| Patent | Date |
|---|
Metrology method, patterning device, apparatus and computer program
Grant 11,385,553 - Zhou , et al. July 12, 2 | 2022-07-12 |
Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method
Grant 11,314,174 - De Winter , et al. April 26, 2 | 2022-04-26 |
Method For Metrology Optimization
App 20220082944 - REHMAN; Samee Ur ; et al. | 2022-03-17 |
Method And Apparatus To Determine A Patterning Process Parameter
App 20220066330 - TSIATMAS; Anagnostis ; et al. | 2022-03-03 |
Method And Apparatus To Determine A Patterning Process Parameter
App 20210384086 - VAN LEEST; Adriaan Johan ; et al. | 2021-12-09 |
Method And Apparatus To Determine A Patterning Process Parameter
App 20210335678 - VAN LEEST; Adriaan Johan ; et al. | 2021-10-28 |
Method and apparatus to determine a patterning process parameter
Grant 11,145,557 - Van Leest , et al. October 12, 2 | 2021-10-12 |
Method and apparatus to determine a patterning process parameter
Grant 11,143,972 - Tsiatmas , et al. October 12, 2 | 2021-10-12 |
Method and apparatus to determine a patterning process parameter
Grant 11,101,185 - Van Leest , et al. August 24, 2 | 2021-08-24 |
Method and apparatus to determine a patterning process parameter
Grant 11,101,184 - Van Leest , et al. August 24, 2 | 2021-08-24 |
Metrology Method, Patterning Device, Apparatus And Computer Program
App 20210255553 - ZHOU; Zili ; et al. | 2021-08-19 |
Method Of Determining Information About A Patterning Process, Method Of Reducing Error In Measurement Data, Method Of Calibrating A Metrology Process, Method Of Selecting Metrology Targets
App 20210255552 - VENSELAAR; Joannes Jitse ; et al. | 2021-08-19 |
Method and apparatus for measuring a parameter of a lithographic process, substrate and patterning devices for use in the method
Grant 11,092,900 - Van Der Schaar , et al. August 17, 2 | 2021-08-17 |
Method of determining information about a patterning process, method of reducing error in measurement data, method of calibrating a metrology process, method of selecting metrology targets
Grant 11,022,897 - Venselaar , et al. June 1, 2 | 2021-06-01 |
Metrology method, patterning device, apparatus and computer program
Grant 10,996,570 - Zhou , et al. May 4, 2 | 2021-05-04 |
Method and apparatus for measuring a parameter of interest using image plane detection techniques
Grant 10,983,445 - Pandey , et al. April 20, 2 | 2021-04-20 |
Method And Apparatus To Determine A Patterning Process Parameter
App 20210035871 - VAN LEEST; Adriaan Johan ; et al. | 2021-02-04 |
Metrology method and apparatus with increased bandwidth
Grant 10,901,323 - Cramer , et al. January 26, 2 | 2021-01-26 |
Method Of Controlling A Patterning Process, Device Manufacturing Method
App 20200356013 - VAN DONGEN; Jeroen ; et al. | 2020-11-12 |
Method and apparatus to determine a patterning process parameter
Grant 10,811,323 - Van Leest , et al. October 20, 2 | 2020-10-20 |
Metrology Method and Apparatus with Increased Bandwidth
App 20200319562 - CRAMER; Hugo Augustinus Joseph ; et al. | 2020-10-08 |
Methods and Patterning Devices and Apparatuses for Measuring Focus Performance of a Lithographic Apparatus, Device Manufacturing
App 20200264522 - DE WINTER; Laurentius Cornelius ; et al. | 2020-08-20 |
Metrology method and apparatus with increased bandwidth
Grant 10,732,514 - Cramer , et al. | 2020-08-04 |
Method And Apparatus To Determine A Patterning Process Parameter
App 20200185281 - VAN LEEST; Adriaan Johan ; et al. | 2020-06-11 |
Method And Apparatus To Determine A Patterning Process Parameter
App 20200126872 - VAN LEEST; Adriaan Johan ; et al. | 2020-04-23 |
Method And System To Monitor A Process Apparatus
App 20200124968 - TEL; Wim Tjibbo ; et al. | 2020-04-23 |
Metrology Method, Patterning Device, Apparatus and Computer Program
App 20200110342 - ZHOU; Zili ; et al. | 2020-04-09 |
Method and apparatus to determine a patterning process parameter, associated with a change in a physical configuration, using measured pixel optical characteristic values
Grant 10,615,084 - Van Leest , et al. | 2020-04-07 |
Method and Apparatus for Measuring a Parameter of a Lithographic Process, Substrate and Patterning Devices for use in the Method
App 20200073254 - VAN DER SCHAAR; Maurits ; et al. | 2020-03-05 |
Method and system to monitor a process apparatus
Grant 10,571,806 - Tel , et al. Feb | 2020-02-25 |
Method and apparatus to determine a patterning process parameter
Grant 10,546,790 - Van Leest , et al. Ja | 2020-01-28 |
Method And Apparatus To Determine A Patterning Process Parameter
App 20200013685 - VAN LEEST; Adriaan Johan ; et al. | 2020-01-09 |
Beat patterns for alignment on small metrology targets
Grant 10,488,768 - Fagginger Auer , et al. Nov | 2019-11-26 |
Method and apparatus for measuring a parameter of a lithographic process, substrate and patterning devices for use in the method
Grant 10,481,503 - Van Der Schaar , et al. Nov | 2019-11-19 |
Methods and patterning devices and apparatuses for measuring focus performance of a lithographic apparatus, device manufacturing method
Grant 10,474,039 - Hinnen , et al. Nov | 2019-11-12 |
Method and apparatus to determine a patterning process parameter using an asymmetric optical characteristic distribution portion
Grant 10,453,758 - Van Leest , et al. Oc | 2019-10-22 |
Inspection method, lithographic apparatus, mask and substrate
Grant 10,394,137 - Van Dommelen , et al. A | 2019-08-27 |
Metrology Method and Apparatus with Increased Bandwidth
App 20190258177 - CRAMER; Hugo Augustinus Joseph ; et al. | 2019-08-22 |
Method And Apparatus For Measuring A Parameter Of Interest Using Image Plane Detection Techniques
App 20190250094 - PANDEY; Nitesh ; et al. | 2019-08-15 |
Method And System To Monitor A Process Apparatus
App 20190196334 - TEL; Wim Tjibbo ; et al. | 2019-06-27 |
Method Of Determining Information About A Patterning Process, Method Of Reducing Error In Measurement Data, Method Of Calibratin
App 20190171115 - VENSELAAR; Joannes Jitse ; et al. | 2019-06-06 |
Method And Apparatus To Determine A Patterning Process Parameter
App 20190155173 - Tsiatmas; Anagnostis ; et al. | 2019-05-23 |
Separation Of Contributions To Metrology Data
App 20190086810 - TEL; Wim Tjibbo ; et al. | 2019-03-21 |
Beat Patterns For Alignment On Small Metrology Targets
App 20190072860 - FAGGINGER AUER; Bastiaan Onne ; et al. | 2019-03-07 |
Method for determining a process window for a lithographic process, associated apparatuses and a computer program
Grant 10,133,191 - Tel , et al. November 20, 2 | 2018-11-20 |
Inspection Method, Lithographic Apparatus, Mask And Substrate
App 20180253018 - VAN DOMMELEN; Youri Johannes Laurentius Maria ; et al. | 2018-09-06 |
Inspection apparatus, inspection method, lithographic apparatus, patterning device and manufacturing method
Grant 10,054,862 - Van Oosten , et al. August 21, 2 | 2018-08-21 |
Inspection method, lithographic apparatus, mask and substrate
Grant 10,001,711 - Van Dommelen , et al. June 19, 2 | 2018-06-19 |
Inspection apparatus, inspection method, lithographic apparatus and manufacturing method
Grant 10,001,710 - Staals , et al. June 19, 2 | 2018-06-19 |
Method of determining dose and focus, inspection apparatus, patterning device, substrate and device manufacturing method
Grant 9,964,853 - Vanoppen , et al. May 8, 2 | 2018-05-08 |
Method of determining focus, inspection apparatus, patterning device, substrate and device manufacturing method
Grant 9,939,735 - Hinnen , et al. April 10, 2 | 2018-04-10 |
Inspection Apparatus, Inspection Method, Lithographic Apparatus, Patterning Device and Manufacturing Method
App 20180046091 - VAN OOSTEN; Anton Bernhard ; et al. | 2018-02-15 |
Method And Apparatus To Determine A Patterning Process Parameter
App 20170256465 - VAN LEEST; Adriaan Johan ; et al. | 2017-09-07 |
Method And Apparatus To Determine A Patterning Process Parameter
App 20170255736 - VAN LEEST; Adriaan Johan ; et al. | 2017-09-07 |
Method And Apparatus To Determine A Patterning Process Parameter
App 20170255737 - VAN LEEST; Adriaan Johan ; et al. | 2017-09-07 |
Method And Apparatus To Determine A Patterning Process Parameter
App 20170255738 - VAN LEEST; Adriaan Johan ; et al. | 2017-09-07 |
Method And Apparatus To Determine A Patterning Process Parameter
App 20170255112 - VAN LEEST; Adriaan Johan ; et al. | 2017-09-07 |
Methods and Patterning Devices and Apparatuses for Measuring Focus Performance of a Lithographic Apparatus, Device Manufacturing Method
App 20170176870 - HINNEN; Paul Christiaan ; et al. | 2017-06-22 |
Method For Determining A Process Window For A Lithographic Process, Associated Apparatuses And A Computer Program
App 20170160648 - TEL; Wim Tjibbo ; et al. | 2017-06-08 |
Method of Determining Focus, Inspection Apparatus, Patterning Device, Substrate and Device Manufacturing Method
App 20170153554 - HINNEN; Paul Christiaan ; et al. | 2017-06-01 |
Method of determining focus, inspection apparatus, patterning device, substrate and device manufacturing method
Grant 9,594,299 - Hinnen , et al. March 14, 2 | 2017-03-14 |
Method And Apparatus for Measuring a Parameter of a Lithographic Process, Substrate and Patterning Devices for use in the Method
App 20170059999 - VAN DER SCHAAR; Maurits ; et al. | 2017-03-02 |
Inspection Apparatus, Inspection Method, Lithographic Apparatus and Manufacturing Method
App 20170023867 - STAALS; Frank ; et al. | 2017-01-26 |
Inspection Apparatus, Inspection Method, Lithographic Apparatus, Patterning Device and Manufacturing Method
App 20160363871 - VAN OOSTEN; Anton Bernhard ; et al. | 2016-12-15 |
Inspection Method, Lithographic Apparatus, Mask And Substrate
App 20160313656 - VAN DOMMELEN; Youri Johannes Laurentius Maria ; et al. | 2016-10-27 |
Lithographic apparatus and device manufacturing method
Grant 9,217,916 - Hinnen , et al. December 22, 2 | 2015-12-22 |
Method of Determining Focus, Inspection Apparatus, Patterning Device, Substrate and Device Manufacturing Method
App 20150338749 - HINNEN; Paul Christiaan ; et al. | 2015-11-26 |
Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method
Grant 9,182,682 - Cramer , et al. November 10, 2 | 2015-11-10 |
Method of Determining Dose and Focus, Inspection Apparatus, Patterning Device, Substrate and Device Manufacturing Method
App 20150293458 - Vanoppen; Peter Clement Paul ; et al. | 2015-10-15 |
Inspection method for lithography
Grant 8,830,447 - Den Boef , et al. September 9, 2 | 2014-09-09 |
Method of Measuring a Characteristic
App 20140199634 - QUAEDACKERS; Johannes Anna ; et al. | 2014-07-17 |
Method of measuring a characteristic
Grant 8,685,626 - Quaedackers , et al. April 1, 2 | 2014-04-01 |
Lithographic Apparatus and Device Manufacturing Method
App 20120300182 - HINNEN; Paul Christiaan ; et al. | 2012-11-29 |
Lithographic apparatus and device manufacturing method
Grant 8,263,296 - Hinnen , et al. September 11, 2 | 2012-09-11 |
Alignment systems and methods for lithographic systems
Grant 8,139,217 - Van Bilsen , et al. March 20, 2 | 2012-03-20 |
Inspection Method for Lithography
App 20120044472 - Den Boef; Arie Jeffrey ; et al. | 2012-02-23 |
Inspection Method and Apparatus, Lithographic Apparatus, Lithographic Processing Cell and Device Manufacturing Method
App 20110249247 - Cramer; Hugo Augustinus Joseph ; et al. | 2011-10-13 |
Alignment Systems And Methods For Lithographic Systems
App 20110128520 - Van Bilsen; Franciscus Bernardus Maria ; et al. | 2011-06-02 |
Alignment systems and methods for lithographic systems
Grant 7,880,880 - Van Bilsen , et al. February 1, 2 | 2011-02-01 |
Producing a Marker Pattern and Measurement of an Exposure-Related Property of an Exposure Apparatus
App 20100328636 - Quaedackers; Johannes Anna ; et al. | 2010-12-30 |
Lithographic Apparatus and Device Manufacturing Method
App 20100233599 - HINNEN; Paul Christiaan ; et al. | 2010-09-16 |
Method of Measuring a Characteristic
App 20100227280 - Quaedackers; Johannes Anna ; et al. | 2010-09-09 |
Marker structure for optical alignment of a substrate, a substrate including such a marker structure, an alignment method for aligning to such a marker structure, and a lithographic projection apparatus
Grant 7,619,738 - Van Haren , et al. November 17, 2 | 2009-11-17 |
Lithographic apparatus and device manufacturing method
Grant 7,573,574 - Hinnen , et al. August 11, 2 | 2009-08-11 |
Alignment systems and methods for lithographic systems
Grant 7,439,531 - Van Bilsen , et al. October 21, 2 | 2008-10-21 |
Marker structure for optical alignment of a substrate, a substrate including such a marker structure, an alignment method for aligning to such a marker structure, and a lithographic projection apparatus
App 20080180668 - Van Haren; Richard Johannes Franciscus ; et al. | 2008-07-31 |
Alignment systems and methods for lithographic systems
Grant 7,332,732 - Van Bilsen , et al. February 19, 2 | 2008-02-19 |
Marker structure for optical alignment of a substrate, a substrate including such a marker structure, an alignment method for aligning to such a marker structure, and a lithographic projection apparatus
Grant 7,330,261 - Van Haren , et al. February 12, 2 | 2008-02-12 |
Alignment systems and methods for lithographic systems
Grant 7,329,888 - Van Bilsen , et al. February 12, 2 | 2008-02-12 |
Alignment systems and methods for lithographic systems
Grant 7,297,971 - Van Bilsen , et al. November 20, 2 | 2007-11-20 |
Alignment systems and methods for lithographic systems
App 20070176128 - Van Bilsen; Franciscus Bernardus Maria ; et al. | 2007-08-02 |
Alignment systems and methods for lithographic systems
App 20060091330 - Van Bilsen; Franciscus Bernardus Maria ; et al. | 2006-05-04 |
Alignment systems and methods for lithographic systems
App 20060086910 - Maria Van Bilsen; Franciscus Bernardus ; et al. | 2006-04-27 |
Alignment systems and methods for lithographic systems
App 20060081790 - Van Bilsen; Franciscus Bernardus Maria ; et al. | 2006-04-20 |
Alignment systems and methods for lithographic systems
App 20060081791 - Van Bilsen; Franciscus Bernardus Maria ; et al. | 2006-04-20 |
Alignment systems and methods for lithographic systems
App 20060081792 - Van Bilsen; Franciscus Bernardus Maria ; et al. | 2006-04-20 |
Lithographic apparatus and device manufacturing method
App 20060012779 - Hinnen; Paul Christiaan ; et al. | 2006-01-19 |
Lithographic apparatus and device manufacturing method
App 20060012763 - Hinnen; Paul Christiaan ; et al. | 2006-01-19 |
Alignment systems and methods for lithographic systems
App 20050189502 - Van Bilsen, Franciscus Bernardus Maria ; et al. | 2005-09-01 |
Marker structure for optical alignment of a substrate, a substrate including such a marker structure, an alignment method for aligning to such a marker structure, and a lithographic projection apparatus
App 20040114143 - Van Haren, Richard Johannes Franciscus ; et al. | 2004-06-17 |
| 