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Tungsten Oxide Powder And Method For Producing Tungsten Oxide Powder App 20220002166 - FUKUSHI; Daisuke ;   et al. | 2022-01-06 |
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Method for manufacturing ceramic circuit board Grant 11,129,282 - Kato , et al. September 21, 2 | 2021-09-21 |
Photon Counting Radiation Detector And Radiographic Inspection Device Using The Same App 20210175268 - KAKUSHIMA; Kuniyuki ;   et al. | 2021-06-10 |
Photon counting-type radiation detector and radiological inspection device using same Grant 10,964,836 - Kakushima , et al. March 30, 2 | 2021-03-30 |
Semiconductor Light-emitting Element And Method For Manufacturing Same App 20200176633 - HIRAMATSU; Ryosuke ;   et al. | 2020-06-04 |
Method For Manufacturing Ceramic Circuit Board App 20200170118 - KATO; Hiromasa ;   et al. | 2020-05-28 |
Nano Metal Compound Particles, Coating Material And Film Using The Same, Method For Producing Film, And Method Of Producing Nano App 20200048107 - SHIGESATO; Yuzo ;   et al. | 2020-02-13 |
Photon Counting-type Radiation Detector And Radiological Inspection Device Using Same App 20200041663 - KAKUSHIMA; Kuniyuki ;   et al. | 2020-02-06 |
Semiconductor Light-emitting Element App 20200013924 - KAMIYAMA; Satoshi ;   et al. | 2020-01-09 |
Semiconductor Solid State Battery App 20190296401 - Sasaki; Atsuya ;   et al. | 2019-09-26 |
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Processing apparatus, processing method, and manufacturing method of electronic device Grant 10,242,861 - Sato , et al. | 2019-03-26 |
Substrate treatment apparatus, substrate treatment method, and etchant Grant 10,147,619 - Sato , et al. De | 2018-12-04 |
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Method Of Manufacturing Layered Object, Device Of Manufacturing Layered Object, And Slurry App 20170008231 - HIRABAYASHI; Hideaki ;   et al. | 2017-01-12 |
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Substrate Treatment Apparatus And Substrate Treatment Method App 20160025410 - IGARASHI; Junichi ;   et al. | 2016-01-28 |
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Treatment Apparatus, Method For Manufacturing Treatment Liquid, And Method For Manufacturing Electronic Device App 20140076355 - HIRABAYASHI; Hideaki ;   et al. | 2014-03-20 |
Treatment Apparatus And Treatment Method App 20140061023 - HIRABAYASHI; Hideaki ;   et al. | 2014-03-06 |
Method For Reproducing Template And Reproducing Apparatus App 20130233829 - KOBAYASHI; Masako ;   et al. | 2013-09-12 |
Transparent Conductive Material, Dispersion Liquid, Transparent Conductive Film, And Methods For Manufacturing Same App 20130147089 - MURAYAMA; Hirotoshi ;   et al. | 2013-06-13 |
Substrate Processing Method And Substrate Processing Apparatus App 20130008868 - UOZUMI; Yoshihiro ;   et al. | 2013-01-10 |
Template, Surface Processing Method Of Template, Surface Processing Apparatus Of Template, And Pattern Formation Method App 20120242002 - KOBAYASHI; Masako ;   et al. | 2012-09-27 |
Apparatus And Method Of Processing Substrate App 20120067847 - Sakurai; Naoaki ;   et al. | 2012-03-22 |
Etching Method, Method For Manufacturing Microstructure, And Etching Apparatus App 20110143549 - TANGE; Makiko ;   et al. | 2011-06-16 |
Polishing cloth and method of manufacturing semiconductor device Grant 7,884,020 - Hirabayashi , et al. February 8, 2 | 2011-02-08 |
Polishing Cloth And Method Of Manufacturing Semiconductor Device App 20080032504 - HIRABAYASHI; Hideaki ;   et al. | 2008-02-07 |
Polishing cloth and method of manufacturing semiconductor device Grant 7,291,188 - Hirabayashi , et al. November 6, 2 | 2007-11-06 |
Copper-based Metal Polishing Solution And Method For Manufacturing Semiconductor Device App 20070105376 - HIRABAYASHI; Hideaki ;   et al. | 2007-05-10 |
Polishing cloth, polishing apparatus and method of manufacturing semiconductor devices App 20060276113 - Hirabayashi; Hideaki ;   et al. | 2006-12-07 |
Polishing cloth, polishing apparatus and method of manufacturing semiconductor devices Grant 7,112,125 - Hirabayashi , et al. September 26, 2 | 2006-09-26 |
Copper-based metal polishing solution and method for manufacturing semiconductor device App 20050199589 - Hirabayashi, Hideaki ;   et al. | 2005-09-15 |
Polishing cloth and method of manufacturing semiconductor device App 20050148185 - Hirabayashi, Hideaki ;   et al. | 2005-07-07 |
Copper-based Metal Polishing Composition, Method For Manufacturing A Semiconductor Device, Polishing Composition, Aluminum-based Metal Polishing Composition, And Tungsten-based Metal Polishing Composition Grant 6,861,010 - Hirabayashi , et al. March 1, 2 | 2005-03-01 |
Semiconductor device and method of manufacturing the same App 20030214010 - Toyoda, Hiroshi ;   et al. | 2003-11-20 |
Polishing cloth, polishing apparatus and method of manufacturing semiconductor devices App 20030199230 - Hirabayashi, Hideaki ;   et al. | 2003-10-23 |
Copper-based metal polishing solution and method for manufacturing semiconductor device App 20030036267 - Hirabayashi, Hideaki ;   et al. | 2003-02-20 |
Copper-based metal polishing composition, method for manufacturing a semiconductor device, polishing composition, aluminum-based metal polishing composition, and tungsten-based metal polishing composition App 20020160608 - Hirabayashi, Hideaki ;   et al. | 2002-10-31 |
Semiconductor device and method of manufacturing the same App 20010013617 - Toyoda, Hiroshi ;   et al. | 2001-08-16 |
Flow rate control valve and flow rate control system Grant 6,230,738 - Watanabe , et al. May 15, 2 | 2001-05-15 |
Copper-based metal polishing solution and method for manufacturing a semiconductor device Grant 6,046,110 - Hirabayashi , et al. April 4, 2 | 2000-04-04 |
Polishing agent and polishing method using the same Grant 5,770,095 - Sasaki , et al. June 23, 1 | 1998-06-23 |
Copper-based metal polishing solution and method for manufacturing semiconductor device Grant 5,575,885 - Hirabayashi , et al. November 19, 1 | 1996-11-19 |