAMADA; Yoshitaka ;   et al. | 2012-07-19 |
Method For Preparing Purified Aminosilane App 20120165564 - Hamada; Yoshitaka ;   et al. | 2012-06-28 |
Preparation Process Of Trisilylamine App 20110178322 - Hamada; Yoshitaka ;   et al. | 2011-07-21 |
Semiconductor device producing method and substrate processing apparatus Grant 7,981,815 - Miya , et al. July 19, 2 | 2011-07-19 |
Semiconductor Device Producing Method and Substrate Processing Apparatus App 20090053906 - Miya; Hironobu ;   et al. | 2009-02-26 |
Substrate Processing System App 20080302302 - Horita; Tomoki ;   et al. | 2008-12-11 |
Organometallic compound vaporizing/feeding system Grant 6,987,565 - Hirahara , et al. January 17, 2 | 2006-01-17 |
Chemical amplification resist compositions Grant 6,737,214 - Takeda , et al. May 18, 2 | 2004-05-18 |
Organometallic compound vaporizing/feeding system App 20040056044 - Hirahara, Kazuhiro ;   et al. | 2004-03-25 |
Liquid organometallic compound vaporizing/feeding system App 20040056368 - Hirahara, Kazuhiro ;   et al. | 2004-03-25 |
Resist composition and patterning process Grant 6,641,975 - Takeda , et al. November 4, 2 | 2003-11-04 |
Resist composition and patterning process App 20020039701 - Takeda, Takanobu ;   et al. | 2002-04-04 |
Preparation of crosslinked solid polymer electrolyte Grant 6,322,924 - Hirahara , et al. November 27, 2 | 2001-11-27 |
Chemical amplification resist compositions App 20010031421 - Takeda, Takanobu ;   et al. | 2001-10-18 |
Cross-linked polymer solid electrolyte, method of manufacturing cross-linked solid polymer electrolyte, composite solid electrolyte, and thin solid cell employing composite solid electrolyte Grant 6,096,234 - Nakanishi , et al. August 1, 2 | 2000-08-01 |
Method for vaporizing and supplying organometal compounds Grant 5,377,616 - Mihira , et al. January 3, 1 | 1995-01-03 |
Apparatus for vaporizing and supplying organometal compounds Grant 5,160,542 - Mihira , et al. November 3, 1 | 1992-11-03 |
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